DE2209534B2 - Halbleiterbauteil mit einem einen pn-übergang aufweisenden Halbleiter-Schichtkörper und Verfahren zu dessen Herstellung - Google Patents

Halbleiterbauteil mit einem einen pn-übergang aufweisenden Halbleiter-Schichtkörper und Verfahren zu dessen Herstellung

Info

Publication number
DE2209534B2
DE2209534B2 DE2209534A DE2209534A DE2209534B2 DE 2209534 B2 DE2209534 B2 DE 2209534B2 DE 2209534 A DE2209534 A DE 2209534A DE 2209534 A DE2209534 A DE 2209534A DE 2209534 B2 DE2209534 B2 DE 2209534B2
Authority
DE
Germany
Prior art keywords
layer
semiconductor
semiconductor layer
temperature
zones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE2209534A
Other languages
German (de)
English (en)
Other versions
DE2209534A1 (de
Inventor
Jiri Manhattan Beach Calif. Sandera (V.St.A.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Space and Mission Systems Corp
Original Assignee
TRW Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TRW Inc filed Critical TRW Inc
Publication of DE2209534A1 publication Critical patent/DE2209534A1/de
Publication of DE2209534B2 publication Critical patent/DE2209534B2/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/64—Variable-capacitance diodes, e.g. varactors 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/69—Etching of wafers, substrates or parts of devices using masks for semiconductor materials
    • H10P50/691—Etching of wafers, substrates or parts of devices using masks for semiconductor materials for Group V materials or Group III-V materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/028—Dicing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/051—Etching

Landscapes

  • Electrodes Of Semiconductors (AREA)
DE2209534A 1971-04-05 1972-02-29 Halbleiterbauteil mit einem einen pn-übergang aufweisenden Halbleiter-Schichtkörper und Verfahren zu dessen Herstellung Pending DE2209534B2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13106571A 1971-04-05 1971-04-05

Publications (2)

Publication Number Publication Date
DE2209534A1 DE2209534A1 (de) 1972-12-07
DE2209534B2 true DE2209534B2 (de) 1975-02-06

Family

ID=22447695

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2209534A Pending DE2209534B2 (de) 1971-04-05 1972-02-29 Halbleiterbauteil mit einem einen pn-übergang aufweisenden Halbleiter-Schichtkörper und Verfahren zu dessen Herstellung

Country Status (5)

Country Link
US (1) US3685141A (https=)
DE (1) DE2209534B2 (https=)
FR (1) FR2131969B1 (https=)
IT (1) IT953604B (https=)
NL (1) NL7201274A (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3878553A (en) * 1972-12-26 1975-04-15 Texas Instruments Inc Interdigitated mesa beam lead diode and series array thereof
US3860945A (en) * 1973-03-29 1975-01-14 Rca Corp High frequency voltage-variable capacitor
US3962643A (en) * 1974-08-05 1976-06-08 Zenith Radio Corporation Abrupt junction varactor diode television tuner
US3965427A (en) * 1974-09-03 1976-06-22 Zenith Radio Corporation Television tuning system with precision substrate switch assembly
US4066485A (en) * 1977-01-21 1978-01-03 Rca Corporation Method of fabricating a semiconductor device
US4980315A (en) * 1988-07-18 1990-12-25 General Instrument Corporation Method of making a passivated P-N junction in mesa semiconductor structure
US6228734B1 (en) * 1999-01-12 2001-05-08 Semiconductor Components Industries Llc Method of manufacturing a capacitance semi-conductor device

Also Published As

Publication number Publication date
DE2209534A1 (de) 1972-12-07
IT953604B (it) 1973-08-10
FR2131969B1 (https=) 1977-09-02
NL7201274A (https=) 1972-10-09
FR2131969A1 (https=) 1972-11-17
US3685141A (en) 1972-08-22

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