DE2010987C3 - Verfahren zum "Herstellen von Dunnschicht-Magnetköpfen mit magnetischer Anisotropie - Google Patents
Verfahren zum "Herstellen von Dunnschicht-Magnetköpfen mit magnetischer AnisotropieInfo
- Publication number
- DE2010987C3 DE2010987C3 DE19702010987 DE2010987A DE2010987C3 DE 2010987 C3 DE2010987 C3 DE 2010987C3 DE 19702010987 DE19702010987 DE 19702010987 DE 2010987 A DE2010987 A DE 2010987A DE 2010987 C3 DE2010987 C3 DE 2010987C3
- Authority
- DE
- Germany
- Prior art keywords
- ferrite
- monocrystalline
- layer
- ferromagnetic
- areas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 69
- 238000000034 method Methods 0.000 title claims description 34
- 239000010409 thin film Substances 0.000 title claims description 8
- 229910000859 α-Fe Inorganic materials 0.000 claims description 54
- 239000004020 conductor Substances 0.000 claims description 36
- 239000011701 zinc Substances 0.000 claims description 34
- 230000005294 ferromagnetic effect Effects 0.000 claims description 32
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 22
- 239000013078 crystal Substances 0.000 claims description 21
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 229910018605 Ni—Zn Inorganic materials 0.000 claims description 12
- 229910052759 nickel Inorganic materials 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 238000009792 diffusion process Methods 0.000 claims description 10
- 230000000873 masking effect Effects 0.000 claims description 10
- 229910001308 Zinc ferrite Inorganic materials 0.000 claims description 8
- 229910052748 manganese Inorganic materials 0.000 claims description 8
- 239000011572 manganese Substances 0.000 claims description 8
- WGEATSXPYVGFCC-UHFFFAOYSA-N zinc ferrite Chemical compound O=[Zn].O=[Fe]O[Fe]=O WGEATSXPYVGFCC-UHFFFAOYSA-N 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 229910052596 spinel Inorganic materials 0.000 claims description 6
- 239000011029 spinel Substances 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 6
- 229910052681 coesite Inorganic materials 0.000 claims description 5
- 229910052906 cristobalite Inorganic materials 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 235000012239 silicon dioxide Nutrition 0.000 claims description 5
- 229910052682 stishovite Inorganic materials 0.000 claims description 5
- 229910052905 tridymite Inorganic materials 0.000 claims description 5
- 238000000197 pyrolysis Methods 0.000 claims description 4
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 125000000218 acetic acid group Chemical group C(C)(=O)* 0.000 claims description 3
- 150000001649 bromium compounds Chemical class 0.000 claims description 3
- 150000001805 chlorine compounds Chemical class 0.000 claims description 3
- 230000007062 hydrolysis Effects 0.000 claims description 3
- 238000006460 hydrolysis reaction Methods 0.000 claims description 3
- 150000003891 oxalate salts Chemical class 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 239000010970 precious metal Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000005070 sampling Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 68
- 238000003860 storage Methods 0.000 description 5
- 239000000696 magnetic material Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 206010010219 Compulsions Diseases 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005293 ferrimagnetic effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
- H01F10/20—Ferrites
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702010987 DE2010987C3 (de) | 1970-03-09 | 1970-03-09 | Verfahren zum "Herstellen von Dunnschicht-Magnetköpfen mit magnetischer Anisotropie |
| FR7104518A FR2083913A5 (https=) | 1970-03-09 | 1971-02-02 | |
| JP46005030A JPS5122810B1 (https=) | 1970-03-09 | 1971-02-09 | |
| NL7101726A NL7101726A (https=) | 1970-03-09 | 1971-02-10 | |
| CA106,346A CA947483A (en) | 1970-03-09 | 1971-02-26 | Method for making magnetic thin film recording heads with magnetic anisotropy |
| SE276871A SE362726B (https=) | 1970-03-09 | 1971-03-04 | |
| GB2317771A GB1321144A (en) | 1970-03-09 | 1971-04-19 | Magnetic transducing heads |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702010987 DE2010987C3 (de) | 1970-03-09 | 1970-03-09 | Verfahren zum "Herstellen von Dunnschicht-Magnetköpfen mit magnetischer Anisotropie |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2010987A1 DE2010987A1 (https=) | 1971-09-30 |
| DE2010987B2 DE2010987B2 (de) | 1978-07-13 |
| DE2010987C3 true DE2010987C3 (de) | 1979-03-15 |
Family
ID=5764511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702010987 Expired DE2010987C3 (de) | 1970-03-09 | 1970-03-09 | Verfahren zum "Herstellen von Dunnschicht-Magnetköpfen mit magnetischer Anisotropie |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5122810B1 (https=) |
| CA (1) | CA947483A (https=) |
| DE (1) | DE2010987C3 (https=) |
| FR (1) | FR2083913A5 (https=) |
| GB (1) | GB1321144A (https=) |
| NL (1) | NL7101726A (https=) |
| SE (1) | SE362726B (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3670016B2 (ja) * | 1994-12-16 | 2005-07-13 | ワーナー−ランバート・カンパニー | カプレットをカプセル内に封入する方法及びかかる方法により得ることができる固体剤形 |
| JP2013030618A (ja) | 2011-07-28 | 2013-02-07 | Rohm Co Ltd | 半導体装置 |
| PT118925A (pt) * | 2023-09-18 | 2025-03-18 | Antonio Cameira Eiras Unipessoal Lda | Construção modular de aeronaves, viaturas e barcos |
-
1970
- 1970-03-09 DE DE19702010987 patent/DE2010987C3/de not_active Expired
-
1971
- 1971-02-02 FR FR7104518A patent/FR2083913A5/fr not_active Expired
- 1971-02-09 JP JP46005030A patent/JPS5122810B1/ja active Pending
- 1971-02-10 NL NL7101726A patent/NL7101726A/xx not_active Application Discontinuation
- 1971-02-26 CA CA106,346A patent/CA947483A/en not_active Expired
- 1971-03-04 SE SE276871A patent/SE362726B/xx unknown
- 1971-04-19 GB GB2317771A patent/GB1321144A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL7101726A (https=) | 1971-09-13 |
| FR2083913A5 (https=) | 1971-12-17 |
| JPS5122810B1 (https=) | 1976-07-13 |
| SE362726B (https=) | 1973-12-17 |
| DE2010987A1 (https=) | 1971-09-30 |
| CA947483A (en) | 1974-05-21 |
| DE2010987B2 (de) | 1978-07-13 |
| GB1321144A (en) | 1973-06-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| EI | Miscellaneous see part 3 | ||
| 8339 | Ceased/non-payment of the annual fee |