DE1845497U - Kaltkathoden-entladungs-ionenpumpe. - Google Patents
Kaltkathoden-entladungs-ionenpumpe.Info
- Publication number
- DE1845497U DE1845497U DEC7199U DEC0007199U DE1845497U DE 1845497 U DE1845497 U DE 1845497U DE C7199 U DEC7199 U DE C7199U DE C0007199 U DEC0007199 U DE C0007199U DE 1845497 U DE1845497 U DE 1845497U
- Authority
- DE
- Germany
- Prior art keywords
- cathode
- ions
- ion pump
- cold cathode
- cathode discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 description 21
- 239000000463 material Substances 0.000 description 8
- 238000005086 pumping Methods 0.000 description 6
- 108010083687 Ion Pumps Proteins 0.000 description 4
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 241001530250 Jeana Species 0.000 description 1
- 235000013405 beer Nutrition 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 206010022000 influenza Diseases 0.000 description 1
- 230000037427 ion transport Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
- Electron Tubes For Measurement (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US815351A US3107044A (en) | 1959-05-25 | 1959-05-25 | Cold-cathode discharge ion pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1845497U true DE1845497U (de) | 1962-01-25 |
Family
ID=25217539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEC7199U Expired DE1845497U (de) | 1959-05-25 | 1960-05-06 | Kaltkathoden-entladungs-ionenpumpe. |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3107044A (enrdf_load_stackoverflow) |
| DE (1) | DE1845497U (enrdf_load_stackoverflow) |
| GB (1) | GB897599A (enrdf_load_stackoverflow) |
| NL (1) | NL251846A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3391303A (en) * | 1965-01-25 | 1968-07-02 | Lewis D. Hall | Electronic vacuum pump including a sputter electrode |
| US3443742A (en) * | 1967-06-09 | 1969-05-13 | Itt | Pumping device |
| US5240381A (en) * | 1990-08-03 | 1993-08-31 | Ebara Corporation | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
| US20070286738A1 (en) * | 2006-06-12 | 2007-12-13 | Varian, Inc. | Vacuum ion-getter pump with cryogenically cooled cathode |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1046249B (de) * | 1956-04-05 | 1958-12-11 | Dr Gerhard Fricke | Verfahren und Vorrichtung zur Erzeugung eines hohen Vakuums |
-
0
- NL NL251846D patent/NL251846A/xx unknown
-
1959
- 1959-05-25 US US815351A patent/US3107044A/en not_active Expired - Lifetime
-
1960
- 1960-05-06 DE DEC7199U patent/DE1845497U/de not_active Expired
- 1960-05-25 GB GB18431/60A patent/GB897599A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL251846A (enrdf_load_stackoverflow) | |
| US3107044A (en) | 1963-10-15 |
| GB897599A (en) | 1962-05-30 |
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