DE1547403A1 - Auswerteverfahren fuer Interferometer - Google Patents
Auswerteverfahren fuer InterferometerInfo
- Publication number
- DE1547403A1 DE1547403A1 DE19671547403 DE1547403A DE1547403A1 DE 1547403 A1 DE1547403 A1 DE 1547403A1 DE 19671547403 DE19671547403 DE 19671547403 DE 1547403 A DE1547403 A DE 1547403A DE 1547403 A1 DE1547403 A1 DE 1547403A1
- Authority
- DE
- Germany
- Prior art keywords
- arrangement
- partial
- beams
- interferometer
- directions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011156 evaluation Methods 0.000 title claims description 3
- 238000000034 method Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000010355 oscillation Effects 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 4
- 238000005286 illumination Methods 0.000 claims description 3
- 230000001427 coherent effect Effects 0.000 claims description 2
- 206010011878 Deafness Diseases 0.000 claims 1
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims 1
- 108010076504 Protein Sorting Signals Proteins 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEL0055585 | 1967-01-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1547403A1 true DE1547403A1 (de) | 1969-12-18 |
Family
ID=7277079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19671547403 Pending DE1547403A1 (de) | 1967-01-25 | 1967-01-25 | Auswerteverfahren fuer Interferometer |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3529894A (OSRAM) |
| JP (1) | JPS4816377B1 (OSRAM) |
| CH (1) | CH492195A (OSRAM) |
| DE (1) | DE1547403A1 (OSRAM) |
| FR (1) | FR1565437A (OSRAM) |
| GB (1) | GB1185953A (OSRAM) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3881823A (en) * | 1967-06-02 | 1975-05-06 | Philips Corp | Apparatus for measuring the variation of an optical path length with the aid of an interferometer |
| DE2127483A1 (de) * | 1971-06-03 | 1972-12-14 | Leitz Ernst Gmbh | Verfahren zur interferentiellen Messung von Langen, Winkeln, Gangunter schieden oder Geschwindigkeiten |
| US3976379A (en) * | 1972-12-28 | 1976-08-24 | Olympus Optical Co., Ltd. | Interferometers |
| US3937578A (en) * | 1974-02-11 | 1976-02-10 | Raytheon Company | Laser gyroscope |
| GB1510788A (en) * | 1974-09-03 | 1978-05-17 | Decca Ltd | Optical pathlength modulators |
| JPS6024404B2 (ja) * | 1978-01-13 | 1985-06-12 | ナシヨナル・リサ−チ・デイベロツプメント・コ−ポレイシヨン | 干渉計システム |
| DD234070A1 (de) * | 1985-01-18 | 1986-03-19 | Ilmenau Tech Hochschule | Interferometrische mehrkoordinatenmesseinrichtung |
| US4702603A (en) * | 1985-07-23 | 1987-10-27 | Cmx Systems, Inc. | Optical phase decoder for interferometers |
| DE3623244A1 (de) * | 1985-12-23 | 1987-06-25 | Suhl Feinmesszeugfab Veb | Beruehrungsloser interferometrischer sensor zur inkrementalen abtastung veraenderlicher interferenzstrukturen |
| JP2718705B2 (ja) * | 1988-07-27 | 1998-02-25 | 株式会社日立製作所 | 光音響信号検出方法及びその装置 |
| DE4233336C2 (de) * | 1992-10-05 | 2001-08-23 | Zeiss Carl | Verfahren und Vorrichtung zur Detektion von Fokusablagen |
| CN102288104B (zh) | 2011-07-22 | 2014-02-12 | 中国科学院上海光学精密机械研究所 | 六轴4细分干涉仪 |
| CN102353325B (zh) | 2011-07-22 | 2013-08-14 | 中国科学院上海光学精密机械研究所 | 四轴4细分干涉仪 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3182292A (en) * | 1961-06-29 | 1965-05-04 | Link Division Of General Prec | Noise-rejecting counter circuit |
| US3225644A (en) * | 1961-10-16 | 1965-12-28 | Zeiss Jena Veb Carl | Apparatus producing interferential test data for measuring and control instruments |
| US3409375A (en) * | 1964-10-21 | 1968-11-05 | Cutler Hammer Inc | Gauging interferometer systems |
| US3434787A (en) * | 1965-11-15 | 1969-03-25 | Optomechanisms Inc | Double axes interferometer |
-
1967
- 1967-01-25 DE DE19671547403 patent/DE1547403A1/de active Pending
-
1968
- 1968-01-04 CH CH6468A patent/CH492195A/de not_active IP Right Cessation
- 1968-01-16 JP JP43002001A patent/JPS4816377B1/ja active Pending
- 1968-01-16 FR FR1565437D patent/FR1565437A/fr not_active Expired
- 1968-01-18 GB GB2823/68A patent/GB1185953A/en not_active Expired
- 1968-01-22 US US699650A patent/US3529894A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CH492195A (de) | 1970-06-15 |
| GB1185953A (en) | 1970-04-02 |
| JPS4816377B1 (OSRAM) | 1973-05-22 |
| FR1565437A (OSRAM) | 1969-05-02 |
| US3529894A (en) | 1970-09-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| SH | Request for examination between 03.10.1968 and 22.04.1971 |