DE1907076A1 - Graphitheiz- und/oder -traegerelement - Google Patents

Graphitheiz- und/oder -traegerelement

Info

Publication number
DE1907076A1
DE1907076A1 DE19691907076 DE1907076A DE1907076A1 DE 1907076 A1 DE1907076 A1 DE 1907076A1 DE 19691907076 DE19691907076 DE 19691907076 DE 1907076 A DE1907076 A DE 1907076A DE 1907076 A1 DE1907076 A1 DE 1907076A1
Authority
DE
Germany
Prior art keywords
heating
carbon layer
graphite
layer
carrier element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19691907076
Other languages
German (de)
English (en)
Inventor
Hinrichs Dr Rer Nat Gerd
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schunk and Ebe GmbH
Original Assignee
Schunk and Ebe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schunk and Ebe GmbH filed Critical Schunk and Ebe GmbH
Priority to DE19691907076 priority Critical patent/DE1907076A1/de
Priority to FR7003255A priority patent/FR2031266A5/fr
Priority to GB712870A priority patent/GB1305454A/en
Priority to NL7002110A priority patent/NL7002110A/xx
Publication of DE1907076A1 publication Critical patent/DE1907076A1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Resistance Heating (AREA)
  • Carbon And Carbon Compounds (AREA)
DE19691907076 1969-02-13 1969-02-13 Graphitheiz- und/oder -traegerelement Pending DE1907076A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19691907076 DE1907076A1 (de) 1969-02-13 1969-02-13 Graphitheiz- und/oder -traegerelement
FR7003255A FR2031266A5 (enrdf_load_stackoverflow) 1969-02-13 1970-01-30
GB712870A GB1305454A (enrdf_load_stackoverflow) 1969-02-13 1970-02-13
NL7002110A NL7002110A (enrdf_load_stackoverflow) 1969-02-13 1970-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691907076 DE1907076A1 (de) 1969-02-13 1969-02-13 Graphitheiz- und/oder -traegerelement

Publications (1)

Publication Number Publication Date
DE1907076A1 true DE1907076A1 (de) 1970-09-03

Family

ID=5725061

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19691907076 Pending DE1907076A1 (de) 1969-02-13 1969-02-13 Graphitheiz- und/oder -traegerelement

Country Status (4)

Country Link
DE (1) DE1907076A1 (enrdf_load_stackoverflow)
FR (1) FR2031266A5 (enrdf_load_stackoverflow)
GB (1) GB1305454A (enrdf_load_stackoverflow)
NL (1) NL7002110A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2825013A1 (de) * 1978-06-07 1979-12-13 Concordia Sprecher Schalt Lasttrennschalter in einschub-bauweise
DE3505795A1 (de) * 1985-02-20 1986-08-21 BBC Aktiengesellschaft Brown, Boveri & Cie., Baden, Aargau Verfahren zur kontrollierten aenderung eines temperaturgradienten in einem substrat unter konstanthaltung einer vorgebbaren mittleren temperatur

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4582561A (en) * 1979-01-25 1986-04-15 Sharp Kabushiki Kaisha Method for making a silicon carbide substrate
JPS5610921A (en) * 1979-07-09 1981-02-03 Toshiba Ceramics Co Ltd Material for equipment for manufacturing semiconductor and its treating furnace
JPH07176482A (ja) * 1991-05-31 1995-07-14 At & T Corp エピタキシャル成長方法および装置
US20030062596A1 (en) * 2001-10-02 2003-04-03 Actel Corporation Metal-to-metal antifuse employing carbon-containing antifuse material
US7459763B1 (en) 2001-10-02 2008-12-02 Actel Corporation Reprogrammable metal-to-metal antifuse employing carbon-containing antifuse material
US6965156B1 (en) 2002-12-27 2005-11-15 Actel Corporation Amorphous carbon metal-to-metal antifuse with adhesion promoting layers
US7390726B1 (en) 2001-10-02 2008-06-24 Actel Corporation Switching ratio and on-state resistance of an antifuse programmed below 5 mA and having a Ta or TaN barrier metal layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2825013A1 (de) * 1978-06-07 1979-12-13 Concordia Sprecher Schalt Lasttrennschalter in einschub-bauweise
DE3505795A1 (de) * 1985-02-20 1986-08-21 BBC Aktiengesellschaft Brown, Boveri & Cie., Baden, Aargau Verfahren zur kontrollierten aenderung eines temperaturgradienten in einem substrat unter konstanthaltung einer vorgebbaren mittleren temperatur

Also Published As

Publication number Publication date
NL7002110A (enrdf_load_stackoverflow) 1970-08-17
GB1305454A (enrdf_load_stackoverflow) 1973-01-31
FR2031266A5 (enrdf_load_stackoverflow) 1970-11-13

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