DE2204654B2 - - Google Patents

Info

Publication number
DE2204654B2
DE2204654B2 DE2204654A DE2204654A DE2204654B2 DE 2204654 B2 DE2204654 B2 DE 2204654B2 DE 2204654 A DE2204654 A DE 2204654A DE 2204654 A DE2204654 A DE 2204654A DE 2204654 B2 DE2204654 B2 DE 2204654B2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE2204654A
Other languages
German (de)
Other versions
DE2204654C3 (de
DE2204654A1 (de
Inventor
Karl-Heinz Dipl.-Ing.Dr. Rer.Nat. Mueller
Volker Rindfleisch
Moriz Von Rauch
Dieter Dipl.Phys. Willasch
Georg Dollmeier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE2204654A priority Critical patent/DE2204654C3/de
Priority to NL7217847A priority patent/NL7217847A/xx
Priority to US00324798A priority patent/US3835246A/en
Priority to GB310673A priority patent/GB1425181A/en
Priority to JP48011823A priority patent/JPS49107170A/ja
Publication of DE2204654A1 publication Critical patent/DE2204654A1/de
Publication of DE2204654B2 publication Critical patent/DE2204654B2/de
Application granted granted Critical
Publication of DE2204654C3 publication Critical patent/DE2204654C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
DE2204654A 1972-01-28 1972-01-28 Korpuskularstrahlgerät mit einem Leuchtschirm und einer Fernsehkamera Expired DE2204654C3 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE2204654A DE2204654C3 (de) 1972-01-28 1972-01-28 Korpuskularstrahlgerät mit einem Leuchtschirm und einer Fernsehkamera
NL7217847A NL7217847A (enrdf_load_html_response) 1972-01-28 1972-12-29
US00324798A US3835246A (en) 1972-01-28 1973-01-18 Television display system for electromagnetic beam apparatus
GB310673A GB1425181A (en) 1972-01-28 1973-01-22 Corpuscular beam apparatus
JP48011823A JPS49107170A (enrdf_load_html_response) 1972-01-28 1973-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2204654A DE2204654C3 (de) 1972-01-28 1972-01-28 Korpuskularstrahlgerät mit einem Leuchtschirm und einer Fernsehkamera

Publications (3)

Publication Number Publication Date
DE2204654A1 DE2204654A1 (de) 1973-08-02
DE2204654B2 true DE2204654B2 (enrdf_load_html_response) 1974-03-14
DE2204654C3 DE2204654C3 (de) 1974-10-10

Family

ID=5834691

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2204654A Expired DE2204654C3 (de) 1972-01-28 1972-01-28 Korpuskularstrahlgerät mit einem Leuchtschirm und einer Fernsehkamera

Country Status (5)

Country Link
US (1) US3835246A (enrdf_load_html_response)
JP (1) JPS49107170A (enrdf_load_html_response)
DE (1) DE2204654C3 (enrdf_load_html_response)
GB (1) GB1425181A (enrdf_load_html_response)
NL (1) NL7217847A (enrdf_load_html_response)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7609574A (nl) * 1975-09-03 1977-03-07 Siemens Ag Werkwijze voor de beeldweergave van de uit- gangsinformaties van een toestel dat een objekt aftast.
DE2542355A1 (de) * 1975-09-19 1977-03-24 Siemens Ag Durchstrahlungs-raster-elektronenmikroskop mit ringscheibenfoermigem detektor
JPS5248964A (en) * 1975-10-17 1977-04-19 Hitachi Ltd Transmission-type scanning electronic microscope
JPS5275261A (en) * 1975-12-19 1977-06-24 Jeol Ltd Test piece image dispaly unit
JPS5477060A (en) * 1977-12-01 1979-06-20 Hitachi Ltd Electron microscope
JPS5851664B2 (ja) * 1979-03-28 1983-11-17 株式会社日立製作所 試料像表示装置
JPS58155636A (ja) * 1982-03-12 1983-09-16 Hitachi Ltd ホログラフイ電子顕微鏡
US4673973A (en) * 1985-02-04 1987-06-16 National Biomedical Research Foundation Split-image, multi-power microscopic image display system and method
USRE33883E (en) * 1985-02-04 1992-04-14 National Biomedical Research Foundation Split-image multi-power microscopic image display system and method
US4651200A (en) * 1985-02-04 1987-03-17 National Biomedical Research Foundation Split-image, multi-power microscopic image display system and method
US4769698A (en) * 1985-10-04 1988-09-06 National Biomedical Research Foundation Interactive microscopic image display system and method
JP2702114B2 (ja) * 1986-10-03 1998-01-21 株式会社日立製作所 電子顕微鏡
JPS63122421A (ja) * 1986-11-12 1988-05-26 株式会社東芝 内視鏡装置
US5013915A (en) * 1988-05-20 1991-05-07 Hitachi, Ltd. Transmission type electron microscope
JPH05128991A (ja) * 1991-08-09 1993-05-25 Hikari Gijutsu Kenkyu Kaihatsu Kk 実時間表面モニター装置
JP3153277B2 (ja) * 1991-08-30 2001-04-03 株式会社日立製作所 透過形電子顕微鏡
JPH06213832A (ja) * 1993-01-18 1994-08-05 Shimadzu Corp 回折電子検出装置
US7325354B2 (en) * 2004-05-06 2008-02-05 Insight Technology, Inc. Weapon aiming device
DE102005063142B4 (de) * 2005-12-31 2008-03-06 Olympus Soft Imaging Solutions Gmbh Elektronenmikroskop, insbesondere Transmissions-Elektronenmikroskop
US20070236489A1 (en) * 2006-01-30 2007-10-11 Jung Edward K Positional display elements
US7745786B2 (en) * 2008-03-19 2010-06-29 Fama Leo A Method and apparatus allowing simultaneous direct observation and electronic capture of scintillation images in an electron microscope
JP5826064B2 (ja) * 2012-02-17 2015-12-02 株式会社日立ハイテクノロジーズ 電子顕微鏡

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2894160A (en) * 1954-09-09 1959-07-07 Sheldon Edward Emanuel Electron microscopes
US3345514A (en) * 1963-10-19 1967-10-03 Hitachi Ltd Television camera combined with an electron microscope and having a plurality of cathodoconductive targets
US3301949A (en) * 1964-03-02 1967-01-31 United Aircraft Corp Stored image control system for beam machining
US3333057A (en) * 1966-10-07 1967-07-25 Minnesota Mining & Mfg High density microfacsimile system
US3614311A (en) * 1968-02-28 1971-10-19 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device

Also Published As

Publication number Publication date
JPS49107170A (enrdf_load_html_response) 1974-10-11
DE2204654C3 (de) 1974-10-10
US3835246A (en) 1974-09-10
NL7217847A (enrdf_load_html_response) 1973-07-31
DE2204654A1 (de) 1973-08-02
GB1425181A (en) 1976-02-18

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
EHJ Ceased/non-payment of the annual fee