US3835246A - Television display system for electromagnetic beam apparatus - Google Patents

Television display system for electromagnetic beam apparatus Download PDF

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Publication number
US3835246A
US3835246A US00324798A US32479873A US3835246A US 3835246 A US3835246 A US 3835246A US 00324798 A US00324798 A US 00324798A US 32479873 A US32479873 A US 32479873A US 3835246 A US3835246 A US 3835246A
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US
United States
Prior art keywords
screen
window
area
picture
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00324798A
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English (en)
Inventor
K Muller
D Willasch
G Dollmeier
V Rindfleisch
M Rauch
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Siemens AG
Siemens Corp
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Siemens Corp
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Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
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Publication of US3835246A publication Critical patent/US3835246A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen

Definitions

  • An electromagnetic particle beam device such as an electron microscope, includes a fluorescent screen mounted in the focal plane of the beam for providing a direct image a television camera arranged behind a window in the fiourescent screen separately picks up and enlarges the part of the image which falls in the area of the window to permit simultaneous viewing of an overall picture and an electronically enlarged section of the picture.
  • TELEVISION DISPLAY SYSTEM FOR ELECTROMAGNETIC BEAM APPARATUS BACKGROUND OF THE INVENTION This invention relates to display systems for electromagnetic beam apparatus such as electron microscopes.
  • the present invention facilitates the investigation of objects at different magnifications using electromagnetic particle ray apparatus, particularly an electron microscope, which has a fluorescent screen for making the picture projected by the particle ray visible, as well as an arrangement for viewing the picture by means of atelevision camera and a television monitor.
  • electromagnetic particle ray apparatus particularly an electron microscope
  • the fluorescent screen has a window
  • the television camera is arranged in the beam path behind the window for picking up the part of the picture that passes through the window. This permits simultaneous viewing of an overall picture and an electronically enlarged section of the picture.
  • the overall picture and the enlarged section of the picture both can be presented to the use on television monitors arranged for convenient viewing by providing a separate television camera to pick up the picture projected on the fluorescent screen.
  • an observation window can be provided in the wall of the vacuum chamber of the apparatus to allow viewing the fluorescent screen directly, thus avoiding any image degradation by'the television transmission.
  • the picture projected on the fluorescent screen can be imaged by means of a light-optical lens system on the entrance plane of a television camera.
  • the television camera for transmitting the enlarged section of the picture can be used by arranging the ray paths of the overall picture and the picture section so that the overall picture and the enlarged section each occupy one-half of the entrance area of the camera.
  • the advantages of this arrangement are that only one transmission channel is required and that the overall and the section picture appear on a monitor side by side.
  • the overall picture can also be fed to the previously mentioned separate television camera, so that the overall picture and the enlarged sectional picture appear on separate monitors. In either case, the area corresponding to the enlarged section (i.e., the window of the fluorescent screen) appears dark in the overall picture.
  • At least one mirror may be arranged between the fluorescent screen and the light-optical lens system for directing the overall picture either out of the vacuum chamber into a television camera or within the vacuum chamber toward the television camera which is common for the overall picture and the enlarged sectional picture. It may be advantageous for the arrangement of the light-optical lens system and the mirrors to use a fluorescent screen which is light-transparent (transmission-type fluorescent screen), but the mirror and lens system can also be used to pick up and pass on the picture projected on a reflection-type fluorescent screen. In the latter case, the fluorescent screen is preferably arranged at an angle to the axis of the corpuscular beam to obtain a more favorable ray path.
  • the television monitor for reproducing the enlarged sectional picture may be situated either directly next to the corpuscular-ray apparatus or at any remote location
  • the picture screen of the monitor is located behind a second observation window in the direction of view through the first observation window described above for viewing the fluorescent screen.
  • the overall picture and the enlarged sectional picture are thereby presented in close physical relationship for convenient viewing by looking directly at or into the vacuum chamber of the apparatus.
  • the fluorescent screen is preferably hinged for rotation in the direction of the first observation window to provide a more favorable viewing angle or to pass the particle beam to a photographic recording device mounted behind the fluorescent screen.
  • an additional small fluorescent screen can be provided for closing the window-of the fluorescent screen on which the overall picture is produced so that the entire picture can be viewed without the darkened section caused'by the window.
  • FIG. 1 Shows an embodiment of an electron microscope with two mirrors and one television camera.
  • FIG. 2 shows another embodiment having one mirror and two television cameras.
  • FIG. 3 shows an embodiment similar toFIG. 2, in which the mirror is located in front of the fluorescent screen.
  • FIG. 4 shows a further embodiment with two observation windows and one television camera.
  • FIG. 1 is a Schematic drawing of an electron microscope l in cross section.
  • An electron beam 8 is generated by meansv of a cathode '2 and an anode cylinder 3 powered by a high-voltage source, not Shown.
  • a magnetic condenser lens 4 focuses the beam on an object 5 which is then magnified by a magnetic objective lens 6 and imaged by a projection lens 7 on a fluorescent screen 10. In the following discussion, this image will be called the overall picture.
  • the fluorescent screen 10 has a window 12 through which can pass a portion 9 of the electron beam representing a section of the overall picture.
  • the sectional beam 9 is directed toward a television camera 13, which is equipped with an image intensifier 14 and fiber optics 15 having about half of its entrance area provided with a fluorescent layer 16. This half of the entrance area corresponds to the projection area of beam 9.
