DE19781572T1 - Substratabstützvorrichtung für ein Substratgehäuse - Google Patents

Substratabstützvorrichtung für ein Substratgehäuse

Info

Publication number
DE19781572T1
DE19781572T1 DE19781572T DE19781572T DE19781572T1 DE 19781572 T1 DE19781572 T1 DE 19781572T1 DE 19781572 T DE19781572 T DE 19781572T DE 19781572 T DE19781572 T DE 19781572T DE 19781572 T1 DE19781572 T1 DE 19781572T1
Authority
DE
Germany
Prior art keywords
substrate
support device
housing
substrate support
substrate housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19781572T
Other languages
English (en)
Other versions
DE19781572C2 (de
Inventor
Daniel A Babbs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
PROGRESSIVE SYS TECH Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PROGRESSIVE SYS TECH Inc filed Critical PROGRESSIVE SYS TECH Inc
Publication of DE19781572T1 publication Critical patent/DE19781572T1/de
Application granted granted Critical
Publication of DE19781572C2 publication Critical patent/DE19781572C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/14—Mounting supporting structure in casing or on frame or rack
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47F—SPECIAL FURNITURE, FITTINGS, OR ACCESSORIES FOR SHOPS, STOREHOUSES, BARS, RESTAURANTS OR THE LIKE; PAYING COUNTERS
    • A47F7/00—Show stands, hangers, or shelves, adapted for particular articles or materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE19781572T 1996-02-06 1997-02-06 Substratabstützvorrichtung und Substratträger für ein Substratgehäuse Expired - Fee Related DE19781572C2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/599,537 US5823361A (en) 1996-02-06 1996-02-06 Substrate support apparatus for a substrate housing
PCT/US1997/001902 WO1997028724A1 (en) 1996-02-06 1997-02-06 Substrate support apparatus for a substrate housing

Publications (2)

Publication Number Publication Date
DE19781572T1 true DE19781572T1 (de) 1999-03-25
DE19781572C2 DE19781572C2 (de) 2002-08-14

Family

ID=24400032

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19781572T Expired - Fee Related DE19781572C2 (de) 1996-02-06 1997-02-06 Substratabstützvorrichtung und Substratträger für ein Substratgehäuse

Country Status (7)

