CH524809A - Vorrichtung zum gegenseitigen Ausrichten zweier Gegenstände - Google Patents
Vorrichtung zum gegenseitigen Ausrichten zweier GegenständeInfo
- Publication number
- CH524809A CH524809A CH1395670A CH1395670A CH524809A CH 524809 A CH524809 A CH 524809A CH 1395670 A CH1395670 A CH 1395670A CH 1395670 A CH1395670 A CH 1395670A CH 524809 A CH524809 A CH 524809A
- Authority
- CH
- Switzerland
- Prior art keywords
- objects
- mutual alignment
- mutual
- alignment
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7073—Alignment marks and their environment
- G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/366—Particular pulse shapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6914531A NL6914531A (de) | 1969-09-24 | 1969-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH524809A true CH524809A (de) | 1972-06-30 |
Family
ID=19807982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH1395670A CH524809A (de) | 1969-09-24 | 1970-09-21 | Vorrichtung zum gegenseitigen Ausrichten zweier Gegenstände |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3671755A (de) |
| AT (1) | AT322634B (de) |
| BE (1) | BE756467A (de) |
| CH (1) | CH524809A (de) |
| DE (1) | DE2046332C3 (de) |
| FR (1) | FR2062604A5 (de) |
| GB (1) | GB1331293A (de) |
| NL (1) | NL6914531A (de) |
| SE (1) | SE367774B (de) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3749925A (en) * | 1971-12-01 | 1973-07-31 | Iomec | Opto-electronic transducer for position initialization of a linear motion mechanism |
| FR2436967A1 (fr) * | 1978-09-19 | 1980-04-18 | Thomson Csf | Procede d'alignement optique de motifs dans deux plans rapproches et dispositif d'alignement mettant en oeuvre un tel procede |
| JPS5588347A (en) * | 1978-12-27 | 1980-07-04 | Fujitsu Ltd | Automatic aligning system |
| FR2450468A1 (fr) * | 1979-02-27 | 1980-09-26 | Thomson Csf | Systeme optique d'alignement de deux motifs et photorepeteur mettant en oeuvre un tel systeme |
| DE2939044A1 (de) | 1979-09-27 | 1981-04-09 | Ibm Deutschland Gmbh, 7000 Stuttgart | Einrichtung fuer elektronenstrahllithographie |
| DE2952106C2 (de) * | 1979-12-22 | 1982-11-04 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Lichtelektrische inkrementale Längen- oder Winkelmeßeinrichtung |
| SE454439B (sv) * | 1983-07-06 | 1988-05-02 | Tetra Pak Ab | Sett och anordning att med fotoelektriska medel detektera och behorighetskontrollera gjorda styrmarkeringar pa en med tryck dekorerad lopande materialbana |
| EP0192723A1 (de) * | 1984-09-07 | 1986-09-03 | PA Consulting Services Limited | Verfahren und anordnung zum übertragen von daten in einer integrierten halbleiterschaltungsanordnung |
| DE3509102A1 (de) * | 1985-03-14 | 1986-09-18 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Messeinrichtung |
| DE3526206A1 (de) * | 1985-07-23 | 1987-02-05 | Heidenhain Gmbh Dr Johannes | Wegmesseinrichtung |
| DE3536466A1 (de) * | 1985-10-12 | 1987-04-16 | Bodenseewerk Geraetetech | Nullimpulserzeuger zur erzeugung eines impulses bei erreichen einer vorgegebenen lage eines traegers |
| JPS63281015A (ja) * | 1987-05-13 | 1988-11-17 | Matsushita Electric Ind Co Ltd | 位置検出器の基準信号発生装置 |
| US5065017A (en) * | 1990-04-20 | 1991-11-12 | Hoech Robert W | Zero mark for optical encoder using stator mask patterns and rotor patterns |
| AT410485B (de) * | 1997-07-30 | 2003-05-26 | Rsf Elektronik Gmbh | Positionsmesseinrichtung |
| EP1003012B3 (de) * | 1998-11-19 | 2011-04-20 | Dr. Johannes Heidenhain GmbH | Optische Positionsmesseinrichtung |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3253153A (en) * | 1963-01-16 | 1966-05-24 | Pratt & Whitney Inc | Photosensitive measuring system which converts a physical to an electrical quantity |
| DE1231911B (de) * | 1964-04-11 | 1967-01-05 | Wenczler & Heidenhain | Einrichtung zum Messen von Strecken oder Teilen von Kreisen mittels Impulszaehlung |
-
0
- BE BE756467D patent/BE756467A/xx unknown
-
1969
- 1969-09-24 NL NL6914531A patent/NL6914531A/xx unknown
-
1970
- 1970-09-17 US US73135A patent/US3671755A/en not_active Expired - Lifetime
- 1970-09-19 DE DE2046332A patent/DE2046332C3/de not_active Expired
- 1970-09-21 CH CH1395670A patent/CH524809A/de not_active IP Right Cessation
- 1970-09-21 SE SE12817/70A patent/SE367774B/xx unknown
- 1970-09-21 AT AT850970A patent/AT322634B/de not_active IP Right Cessation
- 1970-09-21 GB GB4479470A patent/GB1331293A/en not_active Expired
- 1970-09-24 FR FR7034636A patent/FR2062604A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1331293A (en) | 1973-09-26 |
| DE2046332A1 (de) | 1971-03-25 |
| DE2046332B2 (de) | 1979-01-04 |
| DE2046332C3 (de) | 1979-08-30 |
| US3671755A (en) | 1972-06-20 |
| BE756467A (fr) | 1971-03-22 |
| FR2062604A5 (de) | 1971-06-25 |
| NL6914531A (de) | 1971-03-26 |
| AT322634B (de) | 1975-05-26 |
| SE367774B (de) | 1974-06-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |