DE19781983T1 - Verfahren und Vorrichtung zur gesteuerten Teilchenabscheidung auf Oberflächen - Google Patents

Verfahren und Vorrichtung zur gesteuerten Teilchenabscheidung auf Oberflächen

Info

Publication number
DE19781983T1
DE19781983T1 DE19781983T DE19781983T DE19781983T1 DE 19781983 T1 DE19781983 T1 DE 19781983T1 DE 19781983 T DE19781983 T DE 19781983T DE 19781983 T DE19781983 T DE 19781983T DE 19781983 T1 DE19781983 T1 DE 19781983T1
Authority
DE
Germany
Prior art keywords
particle deposition
controlled particle
controlled
deposition
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19781983T
Other languages
English (en)
Inventor
Benjamin Y H Liu
James J Sun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MSP Corp
Original Assignee
MSP Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MSP Corp filed Critical MSP Corp
Publication of DE19781983T1 publication Critical patent/DE19781983T1/de
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/26—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with means for mechanically breaking-up or deflecting the jet after discharge, e.g. with fixed deflectors; Breaking-up the discharged liquid or other fluent material by impinging jets
    • B05B1/262—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with means for mechanically breaking-up or deflecting the jet after discharge, e.g. with fixed deflectors; Breaking-up the discharged liquid or other fluent material by impinging jets with fixed deflectors
    • B05B1/267—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with means for mechanically breaking-up or deflecting the jet after discharge, e.g. with fixed deflectors; Breaking-up the discharged liquid or other fluent material by impinging jets with fixed deflectors the liquid or other fluent material being deflected in determined directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
    • B05B5/043—Discharge apparatus, e.g. electrostatic spray guns using induction-charging
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/0012—Apparatus for achieving spraying before discharge from the apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/24—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas with means, e.g. a container, for supplying liquid or other fluent material to a discharge device
    • B05B7/2402—Apparatus to be carried on or by a person, e.g. by hand; Apparatus comprising containers fixed to the discharge device
    • B05B7/2405—Apparatus to be carried on or by a person, e.g. by hand; Apparatus comprising containers fixed to the discharge device using an atomising fluid as carrying fluid for feeding, e.g. by suction or pressure, a carried liquid from the container to the nozzle
    • B05B7/2424—Apparatus to be carried on or by a person, e.g. by hand; Apparatus comprising containers fixed to the discharge device using an atomising fluid as carrying fluid for feeding, e.g. by suction or pressure, a carried liquid from the container to the nozzle the carried liquid and the main stream of atomising fluid being brought together downstream of the container before discharge
DE19781983T 1996-09-06 1997-08-19 Verfahren und Vorrichtung zur gesteuerten Teilchenabscheidung auf Oberflächen Ceased DE19781983T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/706,664 US5916640A (en) 1996-09-06 1996-09-06 Method and apparatus for controlled particle deposition on surfaces
PCT/US1997/014562 WO1998009731A1 (en) 1996-09-06 1997-08-19 Method and apparatus for controlled particle deposition on surfaces

Publications (1)

Publication Number Publication Date
DE19781983T1 true DE19781983T1 (de) 1999-08-12

Family

ID=24838566

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19781983T Ceased DE19781983T1 (de) 1996-09-06 1997-08-19 Verfahren und Vorrichtung zur gesteuerten Teilchenabscheidung auf Oberflächen

Country Status (4)

Country Link
US (1) US5916640A (de)
JP (1) JP2000517243A (de)
DE (1) DE19781983T1 (de)
WO (1) WO1998009731A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008013540A1 (de) * 2008-03-11 2009-09-24 Microjet Gmbh Vorrichtung zum Erzeugen und Versprühen eines Aerosols

