DE2046332C3 - Fotoelektrische Vorrichtung zum gegenseitigen Ausrichten zweier Gegenstände - Google Patents

Fotoelektrische Vorrichtung zum gegenseitigen Ausrichten zweier Gegenstände

Info

Publication number
DE2046332C3
DE2046332C3 DE2046332A DE2046332A DE2046332C3 DE 2046332 C3 DE2046332 C3 DE 2046332C3 DE 2046332 A DE2046332 A DE 2046332A DE 2046332 A DE2046332 A DE 2046332A DE 2046332 C3 DE2046332 C3 DE 2046332C3
Authority
DE
Germany
Prior art keywords
patterns
carrier
pattern
objects
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2046332A
Other languages
German (de)
English (en)
Other versions
DE2046332A1 (de
DE2046332B2 (de
Inventor
Eerenst Frans Eindhoven Hovius (Niederlande)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE2046332A1 publication Critical patent/DE2046332A1/de
Publication of DE2046332B2 publication Critical patent/DE2046332B2/de
Application granted granted Critical
Publication of DE2046332C3 publication Critical patent/DE2046332C3/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE2046332A 1969-09-24 1970-09-19 Fotoelektrische Vorrichtung zum gegenseitigen Ausrichten zweier Gegenstände Expired DE2046332C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6914531A NL6914531A (enExample) 1969-09-24 1969-09-24

Publications (3)

Publication Number Publication Date
DE2046332A1 DE2046332A1 (de) 1971-03-25
DE2046332B2 DE2046332B2 (de) 1979-01-04
DE2046332C3 true DE2046332C3 (de) 1979-08-30

Family

ID=19807982

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2046332A Expired DE2046332C3 (de) 1969-09-24 1970-09-19 Fotoelektrische Vorrichtung zum gegenseitigen Ausrichten zweier Gegenstände

Country Status (9)

Country Link
US (1) US3671755A (enExample)
AT (1) AT322634B (enExample)
BE (1) BE756467A (enExample)
CH (1) CH524809A (enExample)
DE (1) DE2046332C3 (enExample)
FR (1) FR2062604A5 (enExample)
GB (1) GB1331293A (enExample)
NL (1) NL6914531A (enExample)
SE (1) SE367774B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4370554A (en) 1979-09-27 1983-01-25 International Business Machines Corporation Alignment system for particle beam lithography

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3749925A (en) * 1971-12-01 1973-07-31 Iomec Opto-electronic transducer for position initialization of a linear motion mechanism
FR2436967A1 (fr) * 1978-09-19 1980-04-18 Thomson Csf Procede d'alignement optique de motifs dans deux plans rapproches et dispositif d'alignement mettant en oeuvre un tel procede
JPS5588347A (en) * 1978-12-27 1980-07-04 Fujitsu Ltd Automatic aligning system
FR2450468A1 (fr) * 1979-02-27 1980-09-26 Thomson Csf Systeme optique d'alignement de deux motifs et photorepeteur mettant en oeuvre un tel systeme
DE2952106C2 (de) * 1979-12-22 1982-11-04 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische inkrementale Längen- oder Winkelmeßeinrichtung
AT375051B (de) * 1982-08-10 1984-06-25 Voest Alpine Ag Anlage zum binden von bunden
SE454439B (sv) * 1983-07-06 1988-05-02 Tetra Pak Ab Sett och anordning att med fotoelektriska medel detektera och behorighetskontrollera gjorda styrmarkeringar pa en med tryck dekorerad lopande materialbana
EP0192723A1 (en) * 1984-09-07 1986-09-03 PA Consulting Services Limited Method and apparatus for loading information into an integrated circuit semiconductor device
DE3509102C2 (de) * 1985-03-14 1987-01-15 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Meßeinrichtung
DE3526206A1 (de) * 1985-07-23 1987-02-05 Heidenhain Gmbh Dr Johannes Wegmesseinrichtung
DE3536466A1 (de) * 1985-10-12 1987-04-16 Bodenseewerk Geraetetech Nullimpulserzeuger zur erzeugung eines impulses bei erreichen einer vorgegebenen lage eines traegers
JPS63281015A (ja) * 1987-05-13 1988-11-17 Matsushita Electric Ind Co Ltd 位置検出器の基準信号発生装置
US5065017A (en) * 1990-04-20 1991-11-12 Hoech Robert W Zero mark for optical encoder using stator mask patterns and rotor patterns
AT410485B (de) * 1997-07-30 2003-05-26 Rsf Elektronik Gmbh Positionsmesseinrichtung
EP1003012B3 (de) * 1998-11-19 2011-04-20 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3253153A (en) * 1963-01-16 1966-05-24 Pratt & Whitney Inc Photosensitive measuring system which converts a physical to an electrical quantity
DE1231911B (de) * 1964-04-11 1967-01-05 Wenczler & Heidenhain Einrichtung zum Messen von Strecken oder Teilen von Kreisen mittels Impulszaehlung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4370554A (en) 1979-09-27 1983-01-25 International Business Machines Corporation Alignment system for particle beam lithography

Also Published As

Publication number Publication date
NL6914531A (enExample) 1971-03-26
SE367774B (enExample) 1974-06-10
FR2062604A5 (enExample) 1971-06-25
GB1331293A (en) 1973-09-26
DE2046332A1 (de) 1971-03-25
AT322634B (de) 1975-05-26
US3671755A (en) 1972-06-20
CH524809A (de) 1972-06-30
DE2046332B2 (de) 1979-01-04
BE756467A (fr) 1971-03-22

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee