DE2028910C3 - Einrichtung zum Sortieren von elektrischen Schaltungselementen - Google Patents

Einrichtung zum Sortieren von elektrischen Schaltungselementen

Info

Publication number
DE2028910C3
DE2028910C3 DE2028910A DE2028910A DE2028910C3 DE 2028910 C3 DE2028910 C3 DE 2028910C3 DE 2028910 A DE2028910 A DE 2028910A DE 2028910 A DE2028910 A DE 2028910A DE 2028910 C3 DE2028910 C3 DE 2028910C3
Authority
DE
Germany
Prior art keywords
chips
test
elements
chip
individual
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2028910A
Other languages
German (de)
English (en)
Other versions
DE2028910A1 (de
DE2028910B2 (de
Inventor
Edward Frank South Burlington Vt. Schirmer (V.St.A.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE2028910A1 publication Critical patent/DE2028910A1/de
Publication of DE2028910B2 publication Critical patent/DE2028910B2/de
Application granted granted Critical
Publication of DE2028910C3 publication Critical patent/DE2028910C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0611—Sorting devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34—Sorting according to other particular properties
    • B07C5/344—Sorting according to other particular properties according to electric or electromagnetic properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S209/00—Classifying, separating, and assorting solids
    • Y10S209/936—Plural items tested as group

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
DE2028910A 1969-06-30 1970-06-12 Einrichtung zum Sortieren von elektrischen Schaltungselementen Expired DE2028910C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83759569A 1969-06-30 1969-06-30

Publications (3)

Publication Number Publication Date
DE2028910A1 DE2028910A1 (de) 1971-01-07
DE2028910B2 DE2028910B2 (de) 1979-01-11
DE2028910C3 true DE2028910C3 (de) 1979-09-06

Family

ID=25274909

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2028910A Expired DE2028910C3 (de) 1969-06-30 1970-06-12 Einrichtung zum Sortieren von elektrischen Schaltungselementen

Country Status (5)

Country Link
US (1) US3584741A (https=)
JP (1) JPS4827501B1 (https=)
DE (1) DE2028910C3 (https=)
FR (1) FR2052380A5 (https=)
GB (1) GB1305593A (https=)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539508B2 (https=) * 1971-06-25 1978-04-06
US3811182A (en) * 1972-03-31 1974-05-21 Ibm Object handling fixture, system, and process
US3915784A (en) * 1972-04-26 1975-10-28 Ibm Method of semiconductor chip separation
US3762426A (en) * 1972-04-26 1973-10-02 Ibm Semiconductor chip separation apparatus
US3847284A (en) * 1973-05-11 1974-11-12 Teledyne Inc Magnetic tape die sorting system
US3915850A (en) * 1973-11-14 1975-10-28 Gti Corp Component handler and method and apparatus utilizing same
US3894633A (en) * 1974-10-24 1975-07-15 Western Electric Co Method and apparatus for sorting articles
CA1044379A (en) * 1974-12-28 1978-12-12 Sony Corporation Wafer transfer device
US4406373A (en) * 1981-08-03 1983-09-27 Palomar Systems & Machines, Inc. Means and method for testing and sorting miniature electronic units
JPS59110758U (ja) * 1983-01-18 1984-07-26 大谷　均 ダブルタイヤの石取器
EP0468153B1 (de) * 1990-07-25 1995-10-11 atg test systems GmbH Kontaktierungsvorrichtung für Prüfzwecke
US6078188A (en) * 1995-09-04 2000-06-20 Advantest Corporation Semiconductor device transporting and handling apparatus
US6024526A (en) * 1995-10-20 2000-02-15 Aesop, Inc. Integrated prober, handler and tester for semiconductor components
US6246251B1 (en) * 1998-04-24 2001-06-12 International Rectifier Corp. Test process and apparatus for testing singulated semiconductor die
US6505665B1 (en) * 1998-09-17 2003-01-14 Intermedics, Inc. Method and apparatus for use in assembling electronic devices
US6222145B1 (en) 1998-10-29 2001-04-24 International Business Machines Corporation Mechanical strength die sorting
US6521853B1 (en) * 2000-05-08 2003-02-18 Micro Component Technology, Inc. Method and apparatus for sorting semiconductor devices
US6570374B1 (en) * 2000-06-23 2003-05-27 Honeywell International Inc. Vacuum chuck with integrated electrical testing points
US7851721B2 (en) * 2009-02-17 2010-12-14 Asm Assembly Automation Ltd Electronic device sorter comprising dual buffers
CN103708713A (zh) * 2013-12-26 2014-04-09 深圳市华星光电技术有限公司 夹持机构、液晶面板切割机以及液晶面板切割工艺
US10173246B1 (en) * 2018-05-30 2019-01-08 Nanotronics Imaging, Inc. Systems, apparatus, and methods for sorting components using illumination
CN109454023A (zh) * 2018-12-21 2019-03-12 义乌臻格科技有限公司 一种用于拾取微型芯片的吸嘴装置及分选装置
CN113426682B (zh) * 2021-06-04 2023-06-30 江苏暖阳半导体科技有限公司 一种MiniLED的检测分选工艺

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1153008A (en) * 1965-09-18 1969-05-21 Telefunken Patent Method of and apparatus for Measuring and Sorting the Individual Elements in a Semiconductor Wafer

Also Published As

Publication number Publication date
JPS4827501B1 (https=) 1973-08-23
GB1305593A (https=) 1973-02-07
DE2028910A1 (de) 1971-01-07
DE2028910B2 (de) 1979-01-11
FR2052380A5 (https=) 1971-04-09
US3584741A (en) 1971-06-15

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee