ES317886A1 - A method of depositing by steam, on a support differently constituted, layers that are partially distributed. (Machine-translation by Google Translate, not legally binding) - Google Patents

A method of depositing by steam, on a support differently constituted, layers that are partially distributed. (Machine-translation by Google Translate, not legally binding)

Info

Publication number
ES317886A1
ES317886A1 ES0317886A ES317886A ES317886A1 ES 317886 A1 ES317886 A1 ES 317886A1 ES 0317886 A ES0317886 A ES 0317886A ES 317886 A ES317886 A ES 317886A ES 317886 A1 ES317886 A1 ES 317886A1
Authority
ES
Spain
Prior art keywords
layers
mask
evaporation
source
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES0317886A
Other languages
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of ES317886A1 publication Critical patent/ES317886A1/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

A method of vapor deposition, on a differently constituted support, partially overlapping layers, in particular alternating conductive and dielectric layers to form an electric condenser, in which method for each of the differently constructed layers there is present a source of evaporation and the shape of the layer deposited by evaporation from said source is determined by an opening of a mask located between said source and the support and spaced therefrom, characterized in that for the deposition of all said layers use is made of one and the same opening of said mask, obtaining the desired overlap of said layers differently constituted by different relative positions of the source of evaporation, the mask and the support, the width of at least a part of the opening of said mask, said width being measured in a direction transverse to the direction of a relative displacement of the mask and the porte, or the direction of a line that connects the sources of evaporation, which exhibits when going towards one of the ends of the opening determined by said direction, a more or less continuous decrease. (Machine-translation by Google Translate, not legally binding)
ES0317886A 1964-09-30 1965-09-28 A method of depositing by steam, on a support differently constituted, layers that are partially distributed. (Machine-translation by Google Translate, not legally binding) Expired ES317886A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3980564 1964-09-30

Publications (1)

Publication Number Publication Date
ES317886A1 true ES317886A1 (en) 1966-05-01

Family

ID=10411601

Family Applications (1)

Application Number Title Priority Date Filing Date
ES0317886A Expired ES317886A1 (en) 1964-09-30 1965-09-28 A method of depositing by steam, on a support differently constituted, layers that are partially distributed. (Machine-translation by Google Translate, not legally binding)

Country Status (4)

Country Link
BE (1) BE670311A (en)
DE (1) DE1965296U (en)
ES (1) ES317886A1 (en)
NL (1) NL6512525A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2908467A1 (en) * 1979-03-05 1980-09-11 Siemens Ag REGENERABLE ELECTRIC LAYER CAPACITOR

Also Published As

Publication number Publication date
BE670311A (en) 1966-03-29
DE1965296U (en) 1967-08-03
NL6512525A (en) 1966-03-31

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