DE2206597A1 - Verfahren und Vorrichtung zur Detektierung von staubförmigen Partikeln - Google Patents
Verfahren und Vorrichtung zur Detektierung von staubförmigen PartikelnInfo
- Publication number
- DE2206597A1 DE2206597A1 DE19722206597 DE2206597A DE2206597A1 DE 2206597 A1 DE2206597 A1 DE 2206597A1 DE 19722206597 DE19722206597 DE 19722206597 DE 2206597 A DE2206597 A DE 2206597A DE 2206597 A1 DE2206597 A1 DE 2206597A1
- Authority
- DE
- Germany
- Prior art keywords
- particles
- carrier
- layer
- liquid
- liquid layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title claims description 73
- 238000000034 method Methods 0.000 title claims description 24
- 238000001514 detection method Methods 0.000 title claims description 5
- 239000007788 liquid Substances 0.000 claims description 53
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 7
- 238000009736 wetting Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 3
- 229920001169 thermoplastic Polymers 0.000 claims description 3
- 239000004416 thermosoftening plastic Substances 0.000 claims description 3
- 238000011156 evaluation Methods 0.000 claims description 2
- 229920002545 silicone oil Polymers 0.000 claims description 2
- 230000007480 spreading Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 230000008021 deposition Effects 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008023 solidification Effects 0.000 claims 1
- 238000007711 solidification Methods 0.000 claims 1
- 239000000428 dust Substances 0.000 description 34
- 238000011088 calibration curve Methods 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- 210000001747 pupil Anatomy 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
Landscapes
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Dispersion Chemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Optical Measuring Cells (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH231471A CH535430A (de) | 1971-02-17 | 1971-02-17 | Verfahren und Vorrichtung zur Detektierung von staubförmigen Partikeln |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2206597A1 true DE2206597A1 (de) | 1972-08-31 |
Family
ID=4230893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19722206597 Pending DE2206597A1 (de) | 1971-02-17 | 1972-02-11 | Verfahren und Vorrichtung zur Detektierung von staubförmigen Partikeln |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3767306A (OSRAM) |
| CA (1) | CA954717A (OSRAM) |
| CH (1) | CH535430A (OSRAM) |
| DE (1) | DE2206597A1 (OSRAM) |
| FR (1) | FR2125896A5 (OSRAM) |
| GB (1) | GB1376017A (OSRAM) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4121247A (en) * | 1977-04-21 | 1978-10-17 | Eastman Kodak Company | Population and profile display of transparent bodies in a transparent mass |
| US4215939A (en) * | 1977-12-22 | 1980-08-05 | Owens-Illinois, Inc. | Glue drop detector |
| DE2932461A1 (de) * | 1979-08-10 | 1981-02-26 | Bosch Gmbh Robert | Verfahren zur beurteilung der qualitaet des systems wischblatt/scheibenoberflaeche |
| US4402607A (en) * | 1980-05-16 | 1983-09-06 | Gca Corporation | Automatic detector for microscopic dust on large-area, optically unpolished surfaces |
| US4441124A (en) * | 1981-11-05 | 1984-04-03 | Western Electric Company, Inc. | Technique for inspecting semiconductor wafers for particulate contamination |
| US4863268A (en) * | 1984-02-14 | 1989-09-05 | Diffracto Ltd. | Diffractosight improvements |
| US4636073A (en) * | 1984-10-31 | 1987-01-13 | International Business Machines Corporation | Universal calibration standard for surface inspection systems |
| US5206700A (en) * | 1985-03-14 | 1993-04-27 | Diffracto, Ltd. | Methods and apparatus for retroreflective surface inspection and distortion measurement |
| US5061068A (en) * | 1990-02-22 | 1991-10-29 | Research Triangle Institute | Process for detection of sub-micron particulate contamination on a bare (planar) substrate |
| US5168322A (en) * | 1991-08-19 | 1992-12-01 | Diffracto Ltd. | Surface inspection using retro-reflective light field |
| US5745238A (en) * | 1992-12-22 | 1998-04-28 | International Business Machines Corporation | Apparatus and method for non-destructive inspection and/or measurement |
| JPH06349916A (ja) * | 1993-04-30 | 1994-12-22 | Applied Materials Inc | 基板上の粒子検出方法及び装置 |
| JP3168961B2 (ja) * | 1997-10-06 | 2001-05-21 | 住友電気工業株式会社 | ダイヤモンド基板及びダイヤモンド基板の評価方法並びにダイヤモンド表面弾性波フィルタ |
| JP3919149B2 (ja) * | 2000-03-24 | 2007-05-23 | パイオニア株式会社 | 光ヘッド装置 |
| DE10221945C1 (de) * | 2002-05-13 | 2003-07-31 | Schott Glas | Verfahren und Vorrichtung zur Ermittlung von Fehlstellen in einem kontinuierlich fortbewegten Band aus transparentem Material |
| FR2993372B1 (fr) * | 2012-07-13 | 2015-04-10 | Commissariat Energie Atomique | Procede et systeme de reconstruction de proprietes optiques d'objets diffractants baignant dans un milieu liquide |
| CN103604731A (zh) * | 2013-11-25 | 2014-02-26 | 中煤科工集团重庆研究院有限公司 | 抗污染的粉尘检测机构 |
| JP7309640B2 (ja) * | 2020-03-18 | 2023-07-18 | 株式会社東芝 | 光学検査装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2604809A (en) * | 1948-06-01 | 1952-07-29 | Mitchell Reginald Fawn | Optical means for evaluating surface finish by measurement of differential light scattering in a schlieren type optical system |
| US2850239A (en) * | 1952-08-16 | 1958-09-02 | American Optical Corp | Counting device |
| US2950648A (en) * | 1954-03-03 | 1960-08-30 | Georgia Tech Res Inst | Microscope for viewing substantially transparent objects |
| US2918216A (en) * | 1956-08-31 | 1959-12-22 | Rca Corp | Particle counting apparatus |
| US2977847A (en) * | 1957-04-29 | 1961-04-04 | Univ Ohio State Res Found | Optical system for microscopes or similar instruments |
| US3335413A (en) * | 1963-12-19 | 1967-08-08 | Gen Electric | Wide band optical recording and narrow band reproduction on a thermo-plastic medium |
| SE315760B (OSRAM) * | 1966-04-27 | 1969-10-06 | Saab Ab |
-
1971
- 1971-02-17 CH CH231471A patent/CH535430A/de not_active IP Right Cessation
-
1972
- 1972-02-09 US US00224721A patent/US3767306A/en not_active Expired - Lifetime
- 1972-02-10 CA CA134,404A patent/CA954717A/en not_active Expired
- 1972-02-11 DE DE19722206597 patent/DE2206597A1/de active Pending
- 1972-02-14 FR FR7204841A patent/FR2125896A5/fr not_active Expired
- 1972-02-14 GB GB682172A patent/GB1376017A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US3767306A (en) | 1973-10-23 |
| GB1376017A (en) | 1974-12-04 |
| FR2125896A5 (OSRAM) | 1972-09-29 |
| CA954717A (en) | 1974-09-17 |
| CH535430A (de) | 1973-03-31 |
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