DE1965296U - ELECTRIC CAPACITOR. - Google Patents

Description

: * 1t

Ή 17 969 / 48t Gm

ΙΌ V. Philips'G-loeilampenfabrieken

NV PHILIPS ¹ GLOEILAMPENPABRIEKENv EINDHOVEN / NETHERLANDS

Electric capacitor

. _α The innovation relates to an electric capacitor, which consists of an insulating support on which alternating conductive layers and insulating layers are mounted, wherein the conductive layers are alternately connected to one another, then two sets of conductive layers that result, the insulating through the Layers are isolated from each other.

'In the manufacture of such capacitors, see the V usually apply different masks to the layers with the

to generate the desired overlap. This often means that, ι the vacuum between the vapor deposition processes of different layers has to be interrupted or that masks and carriers have to be handled in a vacuum, which leads to complicated structures.

The aim of the innovation is to use a capacitor as described Creation of a type in which the successive Layers with either a slight change in position or

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several of the required parts or none at all change of position to be carried out by external means can be vapor-deposited at the desired point *

The capacitor and the innovation is characterized by "1 that all layers are almost the same shape and size ■ *, and the two sets of conductive layers and the insulating layers are attached in three stacks, one of which is made up of the insulating layers, the second is made up the conductive layers of one set and the third the conductive layers of the second set, with subsequent layers of each stack being the first layers of the stack and almost not protrude beyond it, and the mutual position of the stack and the shape of the Layers are such that, to form the terminals, each set of conductive layers from the stack of insulating layers protrudes and the layers of the two sentences through the iso- ■ £ conductive layers that look laterally up to a point between the local boundaries of the two stacks Layers extend, are isolated from each other.

The layers preferably have the shape of an isosceles Trapezes andTaie different stacks in one direction offset from one another transversely to the parallel sides of the trapezoid.

An embodiment of a capacitor according to the innovation -. £ and a process for its production are described on the basis of the Drawing described in more detail in the

* Fig. 1 is a plan view of a capacitor according to the innovation and

Fig. 2 shows an apparatus for making the capacitor.

According to FIG. 1, the. electrical capacitor made of an insulating carrier made of an insulating silicon oxide layer 1,

which is mounted on a disk made of a silicon single crystal, from which a solid-state circuit is built up, for example. The capacitor consists of a set of conductive layers 2, a set of insulating layers j3 and a set of conductive layers Layers 4. Each subsequent layer of a set covers the previous layer of that set. The shape of each layer is that of an isosceles trapezoid. The sentences are with Relative to each other displaced along the line bisecting the parallel sides. The layers of sentence 2 are to the left of the Set 3 is in electrical contact with each other and the layers of set 4 are to the right of set> electrically in contact with each other, the set 2 being separated by the layers of set 3 is isolated from sentence 4.

The manner in which the capacitor is incorporated in the body circuit is indicated by the dashed lines showing the locations of conductors 5 and β. ^:

With a 2000 R thick aluminum

layer, a layer similar to sentence 4 and a 6000 p Trapezoid with 2 or 2.75 mm long, parallel sides 3 mm apart is used, the overlapping part can be 2.2 mm longj when using layer sets, an increased capacity can be achieved using the same area. The capacity can easily be determined experimentally for each number of layers and for each shape. _

Fig. 2 shows an apparatus; which is arranged in a vacuum bell (not shown) ^: and from a carrier 7 for a silicon wafer 8 with a layer -4. made of silicon oxide and a carrier 9 for a MaslqsVlQ-. with a trapezoidal opening '"1T with those in the foregoing for the' layers of the sentences

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2, 3 and 4 dimensions given. The direction in which the parallel sides of the trapezoid extend is perpendicular to the plane of the drawing. ;

Three evaporation boats 12 / I ^ raid 14 are in one die the plane containing the two parallel sides bisecting the line attached at a distance from each other / whereby the shuttle 13 lies immediately below the center of the trapezoid «. The boats 12 and 14 contain aluminum and the boat 13 contains silicon monoxide.

The distance between the mask 10 and the surface of the layer 1 is 1 mm, that between the mask 10 and the boat 13 is 12.7 cm and that between the boat and the boat 12 and 14 is 5.08 cm. It should be noted that the dimensions used in the device depend on the nature of the steam sources formed by the boats 12, 13: and 14. It can, for example, the disc "eight more are closer to the mask 10, the more the sources of a point source approach because the Aufdampfhalbschatten is less pronounced - ■..", "-" - ^": ■ - ■■" ■ ' : "'.

When making the capacitor, the boat is used generates steam in the order 12, 13, 14, 13, 12 etc., so that see layers 2, J, and 4 result.

Claims (1)

2 ff θ O 9 6 -11 - 5 - : ~ λ: ■ "■■. Protection claims ; S 1. Electrical capacitor, which consists of an insulating support, on which conductive layers and insulating layers alternate a layers are attached, with the conductive layers alternating are interconnected to form two sets of conductive layers through the insulating Layers are isolated from one another, characterized in that all layers have almost the same shape and size have and the two sets of conductive layers and the insulating layers are attached in three stacks, one of which is made up of the insulating layers and the second is made of the conductive layers of one set and the third the conductive layers of the second set, where ± the subsequent layers of each stack cover the first layers of the stack and hardly protrude beyond them, ^ and the mutual position of the stacks and the shape of the layers are such that to form the terminals, each set of conductive layers from the stack of insulating layers protrudes and the layers of the two sets through the insulating layers that extend laterally .to a point extend between the local boundaries of the two stacks of conductive layers, are insulated from one another. , ς 2. capacitor according to claim 1, characterized in that the layers have the shape of an isosceles trapezoid J and the various stacks are offset from one another in a direction transverse to the parallel sides of the trapezoid.