DE19807214A1 - Mikromechanisches elektrostatisches Relais - Google Patents

Mikromechanisches elektrostatisches Relais

Info

Publication number
DE19807214A1
DE19807214A1 DE1998107214 DE19807214A DE19807214A1 DE 19807214 A1 DE19807214 A1 DE 19807214A1 DE 1998107214 DE1998107214 DE 1998107214 DE 19807214 A DE19807214 A DE 19807214A DE 19807214 A1 DE19807214 A1 DE 19807214A1
Authority
DE
Germany
Prior art keywords
substrate
base substrate
armature
tongue
relay according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE1998107214
Other languages
German (de)
English (en)
Inventor
Susanna Kim Hesse
Hans-Juergen Gevatter
Helmut Schlaak
Martin Hanke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE1998107214 priority Critical patent/DE19807214A1/de
Priority to TW87120680A priority patent/TW434617B/zh
Priority to EP98966571A priority patent/EP1057196A1/de
Priority to PCT/DE1998/003766 priority patent/WO1999043013A1/de
Publication of DE19807214A1 publication Critical patent/DE19807214A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H2059/009—Electrostatic relays; Electro-adhesion relays using permanently polarised dielectric layers
DE1998107214 1998-02-20 1998-02-20 Mikromechanisches elektrostatisches Relais Withdrawn DE19807214A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE1998107214 DE19807214A1 (de) 1998-02-20 1998-02-20 Mikromechanisches elektrostatisches Relais
TW87120680A TW434617B (en) 1998-02-20 1998-12-11 Micro-mechanical electrostatic relay, arrangement of many such relays and method to produce one or more such relays
EP98966571A EP1057196A1 (de) 1998-02-20 1998-12-21 Mikromechanisches elektrostatisches relais
PCT/DE1998/003766 WO1999043013A1 (de) 1998-02-20 1998-12-21 Mikromechanisches elektrostatisches relais

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1998107214 DE19807214A1 (de) 1998-02-20 1998-02-20 Mikromechanisches elektrostatisches Relais

Publications (1)

Publication Number Publication Date
DE19807214A1 true DE19807214A1 (de) 1999-09-16

Family

ID=7858436

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1998107214 Withdrawn DE19807214A1 (de) 1998-02-20 1998-02-20 Mikromechanisches elektrostatisches Relais

Country Status (4)

Country Link
EP (1) EP1057196A1 (und)
DE (1) DE19807214A1 (und)
TW (1) TW434617B (und)
WO (1) WO1999043013A1 (und)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19854450A1 (de) * 1998-11-25 2000-06-15 Tyco Electronics Logistics Ag Mikromechanisches elektrostatisches Relais
WO2002022496A1 (de) * 2000-09-14 2002-03-21 Siemens Aktiengesellschaft Sensorbauteil mit einem in einem kanal isoliert, umströmbar gelagerten, elektrisch leitenden, länglichen element und herstellverfahren hierfür
WO2002022495A1 (de) * 2000-09-14 2002-03-21 Siemens Aktiengesellschaft Sensorbauteil und verfahren zu seiner herstellung
WO2002073645A1 (en) * 2001-03-12 2002-09-19 Hrl Laboratories, Llc Torsion spring for electro-mechanical switches and a cantilever-type rf micro-electromechanical switch incorporating the torsion spring
DE10118195C1 (de) * 2001-04-11 2002-11-07 Siemens Ag Verwendung eines Schaltelements zum Schalten in einem Kernspintomographie-Gerät und Kernspintomographie-Gerät
WO2002091556A1 (fr) * 2001-05-09 2002-11-14 Phs Mems Actionneur electrostatique
US6768403B2 (en) 2002-03-12 2004-07-27 Hrl Laboratories, Llc Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003028059A1 (en) * 2001-09-21 2003-04-03 Hrl Laboratories, Llc Mems switches and methods of making same
GB2569632B (en) * 2017-12-21 2020-08-05 Univ Bristol Electromechanical relay
EP3929960A1 (de) * 2020-06-26 2021-12-29 Siemens Aktiengesellschaft Mems-schalter, verfahren zur herstellung eines mems-schalters und vorrichtung
EP4002407A1 (de) * 2020-11-24 2022-05-25 Siemens Aktiengesellschaft Mikroelektromechanisches schaltelement, vorrichtung und herstellungsverfahren

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4205029C1 (en) * 1992-02-19 1993-02-11 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate
US5278368A (en) * 1991-06-24 1994-01-11 Matsushita Elec. Works, Ltd Electrostatic relay
DE4437259C1 (de) * 1994-10-18 1995-10-19 Siemens Ag Mikromechanisches Relais
US5544001A (en) * 1993-01-26 1996-08-06 Matsushita Electric Works, Ltd. Electrostatic relay

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2706074B1 (fr) * 1993-06-02 1995-07-21 Lewiner Jacques Dispositif de commande du type actionneur à structure symétrique.
FR2706075B1 (fr) * 1993-06-02 1995-07-21 Lewiner Jacques Dispositif de commande du type actionneur à pièce mobile conservant son orientation au cours du mouvement.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278368A (en) * 1991-06-24 1994-01-11 Matsushita Elec. Works, Ltd Electrostatic relay
DE4205029C1 (en) * 1992-02-19 1993-02-11 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate
US5544001A (en) * 1993-01-26 1996-08-06 Matsushita Electric Works, Ltd. Electrostatic relay
DE4437259C1 (de) * 1994-10-18 1995-10-19 Siemens Ag Mikromechanisches Relais

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19854450A1 (de) * 1998-11-25 2000-06-15 Tyco Electronics Logistics Ag Mikromechanisches elektrostatisches Relais
DE19854450C2 (de) * 1998-11-25 2000-12-14 Tyco Electronics Logistics Ag Mikromechanisches elektrostatisches Relais
WO2002022496A1 (de) * 2000-09-14 2002-03-21 Siemens Aktiengesellschaft Sensorbauteil mit einem in einem kanal isoliert, umströmbar gelagerten, elektrisch leitenden, länglichen element und herstellverfahren hierfür
WO2002022495A1 (de) * 2000-09-14 2002-03-21 Siemens Aktiengesellschaft Sensorbauteil und verfahren zu seiner herstellung
WO2002073645A1 (en) * 2001-03-12 2002-09-19 Hrl Laboratories, Llc Torsion spring for electro-mechanical switches and a cantilever-type rf micro-electromechanical switch incorporating the torsion spring
US6842097B2 (en) 2001-03-12 2005-01-11 Hrl Laboratories, Llc Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring
US6847277B2 (en) 2001-03-12 2005-01-25 Hrl Laboratories, Llc Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring
DE10118195C1 (de) * 2001-04-11 2002-11-07 Siemens Ag Verwendung eines Schaltelements zum Schalten in einem Kernspintomographie-Gerät und Kernspintomographie-Gerät
US6710597B2 (en) 2001-04-11 2004-03-23 Siemens Aktiengesellschaft Magnetic resonance tomography apparatus and method for operating same employing an electrostatic relay
WO2002091556A1 (fr) * 2001-05-09 2002-11-14 Phs Mems Actionneur electrostatique
FR2824679A1 (fr) * 2001-05-09 2002-11-15 Phs Mems Actionneur electrostatique
US6768403B2 (en) 2002-03-12 2004-07-27 Hrl Laboratories, Llc Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring

Also Published As

Publication number Publication date
EP1057196A1 (de) 2000-12-06
WO1999043013A1 (de) 1999-08-26
TW434617B (en) 2001-05-16

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8139 Disposal/non-payment of the annual fee