  • the remaining area 22 of the entrance endof fiber optics 15 is available for the overallpicture, which is transmitted to the television camera 13 in the following manner.
  • Fluorescent screen 10 is arranged at an angle to the axis of beam 8 and is a transmission-type fluorescent screen (i.e., light-transparent).
  • a first mirror 17 located behind screen 10 reflects theimage which is visible on the lower side of the fluorescent screen approxi mately perpendicularly to the axis of the electron beam.
  • a second mirror 18 picks up the picture and defleets it again approximately parallel to the direction of beam 9. The overall picture is then imaged on the area 20 of the fiber optics 15 by a light-optical lens system 21.
  • Picture signals are therefore available 'at television camera 13 for the overall picture as well as for the sectional picture.
  • the picture signals are fed to a television monitor 23 via suitable amplifiers, not shown; the monitor shows the overall picture 24 and the sectional picture 25, which appears as a dark area 26 in the overall picture 24.
  • a beam 8 produces an overall picture on fluorescent screen 10, while a portion 9 passes through window 12 and furnishes a sectional picture.
  • a portion 9 passes through window 12 and furnishes a sectional picture.
  • the entire entrance area of television camera 13 is available for this sectional picture. Accordingly, fiber optics 15 is fully covered optics 32. The picture signals are amplified and fed to.
  • a second monitor 33 which shows the overall picture 24' on the entire picture screen, the sectional picture again appearing as a dark area 26.
  • An observation window 28 is arranged in wall 27 for direct viewing of fluorescent screen 10. This same arrangement can be provided also in the other illustrated embodiments if desired.
  • FIGS. 1 and 2 have transmission-type fluorescent screens, the mirrors being arranged behind the screen, as seen in the direction'of the rected toward a fluorescent screen 43 which is hinged for rotation about an axis 44.
  • the fluorescent screen 43 can be observed directly through a first observation window 45 in one side of housing 40.
  • a second observation window 46' is set in the opposite side of housing 40 with a television monitor 47 mounted behind the second window.
  • the observation windows 45 and 46 are arranged so that an observer, whose eye is indicated at 50, can view the fluorescent screen 43 as well as the picture screen'of the monitor 47.
  • the enlarged sectional picture which appears on the picture screen of the monitor 47 is obtained by a television camera 51 located in the path of electron beam 42 behind a window52 in fluorescent screen 43. An observer can therefore perceive simultaneously the overall picture on fluorescent screen 43 and an enlarged section on the picture screen of monitor 47.
  • a photographic recording device consisting of supply and storage magazines for photographic plates with a transport device for selectively placing the plates into the beam path can be mounted behind the fluorescent screen in a known manner to permit photographic records to be made by swinging the hinged screen out of the way.
  • window 52 of fluorescent screen 43 can be closed by a second fluorescent screen 54 to permit viewing the entire picture directly without the cutout section caused by the window.
  • fluorescent screen 54 is arranged behind fluorescent screen 43, but the same effect can be obtained if the additional fluorescent screen 54 is arranged in front of or is inserted directly into the window.
  • conventional mechanical devices not shown, can be provided for removably placing fluorescent screen 54 in the area of window 52.
  • the additional fluorescent screen can also be'used in the previously described embodiments.
  • a further feature of the embodiment of FIG. 4 is a device 53, for indicating the scale of magnification of either or both pictures, arranged between the second observation window 46 and fluorescent screen 43 to be in the field of view defined by the first observation window 45.
  • the indicating device can have luminous dials which give the scale of magnification as a numerical value.
  • the indicating device can be mounted outside the vacuum chamber, for instance, in such a manner that it can be read through the observation window 46.
  • FIG. 4 a reflection-type fluorescent For magnified viewing of fluorescent screen 43, a magnifying glass is further indicated in FIG. 4.
  • This magnifying glass may be mounted in a fixed position or removably or in such a manner that it can'be directed 'onto any point of the fluorescent screen as required.
  • the screen can be swung up partially, as shown by the dashed lines, so that it is perpendicular to the line of sight from the magnifying glass to provide sharp focus for the overall picture.
  • an improved image display system comprising:
  • a first screen located within the chamber in the path of the projected beam, the screen including material responsive to the beam particles for producing an optical image of the specimen, the material being distributed throughout the area of the screen except for a window section which passes a portion of the projected beam through the screen;
  • a television camera positioned behind the screen in the path of the passed portion of the projected beam for picking up the portion of the projected image that falls within the area of the window;
  • a television monitor connected to the television camera for displaying the image portion picked up by the camera.
  • first window located in one wall of the vacuum chamber to permit direct viewing of the first screen and a second window located in a wall of the vacuum chamber within the field of view through the first window, the television monitor being positioned outside the chamber with its viewing screen adjacent to the second window to permit simultaneous viewing of the overall picture on the first screen and the portion of the picture delineated by the window on the television monitor.
  • the first televiaperture having a 4.
  • the area of the entrance aperture of the first television camera is larger than the area of the layer of material responsive to the beam particles for producing an optical image
  • the display system further comprises a mirror positioned to reflect the overall image produced on the first screen toward the area of the entrance area that is not covered by the layer of material.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
US00324798A 1972-01-28 1973-01-18 Television display system for electromagnetic beam apparatus Expired - Lifetime US3835246A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2204654A DE2204654C3 (de) 1972-01-28 1972-01-28 Korpuskularstrahlgerät mit einem Leuchtschirm und einer Fernsehkamera

