DE2041133A1 - Verdampfer fuer Gettermetalle - Google Patents
Verdampfer fuer GettermetalleInfo
- Publication number
- DE2041133A1 DE2041133A1 DE19702041133 DE2041133A DE2041133A1 DE 2041133 A1 DE2041133 A1 DE 2041133A1 DE 19702041133 DE19702041133 DE 19702041133 DE 2041133 A DE2041133 A DE 2041133A DE 2041133 A1 DE2041133 A1 DE 2041133A1
- Authority
- DE
- Germany
- Prior art keywords
- heat transfer
- transfer piece
- evaporator according
- metal
- metal supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 39
- 239000002184 metal Substances 0.000 title claims description 39
- 150000002739 metals Chemical class 0.000 title claims description 5
- 239000000463 material Substances 0.000 claims description 11
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 6
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 231100000518 lethal Toxicity 0.000 claims 1
- 230000001665 lethal effect Effects 0.000 claims 1
- 239000000155 melt Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000011324 bead Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702041133 DE2041133A1 (de) | 1970-08-19 | 1970-08-19 | Verdampfer fuer Gettermetalle |
| NL7108033A NL7108033A (enrdf_load_stackoverflow) | 1970-08-19 | 1971-06-11 | |
| FR7130166A FR2104505A5 (enrdf_load_stackoverflow) | 1970-08-19 | 1971-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702041133 DE2041133A1 (de) | 1970-08-19 | 1970-08-19 | Verdampfer fuer Gettermetalle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2041133A1 true DE2041133A1 (de) | 1972-02-24 |
Family
ID=5780147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702041133 Pending DE2041133A1 (de) | 1970-08-19 | 1970-08-19 | Verdampfer fuer Gettermetalle |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE2041133A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2104505A5 (enrdf_load_stackoverflow) |
| NL (1) | NL7108033A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5541257B2 (enrdf_load_stackoverflow) * | 1972-12-02 | 1980-10-23 |
-
1970
- 1970-08-19 DE DE19702041133 patent/DE2041133A1/de active Pending
-
1971
- 1971-06-11 NL NL7108033A patent/NL7108033A/xx unknown
- 1971-08-17 FR FR7130166A patent/FR2104505A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL7108033A (enrdf_load_stackoverflow) | 1972-02-22 |
| FR2104505A5 (enrdf_load_stackoverflow) | 1972-04-14 |
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