FR2166390B1 - - Google Patents

Info

Publication number
FR2166390B1
FR2166390B1 FR7247204A FR7247204A FR2166390B1 FR 2166390 B1 FR2166390 B1 FR 2166390B1 FR 7247204 A FR7247204 A FR 7247204A FR 7247204 A FR7247204 A FR 7247204A FR 2166390 B1 FR2166390 B1 FR 2166390B1
Authority
FR
France
Prior art keywords
photo
disc
cell
interference
scanned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7247204A
Other languages
English (en)
French (fr)
Other versions
FR2166390A1 (it
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2166390A1 publication Critical patent/FR2166390A1/fr
Application granted granted Critical
Publication of FR2166390B1 publication Critical patent/FR2166390B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506—Optical discs

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
FR7247204A 1972-01-04 1972-12-26 Expired FR2166390B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722200222 DE2200222A1 (de) 1972-01-04 1972-01-04 Vorrichtung zur bestimmung der oberflaechenguete

Publications (2)

Publication Number Publication Date
FR2166390A1 FR2166390A1 (it) 1973-08-17
FR2166390B1 true FR2166390B1 (it) 1974-01-04

Family

ID=5832302

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7247204A Expired FR2166390B1 (it) 1972-01-04 1972-12-26

Country Status (5)

Country Link
JP (1) JPS4879663A (it)
CA (1) CA1017139A (it)
DE (1) DE2200222A1 (it)
FR (1) FR2166390B1 (it)
GB (1) GB1406470A (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4069484A (en) * 1976-05-28 1978-01-17 Rca Corporation Defect plotting system
US4030835A (en) * 1976-05-28 1977-06-21 Rca Corporation Defect detection system
EP0123929B1 (de) * 1983-04-22 1988-06-22 Erwin Sick GmbH Optik-Elektronik Fehlerfeststellungsvorrichtung
JPS60147945A (ja) * 1984-01-10 1985-08-05 Victor Co Of Japan Ltd 光デイスク検査装置
US5168412A (en) * 1989-06-28 1992-12-01 Toan Doan Surface interference detector
US10816482B2 (en) 2016-10-26 2020-10-27 Board Of Regents, The University Of Texas System High throughput, high resolution optical metrology for reflective and transmissive nanophotonic devices

Also Published As

Publication number Publication date
GB1406470A (en) 1975-09-17
FR2166390A1 (it) 1973-08-17
JPS4879663A (it) 1973-10-25
DE2200222A1 (de) 1973-07-12
CA1017139A (en) 1977-09-13

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Legal Events

Date Code Title Description
ST Notification of lapse