DE19580845T1 - Verfahren und Vorrichtung zum Regenerieren von gebrauchtem Arbeitsfluid - Google Patents

Verfahren und Vorrichtung zum Regenerieren von gebrauchtem Arbeitsfluid

Info

Publication number
DE19580845T1
DE19580845T1 DE19580845T DE19580845T DE19580845T1 DE 19580845 T1 DE19580845 T1 DE 19580845T1 DE 19580845 T DE19580845 T DE 19580845T DE 19580845 T DE19580845 T DE 19580845T DE 19580845 T1 DE19580845 T1 DE 19580845T1
Authority
DE
Germany
Prior art keywords
working fluid
used working
regenerating used
regenerating
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19580845T
Other languages
German (de)
English (en)
Inventor
Hiroshi Yorita
Takashi Yoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Noritake Co Ltd
Original Assignee
Noritake Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP14000994A external-priority patent/JPH08965A/ja
Priority claimed from JP1176295A external-priority patent/JPH08197536A/ja
Application filed by Noritake Co Ltd filed Critical Noritake Co Ltd
Publication of DE19580845T1 publication Critical patent/DE19580845T1/de
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
    • C10M175/0058—Working-up used lubricants to recover useful products ; Cleaning by filtration and centrifugation processes; apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D17/00—Separation of liquids, not provided for elsewhere, e.g. by thermal diffusion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
    • B01D35/12—Devices for taking out of action one or more units of multi- unit filters, e.g. for regeneration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D37/00—Processes of filtration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D37/00—Processes of filtration
    • B01D37/04—Controlling the filtration
    • B01D37/041—Controlling the filtration by clearness or turbidity measuring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D37/00—Processes of filtration
    • B01D37/04—Controlling the filtration
    • B01D37/043—Controlling the filtration by flow measuring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D37/00—Processes of filtration
    • B01D37/04—Controlling the filtration
    • B01D37/046—Controlling the filtration by pressure measuring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/16—Feed pretreatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/22—Controlling or regulating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
    • B28D1/025—Use, recovery or regeneration of abrasive mediums
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Water Supply & Treatment (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mining & Mineral Resources (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
DE19580845T 1994-06-22 1995-06-20 Verfahren und Vorrichtung zum Regenerieren von gebrauchtem Arbeitsfluid Ceased DE19580845T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP14000994A JPH08965A (ja) 1994-06-22 1994-06-22 加工廃液再生方法および加工廃液再生装置
JP1176295A JPH08197536A (ja) 1995-01-27 1995-01-27 加工廃液再生方法および加工廃液再生装置
PCT/JP1995/001239 WO1995035261A1 (en) 1994-06-22 1995-06-20 Machining process waste liquor regenerating method and machining process waste liquor regenerating apparatus

Publications (1)

Publication Number Publication Date
DE19580845T1 true DE19580845T1 (de) 1996-10-31

Family

ID=26347282

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19580845T Ceased DE19580845T1 (de) 1994-06-22 1995-06-20 Verfahren und Vorrichtung zum Regenerieren von gebrauchtem Arbeitsfluid

Country Status (5)

Country Link
US (1) US5772900A (enExample)
KR (1) KR100229989B1 (enExample)
DE (1) DE19580845T1 (enExample)
TW (1) TW283667B (enExample)
WO (1) WO1995035261A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10120608B4 (de) * 2000-05-03 2007-10-04 Karl-Heinz Pfaff Verfahren zur Filtration einer Flüssigkeit und Filtereinrichtung dafür

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998049102A1 (de) * 1997-04-28 1998-11-05 Siemens Aktiengesellschaft Verfahren und vorrichtung zur behandlung von abwasser aus einem chemisch-mechanischen polierprozess in der chipfertigung
US6379538B1 (en) * 1997-06-05 2002-04-30 Lucid Treatment Systems, Inc. Apparatus for separation and recovery of liquid and slurry abrasives used for polishing
US6099398A (en) * 1998-08-20 2000-08-08 C.D.S. Inc. Media assist gaseous nitrogen distribution system for deflashing machine
US6280300B1 (en) * 1998-11-25 2001-08-28 Ebara Corporation Filter apparatus
JP3426149B2 (ja) * 1998-12-25 2003-07-14 富士通株式会社 半導体製造における研磨廃液再利用方法及び再利用装置
DE19912252A1 (de) * 1999-03-18 2000-09-28 Wacker Siltronic Halbleitermat Verfahren zum Wiederaufarbeiten einer Suspension
US6746309B2 (en) * 1999-05-27 2004-06-08 Sanyo Electric Co., Ltd. Method of fabricating a semiconductor device
DE10008023A1 (de) 2000-02-22 2001-08-23 Qiagen Gmbh Vorrichtung zum Filtern und Beseitigen von Flüssigkeiten
JP2001287163A (ja) * 2000-04-06 2001-10-16 Nec Corp 研磨用スラリー再生装置
EP1519779B1 (en) * 2002-06-26 2011-11-09 Københavns Universitet (University of Copenhagen) Dual porosity filter
US20040014403A1 (en) * 2002-07-16 2004-01-22 Oberkampf Brandon L. CMP point of use filtration
JP2004146041A (ja) * 2002-10-04 2004-05-20 Fuji Photo Film Co Ltd 磁気記録媒体の製造方法
ATE528054T1 (de) * 2004-01-30 2011-10-15 P M P O S R L Anlage und verfahren zur behandlung eines kühlfluids in mechanischen bearbeitungsanlagen
KR101323765B1 (ko) * 2006-02-24 2013-10-31 가부시키가이샤 아이에이치아이 카이덴기카이 실리콘입자의 처리방법 및 장치
EP2016992B1 (de) * 2007-07-16 2012-05-30 KRONES Aktiengesellschaft Vorrichtung und Verfahren zum Aufbereiten von in Brauereien anfallenden Reinigungsflüssigkeiten
WO2009056153A1 (en) * 2007-10-30 2009-05-07 Pall Corporation Method and system for manufacturing wafer-like slices from a substrate material
JP2011502054A (ja) * 2007-10-30 2011-01-20 ポール・コーポレーション 使用済み研磨スラリーを処理するための方法
RU2011110378A (ru) * 2008-08-19 2012-09-27 ДАУ ГЛОБАЛ ТЕКНОЛОДЖИЗ ЭлЭлСи (US) Классифицированная каталитическая композиция, устройство и способ
KR100985861B1 (ko) * 2008-09-24 2010-10-08 씨앤지하이테크 주식회사 반도체용 슬러리 공급장치 및 슬러리 공급방법
JP2010167551A (ja) * 2008-12-26 2010-08-05 Nomura Micro Sci Co Ltd 使用済みスラリーの再生方法
DE102009044204A1 (de) * 2009-10-08 2011-04-28 Fab Service Gmbh Wiederaufbereitungsverfahren und Wiederaufbereitungsvorrichtung zur Wiederaufbereitung von Slurry-Abwasser aus einem Halbleiterbearbeitungs-prozess, insbesondere aus einem chemisch-mechanischen Polierprozess
US20120042575A1 (en) * 2010-08-18 2012-02-23 Cabot Microelectronics Corporation Cmp slurry recycling system and methods
US8696404B2 (en) * 2011-12-21 2014-04-15 WD Media, LLC Systems for recycling slurry materials during polishing processes
US10112136B2 (en) * 2012-02-03 2018-10-30 Enviro-Fab Llc Fluid lubricant and material shavings recapture system for a cutting operation
WO2013122123A1 (ja) 2012-02-17 2013-08-22 コニカミノルタ株式会社 研磨材再生方法
CN104619462B (zh) * 2012-09-14 2017-08-01 株式会社Lg化学 含氧化铈废磨料的再生方法
JP5580388B2 (ja) * 2012-11-02 2014-08-27 ファナック株式会社 フィルタ洗浄装置を備えた工作機械
JP6000119B2 (ja) * 2012-12-27 2016-09-28 株式会社ディスコ 加工廃液処理装置
DE102013211252A1 (de) * 2013-06-17 2014-12-31 Robert Bosch Gmbh Anlage und Verfahren zur Behandlung von verunreinigtem Abwasser
CN105235083B (zh) * 2015-09-30 2017-02-01 浙江辉弘光电能源有限公司 一种硅片切割机用切削液去水结构
SG11202100393TA (en) 2018-07-27 2021-02-25 Arc Medical Devices Inc Highly purified fucans for the treatment of fibrous adhesions
US12186334B2 (en) 2018-07-27 2025-01-07 ARC Medical Inc. High-molecular-weight fucans for treating fibrous adhesions and other diseases and conditions
US12179299B2 (en) * 2018-08-07 2024-12-31 Illinois Tool Works Inc. Machine tool with recirculating coolant filtration system
MX2021000866A (es) 2019-03-05 2021-06-15 Arc Medical Devices Inc Sistemas y metodos para la filtracion de flujo tangencial de composiciones viscosas.
CN109897723A (zh) * 2019-03-22 2019-06-18 江苏赛瑞迈科新材料有限公司 一种废润滑油再生生产的预处理方法
JP7702481B2 (ja) * 2020-09-16 2025-07-03 イリノイ トゥール ワークス インコーポレイティド 材料除去機のためのスタンドパイプ再循環システム
JP2024043122A (ja) * 2022-09-16 2024-03-29 キオクシア株式会社 端材回収装置
CN116036713A (zh) * 2023-01-10 2023-05-02 深圳市奥科宝特种油剂有限公司 适用于铝合金抛光铝粉和失效抛光砂分离的装置及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56152781A (en) * 1980-04-30 1981-11-26 Toyota Motor Corp Purifying and reproducing method for oil-containing waste fluid
US4538644A (en) * 1983-06-09 1985-09-03 Applied Power Inc. Pressure regulator
JPS601403U (ja) * 1983-06-16 1985-01-08 日東電工株式会社 膜分離装置
JPH0741535B2 (ja) * 1991-04-10 1995-05-10 中小企業事業団 ラップ加工装置の砥粒液再生・循環装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10120608B4 (de) * 2000-05-03 2007-10-04 Karl-Heinz Pfaff Verfahren zur Filtration einer Flüssigkeit und Filtereinrichtung dafür

