DE2100789A1 - Thermistor und Verfahren zu seiner Herstellung - Google Patents
Thermistor und Verfahren zu seiner HerstellungInfo
- Publication number
- DE2100789A1 DE2100789A1 DE19712100789 DE2100789A DE2100789A1 DE 2100789 A1 DE2100789 A1 DE 2100789A1 DE 19712100789 DE19712100789 DE 19712100789 DE 2100789 A DE2100789 A DE 2100789A DE 2100789 A1 DE2100789 A1 DE 2100789A1
- Authority
- DE
- Germany
- Prior art keywords
- electrodes
- semiconductor body
- main surface
- thermistor according
- thermistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000000034 method Methods 0.000 title claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 49
- 239000000463 material Substances 0.000 claims description 6
- 229910052732 germanium Inorganic materials 0.000 claims description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 4
- 238000007650 screen-printing Methods 0.000 claims description 4
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
- 239000011241 protective layer Substances 0.000 claims 3
- 235000012239 silicon dioxide Nutrition 0.000 claims 2
- 239000000377 silicon dioxide Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 238000006748 scratching Methods 0.000 description 3
- 230000002393 scratching effect Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910001245 Sb alloy Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 241001122767 Theaceae Species 0.000 description 1
- 239000002140 antimony alloy Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005293 physical law Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/04—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Thermistors And Varistors (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712100789 DE2100789A1 (de) | 1971-01-08 | 1971-01-08 | Thermistor und Verfahren zu seiner Herstellung |
| US00208566A US3745506A (en) | 1971-01-08 | 1971-12-16 | Thermistor and method of manufacturing same |
| GB51472A GB1320111A (en) | 1971-01-08 | 1972-01-05 | Thermistor and method of manufacturing same |
| FR7200441A FR2121659B1 (enExample) | 1971-01-08 | 1972-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712100789 DE2100789A1 (de) | 1971-01-08 | 1971-01-08 | Thermistor und Verfahren zu seiner Herstellung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2100789A1 true DE2100789A1 (de) | 1972-07-20 |
Family
ID=5795444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712100789 Pending DE2100789A1 (de) | 1971-01-08 | 1971-01-08 | Thermistor und Verfahren zu seiner Herstellung |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3745506A (enExample) |
| DE (1) | DE2100789A1 (enExample) |
| FR (1) | FR2121659B1 (enExample) |
| GB (1) | GB1320111A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2815003A1 (de) * | 1977-04-14 | 1978-10-19 | Milton Schonberger | Verfahren zum einstellen des widerstandes eines thermistors |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6099164A (en) * | 1995-06-07 | 2000-08-08 | Thermometrics, Inc. | Sensors incorporating nickel-manganese oxide single crystals |
| EP0917717A4 (en) * | 1996-06-17 | 2000-11-08 | Thermometrics Inc | SENSORS AND METHOD FOR THE PRODUCTION THEREOF FROM A COMMON WAFER |
| US6125529A (en) * | 1996-06-17 | 2000-10-03 | Thermometrics, Inc. | Method of making wafer based sensors and wafer chip sensors |
| US5953811A (en) * | 1998-01-20 | 1999-09-21 | Emc Technology Llc | Trimming temperature variable resistor |
| US7306967B1 (en) * | 2003-05-28 | 2007-12-11 | Adsem, Inc. | Method of forming high temperature thermistors |
| US7812705B1 (en) | 2003-12-17 | 2010-10-12 | Adsem, Inc. | High temperature thermistor probe |
| US7546772B2 (en) * | 2004-12-30 | 2009-06-16 | Honeywell International Inc. | Piezoresistive pressure sensor |
| KR20130121917A (ko) * | 2010-12-02 | 2013-11-06 | 네스텍 소시에테아노님 | 음료 기계의 저관성 열 센서 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2075733A (en) * | 1936-03-11 | 1937-03-30 | Coprox Inc | Resistance and impedance elements for electric circuits |
| US3097336A (en) * | 1960-05-02 | 1963-07-09 | Westinghouse Electric Corp | Semiconductor voltage divider devices |
| US3343114A (en) * | 1963-12-30 | 1967-09-19 | Texas Instruments Inc | Temperature transducer |
-
1971
- 1971-01-08 DE DE19712100789 patent/DE2100789A1/de active Pending
- 1971-12-16 US US00208566A patent/US3745506A/en not_active Expired - Lifetime
-
1972
- 1972-01-05 GB GB51472A patent/GB1320111A/en not_active Expired
- 1972-01-07 FR FR7200441A patent/FR2121659B1/fr not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2815003A1 (de) * | 1977-04-14 | 1978-10-19 | Milton Schonberger | Verfahren zum einstellen des widerstandes eines thermistors |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1320111A (en) | 1973-06-13 |
| US3745506A (en) | 1973-07-10 |
| FR2121659A1 (enExample) | 1972-08-25 |
| FR2121659B1 (enExample) | 1977-07-15 |
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