DE2152803A1 - Meßgerät zur Bestimmung der gegenseitigen Verlagerung relativ zueinander bewegbarer Körper - Google Patents

Meßgerät zur Bestimmung der gegenseitigen Verlagerung relativ zueinander bewegbarer Körper

Info

Publication number
DE2152803A1
DE2152803A1 DE19712152803 DE2152803A DE2152803A1 DE 2152803 A1 DE2152803 A1 DE 2152803A1 DE 19712152803 DE19712152803 DE 19712152803 DE 2152803 A DE2152803 A DE 2152803A DE 2152803 A1 DE2152803 A1 DE 2152803A1
Authority
DE
Germany
Prior art keywords
grid
gap
grids
measuring device
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712152803
Other languages
German (de)
English (en)
Inventor
George A. Xenia; Wieg Heinrich J. New Burlington; Ohio Preston (V.St.A.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bendix Corp
Original Assignee
Bendix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bendix Corp filed Critical Bendix Corp
Publication of DE2152803A1 publication Critical patent/DE2152803A1/de
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE19712152803 1970-10-23 1971-10-22 Meßgerät zur Bestimmung der gegenseitigen Verlagerung relativ zueinander bewegbarer Körper Pending DE2152803A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8339270A 1970-10-23 1970-10-23

Publications (1)

Publication Number Publication Date
DE2152803A1 true DE2152803A1 (de) 1972-04-27

Family

ID=22178001

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712152803 Pending DE2152803A1 (de) 1970-10-23 1971-10-22 Meßgerät zur Bestimmung der gegenseitigen Verlagerung relativ zueinander bewegbarer Körper

Country Status (3)

Country Link
DE (1) DE2152803A1 (cg-RX-API-DMAC7.html)
FR (1) FR2113114A5 (cg-RX-API-DMAC7.html)
GB (1) GB1370307A (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0137099A1 (de) * 1983-07-16 1985-04-17 Dr. Johannes Heidenhain GmbH Messeinrichtung
DE3905838A1 (de) * 1988-02-26 1989-08-31 Okuma Machinery Works Ltd Optischer linearkodierer
CN117804349A (zh) * 2024-03-01 2024-04-02 中国科学技术大学 一种基于莫尔条纹相关计算的光栅位移传感器调试方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2126336B (en) * 1982-08-26 1986-07-09 British Aerospace Detection of movement of a cyclic interference waveform such as in a ring laser gyroscope
GB2194042A (en) * 1986-08-14 1988-02-24 Bicc Plc Displacement measurement
CN102735324B (zh) * 2012-05-21 2014-07-30 山西大学 激光单缝-单光栅测量物体微振动振幅的装置
CN117804348B (zh) * 2024-03-01 2024-04-30 中国科学技术大学 一种基于纵向莫尔条纹相关计算的光栅位移传感器

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0137099A1 (de) * 1983-07-16 1985-04-17 Dr. Johannes Heidenhain GmbH Messeinrichtung
DE3905838A1 (de) * 1988-02-26 1989-08-31 Okuma Machinery Works Ltd Optischer linearkodierer
CN117804349A (zh) * 2024-03-01 2024-04-02 中国科学技术大学 一种基于莫尔条纹相关计算的光栅位移传感器调试方法
CN117804349B (zh) * 2024-03-01 2024-04-30 中国科学技术大学 一种基于莫尔条纹相关计算的光栅位移传感器调试方法

Also Published As

Publication number Publication date
GB1370307A (en) 1974-10-16
FR2113114A5 (cg-RX-API-DMAC7.html) 1972-06-23

Similar Documents

Publication Publication Date Title
EP0509979B1 (de) Photoelektronische Positionsmesseinrichtung
DE2248194B2 (de) Mehrkoordinatenmaschine, insbesondere laengenmessmaschine
DE2501373C3 (de) Anordnung zur Winkel- oder Längenmessung
DE3905838C2 (de) Mit gemitteltem Beugungsmuster arbeitender Stellungsgeber
DE2203418A1 (de) Messgeraet zur Bestimmung der Position relativ beweglicher Koerper
DE2349944A1 (de) Vorrichtung zur messung der verschiebung zwischen ersten und zweiten relativ zueinander beweglichen koerpern
EP0242407A2 (de) Vorrichtung zur Messung kleiner Längen
DE3417176A1 (de) Photoelektrische messeinrichtung
DE1623456A1 (de) Verfahren und Vorrichtung zur kontaktlosen Abstandsmessung
DE1523231A1 (de) Vorrichtung zur optischen Anzeige der Drehgeschwindigkeit und Winkelstellung einer Welle
DE938351C (de) Verfahren zur Herstellung gerasterter Druckformen durch lichtelektrische UEbertragung von Bildvorlagen
WO2000065310A2 (de) Optische positionsmesseinrichtung
WO1989011080A1 (fr) Capteur angulaire a position codee
DE2052123B2 (de) Elektroerosionsanlage mit numerischer Bahnsteuerung für eine zwischen zwei Führungen gespannte Drahtelektrode
DE2152803A1 (de) Meßgerät zur Bestimmung der gegenseitigen Verlagerung relativ zueinander bewegbarer Körper
DE1548292B2 (de) Meßvorrichtung zur berührungslosen Breitenmessung eines durchlaufenden Bandes
EP0645607A1 (de) Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale
DE2511350A1 (de) Vorrichtung zum messen der verschiebung eines ersten elementes bezueglich eines zweiten
DE3245357C2 (de) Inkrementale Meßeinrichtung
DE1202012B (de) Fotoelektrische Vorrichtung zum genauen Bestimmen der Lage eines Teilungsmerkmales
DE2417289C3 (de) Elektrische Kopiersteuerungsvorrichtung für Bearbeitungsmaschinen
DE2157815B2 (de) Geraet zur erzeugung eines lichtvorhanges
DE1229326B (de) Anordnung zum Messen der Geschwindigkeit und der Richtung der Relativbewegung zweier Koerper
DE2811707A1 (de) Elektro-optische vorrichtung und verfahren zur messung eines oder mehrerer abmessungen und eines profils
DE1548361B2 (de) Meßeinrichtung zur berührungslosen Bestimmung der Abmessungen von Körpern