DE1564109A1 - Verfahren zum Herstellen einer Halbleiteranordnung - Google Patents
Verfahren zum Herstellen einer HalbleiteranordnungInfo
- Publication number
- DE1564109A1 DE1564109A1 DE19661564109 DE1564109A DE1564109A1 DE 1564109 A1 DE1564109 A1 DE 1564109A1 DE 19661564109 DE19661564109 DE 19661564109 DE 1564109 A DE1564109 A DE 1564109A DE 1564109 A1 DE1564109 A1 DE 1564109A1
- Authority
- DE
- Germany
- Prior art keywords
- surface layer
- semiconductor
- zone
- layer
- conductivity type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 39
- 238000000034 method Methods 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000002344 surface layer Substances 0.000 claims description 37
- 239000010410 layer Substances 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 claims description 8
- 239000012535 impurity Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 7
- 239000013078 crystal Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/761—PN junctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
- Thyristors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB428965A GB1028956A (en) | 1965-02-01 | 1965-02-01 | Semiconductor devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1564109A1 true DE1564109A1 (de) | 1969-12-18 |
Family
ID=9774342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19661564109 Pending DE1564109A1 (de) | 1965-02-01 | 1966-01-21 | Verfahren zum Herstellen einer Halbleiteranordnung |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE675855A (es) |
| CH (1) | CH490735A (es) |
| DE (1) | DE1564109A1 (es) |
| GB (1) | GB1028956A (es) |
| NL (1) | NL6601230A (es) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114914325B (zh) * | 2022-07-18 | 2022-11-11 | 西安电子科技大学 | 一种多结的近红外单光子雪崩二极管及制备方法 |
-
1965
- 1965-02-01 GB GB428965A patent/GB1028956A/en not_active Expired
-
1966
- 1966-01-21 DE DE19661564109 patent/DE1564109A1/de active Pending
- 1966-01-28 CH CH121866A patent/CH490735A/de not_active IP Right Cessation
- 1966-01-31 NL NL6601230A patent/NL6601230A/xx unknown
- 1966-02-01 BE BE675855D patent/BE675855A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB1028956A (en) | 1966-05-11 |
| BE675855A (es) | 1966-08-01 |
| NL6601230A (es) | 1966-08-02 |
| CH490735A (de) | 1970-05-15 |
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