DE2200222A1 - Vorrichtung zur bestimmung der oberflaechenguete - Google Patents

Vorrichtung zur bestimmung der oberflaechenguete

Info

Publication number
DE2200222A1
DE2200222A1 DE19722200222 DE2200222A DE2200222A1 DE 2200222 A1 DE2200222 A1 DE 2200222A1 DE 19722200222 DE19722200222 DE 19722200222 DE 2200222 A DE2200222 A DE 2200222A DE 2200222 A1 DE2200222 A1 DE 2200222A1
Authority
DE
Germany
Prior art keywords
light
scanning beam
scanning
arrangement
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19722200222
Other languages
German (de)
English (en)
Inventor
Hans-Erdmann Dipl-Phys Korth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IBM Deutschland GmbH
Original Assignee
IBM Deutschland GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IBM Deutschland GmbH filed Critical IBM Deutschland GmbH
Priority to DE19722200222 priority Critical patent/DE2200222A1/de
Priority to JP12681372A priority patent/JPS4879663A/ja
Priority to GB5890372A priority patent/GB1406470A/en
Priority to FR7247204A priority patent/FR2166390B1/fr
Priority to CA160,403A priority patent/CA1017139A/en
Publication of DE2200222A1 publication Critical patent/DE2200222A1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506—Optical discs

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
DE19722200222 1972-01-04 1972-01-04 Vorrichtung zur bestimmung der oberflaechenguete Pending DE2200222A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19722200222 DE2200222A1 (de) 1972-01-04 1972-01-04 Vorrichtung zur bestimmung der oberflaechenguete
JP12681372A JPS4879663A (it) 1972-01-04 1972-12-19
GB5890372A GB1406470A (en) 1972-01-04 1972-12-20 Testing the quality of surfaces
FR7247204A FR2166390B1 (it) 1972-01-04 1972-12-26
CA160,403A CA1017139A (en) 1972-01-04 1973-01-02 Measurement of surface defects of periodically structured surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722200222 DE2200222A1 (de) 1972-01-04 1972-01-04 Vorrichtung zur bestimmung der oberflaechenguete

Publications (1)

Publication Number Publication Date
DE2200222A1 true DE2200222A1 (de) 1973-07-12

Family

ID=5832302

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722200222 Pending DE2200222A1 (de) 1972-01-04 1972-01-04 Vorrichtung zur bestimmung der oberflaechenguete

Country Status (5)

Country Link
JP (1) JPS4879663A (it)
CA (1) CA1017139A (it)
DE (1) DE2200222A1 (it)
FR (1) FR2166390B1 (it)
GB (1) GB1406470A (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4069484A (en) * 1976-05-28 1978-01-17 Rca Corporation Defect plotting system
US4030835A (en) * 1976-05-28 1977-06-21 Rca Corporation Defect detection system
EP0123929B1 (de) * 1983-04-22 1988-06-22 Erwin Sick GmbH Optik-Elektronik Fehlerfeststellungsvorrichtung
JPS60147945A (ja) * 1984-01-10 1985-08-05 Victor Co Of Japan Ltd 光デイスク検査装置
US5168412A (en) * 1989-06-28 1992-12-01 Toan Doan Surface interference detector
KR102286356B1 (ko) 2016-10-26 2021-08-04 보드 오브 리전츠, 더 유니버시티 오브 텍사스 시스템 반사 및 투과형 나노포톤 디바이스를 위한 고 처리량, 고 해상도 광학 기법

Also Published As

Publication number Publication date
FR2166390A1 (it) 1973-08-17
JPS4879663A (it) 1973-10-25
CA1017139A (en) 1977-09-13
FR2166390B1 (it) 1974-01-04
GB1406470A (en) 1975-09-17

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Legal Events

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