DE2052120A1 - Lageranordnung für Molekularpumpen und Turbomolekularpumpen - Google Patents

Lageranordnung für Molekularpumpen und Turbomolekularpumpen

Info

Publication number
DE2052120A1
DE2052120A1 DE19702052120 DE2052120A DE2052120A1 DE 2052120 A1 DE2052120 A1 DE 2052120A1 DE 19702052120 DE19702052120 DE 19702052120 DE 2052120 A DE2052120 A DE 2052120A DE 2052120 A1 DE2052120 A1 DE 2052120A1
Authority
DE
Germany
Prior art keywords
bearing
molecular
turbo
molecular pumps
pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19702052120
Other languages
German (de)
English (en)
Inventor
Willi Dr.h.c 6333 Braunfels. P Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PFEIFFER VAKUUMTECHNIK
Original Assignee
PFEIFFER VAKUUMTECHNIK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PFEIFFER VAKUUMTECHNIK filed Critical PFEIFFER VAKUUMTECHNIK
Priority to DE19702052120 priority Critical patent/DE2052120A1/de
Priority to CH947571A priority patent/CH529928A/de
Priority to NL7109105A priority patent/NL7109105A/xx
Priority to FR7124198A priority patent/FR2109649A5/fr
Priority to BE769933A priority patent/BE769933A/nl
Priority to GB3293671A priority patent/GB1331166A/en
Priority to CA125,868A priority patent/CA943112A/en
Priority to US00191759A priority patent/US3759626A/en
Publication of DE2052120A1 publication Critical patent/DE2052120A1/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F1/00—Springs
    • F16F1/02—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant
    • F16F1/025—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant characterised by having a particular shape
    • F16F1/027—Planar, e.g. in sheet form; leaf springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Reciprocating Pumps (AREA)
  • Support Of The Bearing (AREA)
DE19702052120 1970-10-23 1970-10-23 Lageranordnung für Molekularpumpen und Turbomolekularpumpen Pending DE2052120A1 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE19702052120 DE2052120A1 (de) 1970-10-23 1970-10-23 Lageranordnung für Molekularpumpen und Turbomolekularpumpen
CH947571A CH529928A (de) 1970-10-23 1971-06-28 Lageranordnung für Molekularpumpen und Turbomolekularpumpen
NL7109105A NL7109105A (enExample) 1970-10-23 1971-07-01
FR7124198A FR2109649A5 (enExample) 1970-10-23 1971-07-02
BE769933A BE769933A (nl) 1970-10-23 1971-07-13 Legerconstructie voor moleculaire pompen en turbo-moleculaire pompen
GB3293671A GB1331166A (en) 1970-10-23 1971-07-14 Bearing arrangement for molecular pumps
CA125,868A CA943112A (en) 1970-10-23 1971-10-22 Bearing arrangement for molecular and turbo molecular pumps
US00191759A US3759626A (en) 1970-10-23 1971-10-22 Bearing arrangement for molecular and turbo molecular pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702052120 DE2052120A1 (de) 1970-10-23 1970-10-23 Lageranordnung für Molekularpumpen und Turbomolekularpumpen

Publications (1)

Publication Number Publication Date
DE2052120A1 true DE2052120A1 (de) 1972-04-27

Family

ID=5785985

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19702052120 Pending DE2052120A1 (de) 1970-10-23 1970-10-23 Lageranordnung für Molekularpumpen und Turbomolekularpumpen

Country Status (8)

Country Link
US (1) US3759626A (enExample)
BE (1) BE769933A (enExample)
CA (1) CA943112A (enExample)
CH (1) CH529928A (enExample)
DE (1) DE2052120A1 (enExample)
FR (1) FR2109649A5 (enExample)
GB (1) GB1331166A (enExample)
NL (1) NL7109105A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009027274A1 (de) * 2007-08-29 2009-03-05 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
US8851829B2 (en) 2007-01-29 2014-10-07 Edwards Limited Vacuum pump
EP1392981B2 (en) † 2001-06-05 2015-09-30 Siemens Aktiengesellschaft Compressor unit comprising a centrifugal compressor and an electric motor
EP2390510A3 (de) * 2010-05-28 2016-09-14 Pfeiffer Vacuum Gmbh Vakuumpumpe