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US6349668B1 (en) * 1998-04-27 2002-02-26 Msp Corporation Method and apparatus for thin film deposition on large area substrates
GB9900955D0 (en) * 1999-01-15 1999-03-10 Imperial College Material deposition
CN1243848C (zh) * 1999-10-12 2006-03-01 东陶机器株式会社 复合构造物及其制作方法和制作装置
US6739518B1 (en) * 1999-12-21 2004-05-25 E. I. Du Pont De Nemours And Company Spray applicator
AU5273401A (en) * 2000-04-18 2001-11-12 Kang-Ho Ahn Apparatus for manufacturing ultra-fine particles using electrospray device and method thereof
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DE10049204A1 (de) * 2000-10-05 2002-04-11 Alstom Switzerland Ltd Vorrichtung und Verfahren zur elektrostatischen Zerstäubung eines flüssigen Mediums
US6746539B2 (en) 2001-01-30 2004-06-08 Msp Corporation Scanning deposition head for depositing particles on a wafer
US6607597B2 (en) 2001-01-30 2003-08-19 Msp Corporation Method and apparatus for deposition of particles on surfaces
KR100701013B1 (ko) * 2001-05-21 2007-03-29 삼성전자주식회사 레이저 빔을 이용한 비금속 기판의 절단방법 및 장치
US20020197393A1 (en) * 2001-06-08 2002-12-26 Hideaki Kuwabara Process of manufacturing luminescent device
US20030232410A1 (en) * 2002-03-21 2003-12-18 Monika Liljedahl Methods and compositions for using zinc finger endonucleases to enhance homologous recombination
DE10349642A1 (de) * 2003-10-21 2005-05-19 Bielomatik Leuze Gmbh + Co Kg Vorrichtung zur Aerosolerzeugung und Injektoreinheit
JP2006068726A (ja) * 2004-08-06 2006-03-16 Sanden Corp 液体噴霧装置
US7882799B2 (en) * 2004-10-18 2011-02-08 Msp Corporation Method and apparatus for generating charged particles for deposition on a surface
US7493898B2 (en) * 2005-04-13 2009-02-24 Healthline Medical, Inc. Inhalation apparatus
EP1757370B8 (de) * 2005-08-24 2012-03-14 Brother Kogyo Kabushiki Kaisha Filmbildungsvorrichtung und Strahldüse
US7604676B2 (en) * 2006-02-02 2009-10-20 Detroit Diesel Corporation Inertial impactor for closed crankcase ventilation
US8114473B2 (en) * 2007-04-27 2012-02-14 Toto Ltd. Composite structure and production method thereof
JP4858331B2 (ja) * 2007-06-26 2012-01-18 株式会社デンソー ミストエッチング方法及び装置ならびに半導体装置の製造方法
JP2008091931A (ja) * 2007-10-09 2008-04-17 Denso Corp 微粒子発生方法および装置
US8025025B2 (en) * 2008-04-11 2011-09-27 The Board Of Trustees Of The University Of Illinois Apparatus and method for applying a film on a substrate
TWI349580B (en) * 2008-07-11 2011-10-01 Univ Nat Taiwan Electrostatic coating apparatus
JP5781546B2 (ja) * 2010-02-05 2015-09-24 エムエスピー コーポレーション 液体前躯体を気化するための微細液滴噴霧器
WO2015064438A1 (ja) * 2013-10-30 2015-05-07 株式会社ニコン 薄膜の製造方法、透明導電膜
JP6112130B2 (ja) * 2015-03-25 2017-04-12 トヨタ自動車株式会社 静電ノズル、吐出装置及び半導体モジュールの製造方法
CN105499047A (zh) * 2016-01-22 2016-04-20 苏州市计量测试研究所 一种新型气溶胶雾化装置
CN107537704A (zh) * 2017-08-18 2018-01-05 广州市拓丰电器有限公司 一种水雾纳米气化转换装置
WO2019223570A1 (zh) * 2018-05-24 2019-11-28 青岛海尔滚筒洗衣机有限公司 一种衣物处理装置及其控制方法
CN112823049A (zh) * 2018-06-21 2021-05-18 萨班企业私人有限公司 液滴带通过滤器
JP2021133261A (ja) * 2020-02-21 2021-09-13 パナソニックＩｐマネジメント株式会社 静電噴霧用組成物および静電噴霧装置
JP7310781B2 (ja) * 2020-11-06 2023-07-19 株式会社豊田中央研究所 塗膜及びその製造方法、並びに、粉体塗工装置
CN112903375B (zh) * 2021-01-19 2022-06-10 南京信息工程大学 一种气溶胶采集富集仪及工作方法
JP2023012690A (ja) * 2021-07-14 2023-01-26 トヨタ自動車株式会社 電極の製造方法および電極製造装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008013540A1 (de) * 2008-03-11 2009-09-24 Microjet Gmbh Vorrichtung zum Erzeugen und Versprühen eines Aerosols

Also Published As

Publication number Publication date
JP2000517243A (ja) 2000-12-26
US5916640A (en) 1999-06-29
WO1998009731A1 (en) 1998-03-12

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8131 Rejection