Publications (1)

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US3835246A true US3835246A (en) 1974-09-10

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US00324798A Expired - Lifetime US3835246A (en) 1972-01-28 1973-01-18 Television display system for electromagnetic beam apparatus

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US (1) US3835246A (enrdf_load_html_response)
JP (1) JPS49107170A (enrdf_load_html_response)
DE (1) DE2204654C3 (enrdf_load_html_response)
GB (1) GB1425181A (enrdf_load_html_response)
NL (1) NL7217847A (enrdf_load_html_response)

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4071759A (en) * 1975-12-19 1978-01-31 Nihon Denshi Kabushiki Kaisha Scanning electron device
US4091374A (en) * 1975-09-03 1978-05-23 Siemens Aktiengesellschaft Method for pictorially displaying output information generated by an object imaging apparatus
US4099055A (en) * 1975-10-17 1978-07-04 Hitachi, Ltd. Scanning transmission electron microscope
US4149074A (en) * 1975-09-19 1979-04-10 Siemens Aktiengesellschaft Detector for a scanning transmission-type electron microscope
US4206349A (en) * 1977-12-01 1980-06-03 Hitachi, Ltd. Electron microscope
US4385317A (en) * 1979-03-28 1983-05-24 Hitachi, Ltd. Specimen image display apparatus
US4532422A (en) * 1982-03-12 1985-07-30 Hitachi, Ltd. Electron holography microscope
WO1986004758A1 (en) * 1985-02-04 1986-08-14 National Biomedical Research Foundation Split-image, multi-power microscopic image display system and method
US4673973A (en) * 1985-02-04 1987-06-16 National Biomedical Research Foundation Split-image, multi-power microscopic image display system and method
US4769698A (en) * 1985-10-04 1988-09-06 National Biomedical Research Foundation Interactive microscopic image display system and method
US4777523A (en) * 1986-10-03 1988-10-11 Hitachi, Ltd. Electron microscope with television observation apparatus
US4821117A (en) * 1986-11-12 1989-04-11 Kabushiki Kaisha Toshiba Endoscopic system for producing fluorescent and visible images
US5013915A (en) * 1988-05-20 1991-05-07 Hitachi, Ltd. Transmission type electron microscope
USRE33883E (en) * 1985-02-04 1992-04-14 National Biomedical Research Foundation Split-image multi-power microscopic image display system and method
EP0529519A1 (en) * 1991-08-30 1993-03-03 Hitachi, Ltd. Transmission electron microscope
US5387794A (en) * 1993-01-18 1995-02-07 Shimadzu Corporation Detector for diffracted electrons
US20070236489A1 (en) * 2006-01-30 2007-10-11 Jung Edward K Positional display elements
US20080066363A1 (en) * 2004-05-06 2008-03-20 Grauslys Richard P Weapon aiming device
WO2009117077A3 (en) * 2008-03-19 2009-11-12 Fama Leo A Method and apparatus allowing simultaneous direct observation and electron capture of scintillation images in an electron microscope
JP2013168332A (ja) * 2012-02-17 2013-08-29 Hitachi High-Technologies Corp 電子顕微鏡

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05128991A (ja) * 1991-08-09 1993-05-25 Hikari Gijutsu Kenkyu Kaihatsu Kk 実時間表面モニター装置
DE102005063142B4 (de) * 2005-12-31 2008-03-06 Olympus Soft Imaging Solutions Gmbh Elektronenmikroskop, insbesondere Transmissions-Elektronenmikroskop