Country Link
US (2) US5823361A (de)
JP (1) JP4153037B2 (de)
KR (1) KR100482237B1 (de)
CN (1) CN1221454C (de)
AU (1) AU1954297A (de)
DE (1) DE19781572C2 (de)
WO (1) WO1997028724A1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100247138B1 (ko) * 1997-11-20 2000-03-15 구본준, 론 위라하디락사 유리기판 적재용 카세트
TW460599B (en) * 1998-01-14 2001-10-21 Toshiba Corp Method for forming fine wiring pattern
US6691237B1 (en) 2000-08-08 2004-02-10 Dell Products, L.P. Active memory pool management policies
US20030087455A1 (en) * 2001-11-07 2003-05-08 Eggers Mitchell D Sample carrier system
US20030129755A1 (en) * 2001-11-07 2003-07-10 Genvault Corporation System and method of storing and retrieving storage elements
US7584240B2 (en) 2001-11-07 2009-09-01 Genvault Corporation Automated biological sample archive for storage, retrieval and analysis of large numbers of samples for remote clients
US20030087425A1 (en) * 2001-11-07 2003-05-08 Eggers Mitchell D Sample carrier
KR100675627B1 (ko) * 2002-10-10 2007-02-01 엘지.필립스 엘시디 주식회사 기판 수납용 카세트
US7718442B2 (en) * 2002-11-22 2010-05-18 Genvault Corporation Sealed sample storage element system and method
US20100075858A1 (en) * 2003-04-29 2010-03-25 Genvault Corporation Biological bar code
DE10347338A1 (de) * 2003-10-11 2005-05-19 Schott Ag Dünnstsubstrathalter
KR101010481B1 (ko) * 2003-12-13 2011-01-21 엘지디스플레이 주식회사 기판 거치대
KR100973816B1 (ko) * 2003-12-23 2010-08-03 삼성전자주식회사 대형 기판용 카세트
JP2008509226A (ja) * 2004-05-24 2008-03-27 ジェンボールト コーポレイション 回収可能な形式での安定なタンパク質保管および安定な核酸保管
TWI268265B (en) * 2004-08-13 2006-12-11 Au Optronics Corp Glass substrate cassette
TWI262753B (en) * 2005-03-18 2006-09-21 Allied Material Technology Cor Substrate cassette
TWI315002B (en) * 2005-04-15 2009-09-21 Innolux Display Corp Substrate cassette
EP1902465A2 (de) 2005-07-08 2008-03-26 Asyst Technologies, Inc. Arbeitsstück-haltestrukturen und vorrichtungen für den zugriff darauf
WO2010031007A2 (en) 2008-09-12 2010-03-18 Genvault Corporation Matrices and media for storage and stabilization of biomolecules
KR101212889B1 (ko) * 2010-10-01 2012-12-14 하이디스 테크놀로지 주식회사 기판 적재용 카세트
US8997996B2 (en) * 2013-03-18 2015-04-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Drawer type cushioning packaging device for liquid crystal glass
DE102013007454A1 (de) * 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten
CN103287724B (zh) * 2013-06-24 2015-04-08 南昌欧菲光学技术有限公司 玻璃支撑架
US20170244006A1 (en) * 2014-09-19 2017-08-24 Applied Materials, Inc. Parallel plate inline substrate processing tool
KR102117314B1 (ko) * 2015-08-25 2020-06-01 엔테그리스, 아이엔씨. 인터로킹 모듈형 기판 지지 칼럼
JP6610518B2 (ja) * 2016-11-30 2019-11-27 株式会社ダイフク 検査装置
US10020213B1 (en) * 2016-12-30 2018-07-10 Sunpower Corporation Semiconductor wafer carriers
CN109852925B (zh) * 2017-11-30 2021-11-12 佳能特机株式会社 蒸镀装置
CN110979937A (zh) * 2019-12-16 2020-04-10 安徽超文玻璃科技有限公司 一种玻璃产品用的运输装置
CN112455921B (zh) * 2020-12-07 2023-11-14 池州海琳服装有限公司 一种夹层玻璃储存架
CN113649296B (zh) * 2021-08-23 2023-06-27 深圳市优界科技有限公司 一种可扩容晶圆分选机

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1246940A (en) * 1915-03-10 1917-11-20 United Shoe Machinery Ab Rack.
US1900053A (en) * 1928-11-22 1933-03-07 United Shoe Machinery Corp Rack
US4572101A (en) * 1983-05-13 1986-02-25 Asq Boats, Inc. Side lifting wafer boat assembly
JPS6459454A (en) * 1987-08-31 1989-03-07 Hitachi Ltd Method and device for fourier transformation
US4881885A (en) * 1988-04-15 1989-11-21 International Business Machines Corporation Dam for lead encapsulation
JPH05102056A (ja) * 1991-10-11 1993-04-23 Rohm Co Ltd ウエハー支持具
US5429251A (en) * 1993-09-22 1995-07-04 Legacy Systems, Inc. Semiconductor wafer end effector
JP2888409B2 (ja) * 1993-12-14 1999-05-10 信越半導体株式会社 ウェーハ洗浄槽
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers

Also Published As

Publication number Publication date
KR19990082307A (ko) 1999-11-25
AU1954297A (en) 1997-08-28
CN1210452A (zh) 1999-03-10
KR100482237B1 (ko) 2005-06-16
JP4153037B2 (ja) 2008-09-17
JP2000504485A (ja) 2000-04-11
DE19781572C2 (de) 2002-08-14
CN1221454C (zh) 2005-10-05
US5984116A (en) 1999-11-16
WO1997028724A1 (en) 1997-08-14
US5823361A (en) 1998-10-20

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: B65D 85/30

8607 Notification of search results after publication
8607 Notification of search results after publication
8127 New person/name/address of the applicant

Owner name: ASYST TECHNOLOGIES, INC., FREMONT, CALIF., US

D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ENTEGRIS CAYMAN LTD., CHASKA, MINN., US

8327 Change in the person/name/address of the patent owner

Owner name: ENTEGRIS, INC., CHASKA, MINN., US

8339 Ceased/non-payment of the annual fee