DE1596906B2 - Aufdampfverfahren zum Bedecken gekrümmter Flächen mit mehreren dünnen, optisch wirksamen Schichten, die auf der ganzen Fläche eine gleichmäßige Dicke oder einen geregelten Verlauf der Dicke aufweisen - Google Patents
Aufdampfverfahren zum Bedecken gekrümmter Flächen mit mehreren dünnen, optisch wirksamen Schichten, die auf der ganzen Fläche eine gleichmäßige Dicke oder einen geregelten Verlauf der Dicke aufweisenInfo
- Publication number
- DE1596906B2 DE1596906B2 DE19661596906 DE1596906A DE1596906B2 DE 1596906 B2 DE1596906 B2 DE 1596906B2 DE 19661596906 DE19661596906 DE 19661596906 DE 1596906 A DE1596906 A DE 1596906A DE 1596906 B2 DE1596906 B2 DE 1596906B2
- Authority
- DE
- Germany
- Prior art keywords
- layers
- thickness
- vapor deposition
- steam
- curved surfaces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005019 vapor deposition process Methods 0.000 title claims description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 13
- 238000007740 vapor deposition Methods 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 9
- 229910052786 argon Inorganic materials 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 229910052756 noble gas Inorganic materials 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 230000033001 locomotion Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 229910052743 krypton Inorganic materials 0.000 claims 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052724 xenon Inorganic materials 0.000 claims 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000003247 decreasing effect Effects 0.000 claims 1
- KEUKAQNPUBYCIC-UHFFFAOYSA-N ethaneperoxoic acid;hydrogen peroxide Chemical class OO.CC(=O)OO KEUKAQNPUBYCIC-UHFFFAOYSA-N 0.000 claims 1
- 239000004744 fabric Substances 0.000 claims 1
- 150000002835 noble gases Chemical class 0.000 claims 1
- 230000000284 resting effect Effects 0.000 claims 1
- 238000009834 vaporization Methods 0.000 claims 1
- 230000008016 vaporization Effects 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 229910052984 zinc sulfide Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000005083 Zinc sulfide Substances 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910001610 cryolite Inorganic materials 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/28—Other inorganic materials
- C03C2217/281—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/151—Deposition methods from the vapour phase by vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Optical Elements Other Than Lenses (AREA)
- Physical Vapour Deposition (AREA)
- Optical Filters (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6504352A NL145207B (nl) | 1965-04-06 | 1965-04-06 | Werkwijze voor de vervaardiging van een interferentiefilter met een gebogen oppervlak en aldus verkregen interferentiefilter. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE1596906A1 DE1596906A1 (de) | 1969-10-30 |
| DE1596906B2 true DE1596906B2 (de) | 1974-08-22 |
Family
ID=19792856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19661596906 Pending DE1596906B2 (de) | 1965-04-06 | 1966-04-04 | Aufdampfverfahren zum Bedecken gekrümmter Flächen mit mehreren dünnen, optisch wirksamen Schichten, die auf der ganzen Fläche eine gleichmäßige Dicke oder einen geregelten Verlauf der Dicke aufweisen |
Country Status (7)
| Country | Link |
|---|---|
| AT (1) | AT264954B (enrdf_load_stackoverflow) |
| BE (1) | BE679166A (enrdf_load_stackoverflow) |
| CH (1) | CH484286A (enrdf_load_stackoverflow) |
| DE (1) | DE1596906B2 (enrdf_load_stackoverflow) |
| GB (1) | GB1088629A (enrdf_load_stackoverflow) |
| NL (1) | NL145207B (enrdf_load_stackoverflow) |
| SE (1) | SE330640B (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE792316A (fr) * | 1971-12-07 | 1973-06-05 | Philips Nv | Procede permettant de realiser des miroirs pour lumiere froide |
| US4009300A (en) | 1974-10-16 | 1977-02-22 | Honeywell Inc. | Preparation of graded composition protective coatings |
| USRE34131E (en) * | 1986-12-10 | 1992-11-24 | U.S. Philips Corporation | Display tube having improved brightness distribution |
| GB8629552D0 (en) * | 1986-12-10 | 1987-01-21 | Philips Nv | Television system & display tubes |
| HU198254B (en) * | 1987-03-11 | 1989-08-28 | Tungsram Reszvenytarsasag | Projector lamp |
-
1965
- 1965-04-06 NL NL6504352A patent/NL145207B/xx unknown
-
1966
- 1966-04-01 GB GB1457066A patent/GB1088629A/en not_active Expired
- 1966-04-04 CH CH487366A patent/CH484286A/de not_active IP Right Cessation
- 1966-04-04 SE SE451866A patent/SE330640B/xx unknown
- 1966-04-04 DE DE19661596906 patent/DE1596906B2/de active Pending
- 1966-04-04 AT AT317566A patent/AT264954B/de active
- 1966-04-06 BE BE679166A patent/BE679166A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| NL6504352A (enrdf_load_stackoverflow) | 1966-10-07 |
| NL145207B (nl) | 1975-03-17 |
| CH484286A (de) | 1970-01-15 |
| AT264954B (de) | 1968-09-25 |
| BE679166A (enrdf_load_stackoverflow) | 1966-10-06 |
| SE330640B (enrdf_load_stackoverflow) | 1970-11-23 |
| GB1088629A (en) | 1967-10-25 |
| DE1596906A1 (de) | 1969-10-30 |
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