DE2022652A1 - Auf mechanische Beanspruchung ansprechender Halbleiterwandler - Google Patents
Auf mechanische Beanspruchung ansprechender HalbleiterwandlerInfo
- Publication number
- DE2022652A1 DE2022652A1 DE19702022652 DE2022652A DE2022652A1 DE 2022652 A1 DE2022652 A1 DE 2022652A1 DE 19702022652 DE19702022652 DE 19702022652 DE 2022652 A DE2022652 A DE 2022652A DE 2022652 A1 DE2022652 A1 DE 2022652A1
- Authority
- DE
- Germany
- Prior art keywords
- component
- semiconductor
- electrodes
- needle
- vibrations
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 159
- 230000008859 change Effects 0.000 claims description 45
- 239000010409 thin film Substances 0.000 claims description 17
- 230000010355 oscillation Effects 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000003190 viscoelastic substance Substances 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
- 230000007246 mechanism Effects 0.000 description 19
- 238000007740 vapor deposition Methods 0.000 description 15
- 239000000758 substrate Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 8
- 239000012777 electrically insulating material Substances 0.000 description 8
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 229910001092 metal group alloy Inorganic materials 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241000252203 Clupea harengus Species 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 240000002834 Paulownia tomentosa Species 0.000 description 1
- 235000010678 Paulownia tomentosa Nutrition 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 244000309466 calf Species 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 235000019514 herring Nutrition 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R21/00—Variable-resistance transducers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/16—Mounting or connecting stylus to transducer with or without damping means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
- H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R21/00—Variable-resistance transducers
- H04R21/04—Gramophone pick-ups using a stylus; Recorders using a stylus
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
- H04R23/006—Transducers other than those covered by groups H04R9/00 - H04R21/00 using solid state devices
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3685269 | 1969-05-08 | ||
| JP3684969 | 1969-05-08 | ||
| JP3685069 | 1969-05-08 | ||
| JP3685569A JPS4839721B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1969-05-08 | 1969-05-08 | |
| JP3685169A JPS4919445B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1969-05-08 | 1969-05-08 | |
| JP3685369A JPS4936241B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1969-05-08 | 1969-05-08 | |
| JP3684769A JPS4919443B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1969-05-08 | 1969-05-08 | |
| JP3684869A JPS4919444B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1969-05-08 | 1969-05-08 | |
| JP3684669 | 1969-05-08 | ||
| JP3685469A JPS4835364B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1969-05-08 | 1969-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2022652A1 true DE2022652A1 (de) | 1970-11-19 |
Family
ID=27579886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702022652 Pending DE2022652A1 (de) | 1969-05-08 | 1970-05-08 | Auf mechanische Beanspruchung ansprechender Halbleiterwandler |
Country Status (5)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3041756A1 (de) * | 1980-11-05 | 1982-06-09 | Siemens AG, 1000 Berlin und 8000 München | Drucksensor |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3805601A (en) * | 1972-07-28 | 1974-04-23 | Bell & Howell Co | High sensitivity semiconductor strain gauge |
| US3849874A (en) * | 1972-07-28 | 1974-11-26 | Bell & Howell Co | Method for making a semiconductor strain transducer |
| US3952171A (en) * | 1974-09-18 | 1976-04-20 | Micro/Acoustics Corporation | Stereo phonograph cartridge |
| JPS5325523Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-02-18 | 1978-06-30 | ||
| GB1523364A (en) * | 1975-02-19 | 1978-08-31 | Matsushita Electric Ind Co Ltd | Phonograph pickup |
| DK137560B (da) * | 1976-06-22 | 1978-03-20 | Ortofon Mfg As | Pickup. |
| GB8322273D0 (en) * | 1983-08-18 | 1983-09-21 | Bell & Howell Co | Applying semiconductor material to substrate |
| US5489900A (en) * | 1994-06-03 | 1996-02-06 | International Business Machines Corporation | Force sensitive transducer for use in a computer keyboard |
| US9063028B2 (en) * | 2010-07-22 | 2015-06-23 | Incident Technologies, Inc. | Apparatus and method for detection of mechanical inputs |
| US9311907B2 (en) | 2014-03-17 | 2016-04-12 | Incident Technologies, Inc. | Musical input device and dynamic thresholding |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3055989A (en) * | 1957-08-12 | 1962-09-25 | Columbia Broadcasting Syst Inc | Ceramic reproducer |
| US3270554A (en) * | 1961-01-04 | 1966-09-06 | Bell Telephone Labor Inc | Diffused layer transducers |
| NL275714A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1961-03-09 | 1900-01-01 | ||
| US3233047A (en) * | 1961-10-02 | 1966-02-01 | Teleprompter Corp | Stereo piezoelectric transducer |
| US3501732A (en) * | 1964-05-04 | 1970-03-17 | Endevco Corp | Semiconductive piezoresistive transducer having a grooved support with electrical contacts |
| FR1556155A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1967-03-21 | 1969-01-31 | ||
| GB1155519A (en) * | 1967-12-15 | 1969-06-18 | Standard Telephones Cables Ltd | Electromechanical Transducer |
-
1970
- 1970-05-04 US US34505A patent/US3673354A/en not_active Expired - Lifetime
- 1970-05-06 NL NL7006595.A patent/NL156886B/xx not_active IP Right Cessation
- 1970-05-08 FR FR7016806A patent/FR2042495B1/fr not_active Expired
- 1970-05-08 DE DE19702022652 patent/DE2022652A1/de active Pending
- 1970-05-08 GB GB2242470A patent/GB1309146A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3041756A1 (de) * | 1980-11-05 | 1982-06-09 | Siemens AG, 1000 Berlin und 8000 München | Drucksensor |
Also Published As
| Publication number | Publication date |
|---|---|
| NL156886B (nl) | 1978-05-16 |
| GB1309146A (en) | 1973-03-07 |
| US3673354A (en) | 1972-06-27 |
| FR2042495A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1971-02-12 |
| NL7006595A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1970-11-10 |
| FR2042495B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1978-06-02 |
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