GB1305454A - - Google Patents

Info

Publication number
GB1305454A
GB1305454A GB712870A GB712870A GB1305454A GB 1305454 A GB1305454 A GB 1305454A GB 712870 A GB712870 A GB 712870A GB 712870 A GB712870 A GB 712870A GB 1305454 A GB1305454 A GB 1305454A
Authority
GB
United Kingdom
Prior art keywords
coating
silicon
carbon
feb
pyrographite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB712870A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1305454A publication Critical patent/GB1305454A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

1305454 Silicon SCHUNK & EBE GmbH 13 Feb 1970 [13 Feb 1969] 7128/70 Heading C1A In a process for the epitaxy of silicon, a heating and/or support element is used which element comprises a graphite substrate provided with a dense pyrolytically deposited carbon coating. The coating may be hard carbon or pyrographite and may be 5 to 50 Ám. thick. If desired, a silicon carbide coating may be applied to the coating of carbon.
GB712870A 1969-02-13 1970-02-13 Expired GB1305454A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691907076 DE1907076A1 (en) 1969-02-13 1969-02-13 Graphite heating and / or support element

Publications (1)

Publication Number Publication Date
GB1305454A true GB1305454A (en) 1973-01-31

Family

ID=5725061

Family Applications (1)

Application Number Title Priority Date Filing Date
GB712870A Expired GB1305454A (en) 1969-02-13 1970-02-13

Country Status (4)

Country Link
DE (1) DE1907076A1 (en)
FR (1) FR2031266A5 (en)
GB (1) GB1305454A (en)
NL (1) NL7002110A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0519608A1 (en) * 1991-05-31 1992-12-23 AT&T Corp. Substrate holder of thermally anisotropic material used for enhancing uniformity of grown epitaxial layers
EP1461824A4 (en) * 2001-10-02 2007-01-03 Actel Corp Metal-to-metal antifuse employing carbon-containing antifuse material
US7358589B1 (en) 2002-12-27 2008-04-15 Actel Corporation Amorphous carbon metal-to-metal antifuse with adhesion promoting layers
US7390726B1 (en) 2001-10-02 2008-06-24 Actel Corporation Switching ratio and on-state resistance of an antifuse programmed below 5 mA and having a Ta or TaN barrier metal layer
US7393722B1 (en) 2001-10-02 2008-07-01 Actel Corporation Reprogrammable metal-to-metal antifuse employing carbon-containing antifuse material

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2825013C2 (en) * 1978-06-07 1987-02-05 Concordia Sprecher-Schaltgeräte GmbH, 7024 Filderstadt Load-break switch in withdrawable design
US4582561A (en) * 1979-01-25 1986-04-15 Sharp Kabushiki Kaisha Method for making a silicon carbide substrate
JPS5610921A (en) 1979-07-09 1981-02-03 Toshiba Ceramics Co Ltd Material for equipment for manufacturing semiconductor and its treating furnace
DE3505795A1 (en) * 1985-02-20 1986-08-21 BBC Aktiengesellschaft Brown, Boveri & Cie., Baden, Aargau Method for the controlled variation of a temperature gradient in a substrate while holding constant a prescribable mean temperature

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0519608A1 (en) * 1991-05-31 1992-12-23 AT&T Corp. Substrate holder of thermally anisotropic material used for enhancing uniformity of grown epitaxial layers
EP1461824A4 (en) * 2001-10-02 2007-01-03 Actel Corp Metal-to-metal antifuse employing carbon-containing antifuse material
US7390726B1 (en) 2001-10-02 2008-06-24 Actel Corporation Switching ratio and on-state resistance of an antifuse programmed below 5 mA and having a Ta or TaN barrier metal layer
US7393722B1 (en) 2001-10-02 2008-07-01 Actel Corporation Reprogrammable metal-to-metal antifuse employing carbon-containing antifuse material
US7459763B1 (en) 2001-10-02 2008-12-02 Actel Corporation Reprogrammable metal-to-metal antifuse employing carbon-containing antifuse material
US7358589B1 (en) 2002-12-27 2008-04-15 Actel Corporation Amorphous carbon metal-to-metal antifuse with adhesion promoting layers

Also Published As

Publication number Publication date
DE1907076A1 (en) 1970-09-03
NL7002110A (en) 1970-08-17
FR2031266A5 (en) 1970-11-13

Similar Documents

Publication Publication Date Title
CA1002575A (en) Graphite electrode with metal carbide coating
CA1033507A (en) Diamond-nondiamond carbon polycrystalline composites
CA966859A (en) Reinforced carbon and graphite articles
CA932626A (en) Composite method for growth of iib-via compounds on substrates, and process for making composition for the compounds
GB1136501A (en) Articles having glass-ceramic coatings
GB1305454A (en)
CA1013114A (en) Glass reinforced composites with improved surface and process
GB962749A (en) A method for producing moulded bodies
CA1027512A (en) Chemical modification of the surface of pyrolytic graphite
GB1518564A (en) Method for the low pressure pyrolytic deposition of silicon nitride
ES327660A1 (en) A method of treating graphite articles and products obtained thereby
CA949960A (en) Diametrically-troughed porous grated, differentially fed pulverulents aerator with unitized, subdivided, pressure equalized, gas-feed-chambers
GB1253949A (en) Process of producing coatings of titanium carbide
GB1306078A (en)
JPS51119686A (en) A method for forming a film on the metal surface
GB1408572A (en) Method of producing a boron nitride coating on an article
CA827612A (en) Composite article of carbide and graphite, coating and method of forming
FR2236962A1 (en) Silicon carbide coating prodn. on graphite - by heating in an atmosphere of silicon vapour
CA784665A (en) Graphite article having coating of silicon and silicon carbide
CA857831A (en) Articles and process for coating with pyrolitic graphite
GB1243890A (en) Improvements in or relating to the epitaxial deposition of inorganic material on a surface of a silicon crystal
CA956190A (en) Process for sizing graphite or carbon fiber with polyimides
CA802807A (en) Pyrolytic graphite whiskers and process for producing the same
GB1305910A (en)
CA860851A (en) Pyrolytic graphite coating and structures

Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees