CS180767B1 - Method of making tin,abrasive resistant layers from carbides by chemical deposition in vapor phase on metallic or non-metallic bases - Google Patents

Method of making tin,abrasive resistant layers from carbides by chemical deposition in vapor phase on metallic or non-metallic bases

Info

Publication number
CS180767B1
CS180767B1 CS504074A CS504074A CS180767B1 CS 180767 B1 CS180767 B1 CS 180767B1 CS 504074 A CS504074 A CS 504074A CS 504074 A CS504074 A CS 504074A CS 180767 B1 CS180767 B1 CS 180767B1
Authority
CS
Czechoslovakia
Prior art keywords
metallic
carbides
vapor phase
chemical deposition
resistant layers
Prior art date
Application number
CS504074A
Other languages
Czech (cs)
Inventor
Rainer Moeller
Gunter Kroedel
Michael Kleinert
Lutz Fabian
Original Assignee
Rainer Moeller
Gunter Kroedel
Michael Kleinert
Lutz Fabian
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rainer Moeller, Gunter Kroedel, Michael Kleinert, Lutz Fabian filed Critical Rainer Moeller
Publication of CS180767B1 publication Critical patent/CS180767B1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
CS504074A 1973-07-24 1974-07-15 Method of making tin,abrasive resistant layers from carbides by chemical deposition in vapor phase on metallic or non-metallic bases CS180767B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD17263773A DD105463A1 (en) 1973-07-24 1973-07-24

Publications (1)

Publication Number Publication Date
CS180767B1 true CS180767B1 (en) 1978-01-31

Family

ID=5492281

Family Applications (1)

Application Number Title Priority Date Filing Date
CS504074A CS180767B1 (en) 1973-07-24 1974-07-15 Method of making tin,abrasive resistant layers from carbides by chemical deposition in vapor phase on metallic or non-metallic bases

Country Status (4)

Country Link
CS (1) CS180767B1 (en)
DD (1) DD105463A1 (en)
DE (1) DE2360033A1 (en)
GB (1) GB1460481A (en)

Also Published As

Publication number Publication date
DD105463A1 (en) 1974-04-20
GB1460481A (en) 1977-01-06
DE2360033A1 (en) 1975-04-03

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