JPS4816377B1 - - Google Patents

Info

Publication number
JPS4816377B1
JPS4816377B1 JP43002001A JP200168A JPS4816377B1 JP S4816377 B1 JPS4816377 B1 JP S4816377B1 JP 43002001 A JP43002001 A JP 43002001A JP 200168 A JP200168 A JP 200168A JP S4816377 B1 JPS4816377 B1 JP S4816377B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP43002001A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4816377B1 publication Critical patent/JPS4816377B1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
JP43002001A 1967-01-25 1968-01-16 Pending JPS4816377B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEL0055585 1967-01-25

Publications (1)

Publication Number Publication Date
JPS4816377B1 true JPS4816377B1 (ja) 1973-05-22

Family

ID=7277079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP43002001A Pending JPS4816377B1 (ja) 1967-01-25 1968-01-16

Country Status (6)

Country Link
US (1) US3529894A (ja)
JP (1) JPS4816377B1 (ja)
CH (1) CH492195A (ja)
DE (1) DE1547403A1 (ja)
FR (1) FR1565437A (ja)
GB (1) GB1185953A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06194125A (ja) * 1992-10-05 1994-07-15 Carl Zeiss:Fa 対物レンズの焦点から物体のずれ又は位置変化を検出する方法及び装置

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3881823A (en) * 1967-06-02 1975-05-06 Philips Corp Apparatus for measuring the variation of an optical path length with the aid of an interferometer
DE2127483A1 (de) * 1971-06-03 1972-12-14 Leitz Ernst Gmbh Verfahren zur interferentiellen Messung von Langen, Winkeln, Gangunter schieden oder Geschwindigkeiten
US3976379A (en) * 1972-12-28 1976-08-24 Olympus Optical Co., Ltd. Interferometers
US3937578A (en) * 1974-02-11 1976-02-10 Raytheon Company Laser gyroscope
GB1510788A (en) * 1974-09-03 1978-05-17 Decca Ltd Optical pathlength modulators
WO1979000506A1 (en) * 1978-01-13 1979-08-09 Nat Res Dev Interferometer systems
DD234070A1 (de) * 1985-01-18 1986-03-19 Ilmenau Tech Hochschule Interferometrische mehrkoordinatenmesseinrichtung
US4702603A (en) * 1985-07-23 1987-10-27 Cmx Systems, Inc. Optical phase decoder for interferometers
DE3623244A1 (de) * 1985-12-23 1987-06-25 Suhl Feinmesszeugfab Veb Beruehrungsloser interferometrischer sensor zur inkrementalen abtastung veraenderlicher interferenzstrukturen
JP2718705B2 (ja) * 1988-07-27 1998-02-25 株式会社日立製作所 光音響信号検出方法及びその装置
CN102288104B (zh) * 2011-07-22 2014-02-12 中国科学院上海光学精密机械研究所 六轴4细分干涉仪
CN102353325B (zh) 2011-07-22 2013-08-14 中国科学院上海光学精密机械研究所 四轴4细分干涉仪

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3182292A (en) * 1961-06-29 1965-05-04 Link Division Of General Prec Noise-rejecting counter circuit
US3225644A (en) * 1961-10-16 1965-12-28 Zeiss Jena Veb Carl Apparatus producing interferential test data for measuring and control instruments
US3409375A (en) * 1964-10-21 1968-11-05 Cutler Hammer Inc Gauging interferometer systems
US3434787A (en) * 1965-11-15 1969-03-25 Optomechanisms Inc Double axes interferometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06194125A (ja) * 1992-10-05 1994-07-15 Carl Zeiss:Fa 対物レンズの焦点から物体のずれ又は位置変化を検出する方法及び装置

Also Published As

Publication number Publication date
US3529894A (en) 1970-09-22
GB1185953A (en) 1970-04-02
FR1565437A (ja) 1969-05-02
DE1547403A1 (de) 1969-12-18
CH492195A (de) 1970-06-15

Similar Documents

Publication Publication Date Title
AU425114B2 (ja)
AT298283B (ja)
FR1565437A (ja)
AU416737B2 (ja)
AU342066A (ja)
AU2277767A (ja)
AU3189468A (ja)
AU610966A (ja)
BE692552A (ja)
BE692374A (ja)
BE710301A (ja)
BE710254A (ja)
BE709930A (ja)
BE709505A (ja)
BE709168A (ja)
BE706372A (ja)
BE694661A (ja)
BE692779A (ja)
BE692778A (ja)
BE692654A (ja)
BE692577A (ja)
BE692553A (ja)
BE710383A (ja)
BE692493A (ja)
BE692492A (ja)