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2337226A1 (de) * 1973-07-21 1975-02-06 Maschf Augsburg Nuernberg Ag Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
NL184487C (nl) * 1977-02-25 1989-08-01 Ultra Centrifuge Nederland Nv Moleculaire pomp.
SE416226B (sv) * 1977-07-29 1980-12-08 Electrolux Ab Hallare for elastiskt eftergivande fastsettning av ett i ett lagerhus anbragt lager
DE2744697A1 (de) * 1977-10-05 1979-04-12 Babcock Ag Unterstuetzungsbock
US4479756A (en) * 1978-08-21 1984-10-30 Roy E. Roth Company Multi-stage pump
US4405286A (en) * 1982-01-21 1983-09-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actively suspended counter-rotating machine
DE3204750C2 (de) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
EP0196352A1 (de) * 1985-04-04 1986-10-08 Leybold Aktiengesellschaft Turbomolekular-Vakuumpumpe mit einem Rotor und mindestens einem Wälzlager
US5096386A (en) * 1989-11-17 1992-03-17 Sundstrand Corporation Integral liquid ring and regenerative pump
DE69304171T2 (de) * 1992-10-30 1997-03-06 Philips Electronics Nv Elektromotor und Apparat, der diesen Elektromotor enthält
US5364194A (en) * 1993-01-04 1994-11-15 Ampex Systems Corporation Axially displaced flexural bearing support
FR2735535B1 (fr) * 1995-06-16 1997-07-11 Cit Alcatel Pompe turbomoleculaire
DE19634095A1 (de) * 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Eingangsstufe für eine zweiflutige Gasreibungspumpe
US6261052B1 (en) * 1999-01-08 2001-07-17 Fantom Technologies Inc. Prandtl layer turbine
DE10211134C1 (de) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolekularpumpe mit koaxial zentralem Durchgang
DE60304870T2 (de) * 2003-11-18 2006-11-30 Varian S.P.A., Leini Vakuumpumpe mit Schwingungsdämpfer
US20060225589A1 (en) * 2005-04-07 2006-10-12 Johnson Robert P Doctoring apparatus
DE102006037187A1 (de) * 2006-08-09 2008-02-21 Pfeiffer Vacuum Gmbh Anordnung zur Lagerung einer Welle einer Vakuumpumpe
GB0618745D0 (en) † 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
EP2088327B1 (en) * 2008-02-11 2011-08-31 Agilent Technologies Italia S.p.A. Support for rolling bearing
GB2481839B (en) * 2010-07-08 2017-03-22 Edwards Ltd An axially flexible pump bearing carrier
US9234522B2 (en) 2012-01-03 2016-01-12 United Technologies Corporation Hybrid bearing turbomachine
GB2535163B (en) 2015-02-09 2017-04-05 Edwards Ltd Pump lubricant supply systems
CN106895029B (zh) * 2016-11-29 2019-04-05 奇鋐科技股份有限公司 减震结构及其串联风扇
CN107588016A (zh) * 2017-09-30 2018-01-16 南京创贝高速传动机械有限公司 一种ddr直驱高速电机驱动离心式压缩机
GB2578431B (en) * 2018-10-25 2021-09-22 Edwards Ltd Oil feed for a vacuum pump
CN112555177A (zh) * 2021-01-05 2021-03-26 徐涛 一种医用耗材真空包装吸附用高压风机
GB2604878A (en) * 2021-03-15 2022-09-21 Edwards Ltd Damper for a vacuum pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2523983A (en) * 1949-05-05 1950-09-26 Bryant Grinder Corp High-speed rotor mounting
US2874008A (en) * 1956-02-23 1959-02-17 Skf Svenska Kullagerfab Ab Bearing mounting for silent running rotating machine parts
DE1020930B (de) * 1958-11-13 1957-12-12 Siebtechnik G.m.b.H., Mülheim/Ruhr-Speldorf Schwingzentrifuge
US3399827A (en) * 1967-05-19 1968-09-03 Everett H. Schwartzman Vacuum pump system
US3494678A (en) * 1968-05-27 1970-02-10 David E Reznick Vibration-damping bearing

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1392981B2 (en) † 2001-06-05 2015-09-30 Siemens Aktiengesellschaft Compressor unit comprising a centrifugal compressor and an electric motor
US8851829B2 (en) 2007-01-29 2014-10-07 Edwards Limited Vacuum pump
EP2126365B2 (en) † 2007-01-29 2015-12-09 Edwards Limited Vacuum pump
US9759256B2 (en) 2007-01-29 2017-09-12 Edwards Limited Vacuum pump
WO2009027274A1 (de) * 2007-08-29 2009-03-05 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
EP2390510A3 (de) * 2010-05-28 2016-09-14 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
NL7109105A (enExample) 1972-04-25
GB1331166A (en) 1973-09-26
CA943112A (en) 1974-03-05
FR2109649A5 (enExample) 1972-05-26
CH529928A (de) 1972-10-31
US3759626A (en) 1973-09-18
BE769933A (nl) 1971-11-16

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