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2894160A (en) * 1954-09-09 1959-07-07 Sheldon Edward Emanuel Electron microscopes
US3301949A (en) * 1964-03-02 1967-01-31 United Aircraft Corp Stored image control system for beam machining
US3333057A (en) * 1966-10-07 1967-07-25 Minnesota Mining & Mfg High density microfacsimile system
US3345514A (en) * 1963-10-19 1967-10-03 Hitachi Ltd Television camera combined with an electron microscope and having a plurality of cathodoconductive targets
US3614311A (en) * 1968-02-28 1971-10-19 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2894160A (en) * 1954-09-09 1959-07-07 Sheldon Edward Emanuel Electron microscopes
US3345514A (en) * 1963-10-19 1967-10-03 Hitachi Ltd Television camera combined with an electron microscope and having a plurality of cathodoconductive targets
US3301949A (en) * 1964-03-02 1967-01-31 United Aircraft Corp Stored image control system for beam machining
US3333057A (en) * 1966-10-07 1967-07-25 Minnesota Mining & Mfg High density microfacsimile system
US3614311A (en) * 1968-02-28 1971-10-19 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4091374A (en) * 1975-09-03 1978-05-23 Siemens Aktiengesellschaft Method for pictorially displaying output information generated by an object imaging apparatus
US4149074A (en) * 1975-09-19 1979-04-10 Siemens Aktiengesellschaft Detector for a scanning transmission-type electron microscope
US4099055A (en) * 1975-10-17 1978-07-04 Hitachi, Ltd. Scanning transmission electron microscope
US4071759A (en) * 1975-12-19 1978-01-31 Nihon Denshi Kabushiki Kaisha Scanning electron device
US4206349A (en) * 1977-12-01 1980-06-03 Hitachi, Ltd. Electron microscope
US4385317A (en) * 1979-03-28 1983-05-24 Hitachi, Ltd. Specimen image display apparatus
US4532422A (en) * 1982-03-12 1985-07-30 Hitachi, Ltd. Electron holography microscope
WO1986004758A1 (en) * 1985-02-04 1986-08-14 National Biomedical Research Foundation Split-image, multi-power microscopic image display system and method
US4651200A (en) * 1985-02-04 1987-03-17 National Biomedical Research Foundation Split-image, multi-power microscopic image display system and method
US4673973A (en) * 1985-02-04 1987-06-16 National Biomedical Research Foundation Split-image, multi-power microscopic image display system and method
USRE33883E (en) * 1985-02-04 1992-04-14 National Biomedical Research Foundation Split-image multi-power microscopic image display system and method
USRE34622E (en) * 1985-02-04 1994-05-31 National Biomedical Research Foundation Split-image, multi-power microscopic image display system and method
US4769698A (en) * 1985-10-04 1988-09-06 National Biomedical Research Foundation Interactive microscopic image display system and method
US4777523A (en) * 1986-10-03 1988-10-11 Hitachi, Ltd. Electron microscope with television observation apparatus
US4821117A (en) * 1986-11-12 1989-04-11 Kabushiki Kaisha Toshiba Endoscopic system for producing fluorescent and visible images
US5013915A (en) * 1988-05-20 1991-05-07 Hitachi, Ltd. Transmission type electron microscope
EP0529519A1 (en) * 1991-08-30 1993-03-03 Hitachi, Ltd. Transmission electron microscope
US5350918A (en) * 1991-08-30 1994-09-27 Hitachi, Ltd. Transmission electron microscope
US5387794A (en) * 1993-01-18 1995-02-07 Shimadzu Corporation Detector for diffracted electrons
US20080066363A1 (en) * 2004-05-06 2008-03-20 Grauslys Richard P Weapon aiming device
US7530192B2 (en) * 2004-05-06 2009-05-12 Insight Technology Incorporated Weapon aiming device
US20070236489A1 (en) * 2006-01-30 2007-10-11 Jung Edward K Positional display elements
WO2009117077A3 (en) * 2008-03-19 2009-11-12 Fama Leo A Method and apparatus allowing simultaneous direct observation and electron capture of scintillation images in an electron microscope
JP2013168332A (ja) * 2012-02-17 2013-08-29 Hitachi High-Technologies Corp 電子顕微鏡

Also Published As

Publication number Publication date
JPS49107170A (enrdf_load_html_response) 1974-10-11
DE2204654C3 (de) 1974-10-10
NL7217847A (enrdf_load_html_response) 1973-07-31
DE2204654A1 (de) 1973-08-02
DE2204654B2 (enrdf_load_html_response) 1974-03-14
GB1425181A (en) 1976-02-18

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