Also Published As

Publication number Publication date
TW283667B (enExample) 1996-08-21
KR100229989B1 (ko) 1999-11-15
KR960703809A (ko) 1996-08-31
US5772900A (en) 1998-06-30
WO1995035261A1 (en) 1995-12-28

Similar Documents

Publication Publication Date Title
DE19580845T1 (de) Verfahren und Vorrichtung zum Regenerieren von gebrauchtem Arbeitsfluid
DE69522617D1 (de) Verfahren und Vorrichtung zum Reinigen von Werkstücken
DE59505668D1 (de) Verfahren und vorrichtung zum feinstreinigen von oberflächen
DE69516592D1 (de) Verfahren und vorrichtung zum bewegen von behinderten
DE69528807D1 (de) Verfahren und Vorrichtung zum Entdecken von Antwortgeräten
DE59205497D1 (de) Verfahren und Vorrichtung zum Hochdruckflüssigkeitsschneiden
DE69519604D1 (de) Verfahren und Vorrichtung zum Herstellen von Tabletten
DE69724871D1 (de) Verfahren und Vorrichtung zum Ausstossen von Flüssigkeit
DE69534695D1 (de) Verfahren und Vorrichtung zum Erzeugen von Mustern
DE19882120T1 (de) Vorrichtung und Verfahren zum Überwachen von Händewaschen
DE69527585D1 (de) Verfahren und Vorrichtung zum Verpacken von Chips
DE69511855D1 (de) Verfahren und vorrichtung zum behandeln von abwässerströmen
DE69634827D1 (de) Einrichtung und verfahren zum bohren und komplettieren von mehrfach-bohrungen
DE69532328D1 (de) Verfahren und vorrichtung zum verbinden von metallischen werkstuecken
DE69526487D1 (de) Verfahren und vorrichtung zum abteilen von würsten
DE69507544D1 (de) System und Verfahren zum Sammeln von flüssigem Schneidefluidum und Spänen
DE69512535D1 (de) Verfahren und vorrichtung zum polieren von edelsteinen
DE69733980D1 (de) Verfahren und Vorrichtung zum Ausstossen von Flüssigkeit
ATE248935T1 (de) Verfahren und vorrichtung zum regenerieren von verzinnungslösungen
DE69515381D1 (de) Verfahren und Vorrichtung zum Herstellen von Tabletten
DE69524045D1 (de) Verfahren und vorrichtung zum reinigen von stahlblech
DE69620333D1 (de) Verfahren und Vorrichtung zum Polieren von Werkstücken
DE69728291D1 (de) Verfahren und vorrichtung zum reinigen von filteroberflächen
DE59506572D1 (de) Vorrichtung und Verfahren zum Herstellen von Rohren
DE69424315D1 (de) Vorrichtung und verfahren zum abbilden von bits

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8131 Rejection