Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Hochvakuum GmbH
Original Assignee
Balzers Hochvakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum GmbHfiledCriticalBalzers Hochvakuum GmbH
Publication of DE1959763UpublicationCriticalpatent/DE1959763U/de
H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
H01J9/38—Exhausting, degassing, filling, or cleaning vessels
Atemluftversorgungs-apparat mit einem oder mehreren fluktuations-ventilen, die auf einem perfektioniertem system ohne mechanische gelenkverbindungen beruhen