FR1565437A - - Google Patents

Info

Publication number
FR1565437A
FR1565437A FR1565437DA FR1565437A FR 1565437 A FR1565437 A FR 1565437A FR 1565437D A FR1565437D A FR 1565437DA FR 1565437 A FR1565437 A FR 1565437A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1565437A publication Critical patent/FR1565437A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
FR1565437D 1967-01-25 1968-01-16 Expired FR1565437A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEL0055585 1967-01-25

Publications (1)

Publication Number Publication Date
FR1565437A true FR1565437A (fr) 1969-05-02

Family

ID=7277079

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1565437D Expired FR1565437A (fr) 1967-01-25 1968-01-16

Country Status (6)

Country Link
US (1) US3529894A (fr)
JP (1) JPS4816377B1 (fr)
CH (1) CH492195A (fr)
DE (1) DE1547403A1 (fr)
FR (1) FR1565437A (fr)
GB (1) GB1185953A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2576407A1 (fr) * 1985-01-18 1986-07-25 Suhl Feinmesszeugfab Veb Dispositif de mesure a plusieurs coordonnees pour interferometrie
FR2592152A1 (fr) * 1985-12-23 1987-06-26 Suhl Feinmesszeugfab Veb Element sensible d'interferometrie sans contact pour l'exploration incrementielle de structures d'interference variables.

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3881823A (en) * 1967-06-02 1975-05-06 Philips Corp Apparatus for measuring the variation of an optical path length with the aid of an interferometer
DE2127483A1 (de) * 1971-06-03 1972-12-14 Leitz Ernst Gmbh Verfahren zur interferentiellen Messung von Langen, Winkeln, Gangunter schieden oder Geschwindigkeiten
US3976379A (en) * 1972-12-28 1976-08-24 Olympus Optical Co., Ltd. Interferometers
US3937578A (en) * 1974-02-11 1976-02-10 Raytheon Company Laser gyroscope
GB1510788A (en) * 1974-09-03 1978-05-17 Decca Ltd Optical pathlength modulators
DE2963043D1 (en) * 1978-01-13 1982-07-29 Nat Res Dev Interferometer systems
US4702603A (en) * 1985-07-23 1987-10-27 Cmx Systems, Inc. Optical phase decoder for interferometers
JP2718705B2 (ja) * 1988-07-27 1998-02-25 株式会社日立製作所 光音響信号検出方法及びその装置
DE4233336C2 (de) * 1992-10-05 2001-08-23 Zeiss Carl Verfahren und Vorrichtung zur Detektion von Fokusablagen
CN102353325B (zh) 2011-07-22 2013-08-14 中国科学院上海光学精密机械研究所 四轴4细分干涉仪
CN102288104B (zh) * 2011-07-22 2014-02-12 中国科学院上海光学精密机械研究所 六轴4细分干涉仪

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3182292A (en) * 1961-06-29 1965-05-04 Link Division Of General Prec Noise-rejecting counter circuit
US3225644A (en) * 1961-10-16 1965-12-28 Zeiss Jena Veb Carl Apparatus producing interferential test data for measuring and control instruments
US3409375A (en) * 1964-10-21 1968-11-05 Cutler Hammer Inc Gauging interferometer systems
US3434787A (en) * 1965-11-15 1969-03-25 Optomechanisms Inc Double axes interferometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2576407A1 (fr) * 1985-01-18 1986-07-25 Suhl Feinmesszeugfab Veb Dispositif de mesure a plusieurs coordonnees pour interferometrie
FR2592152A1 (fr) * 1985-12-23 1987-06-26 Suhl Feinmesszeugfab Veb Element sensible d'interferometrie sans contact pour l'exploration incrementielle de structures d'interference variables.

Also Published As

Publication number Publication date
JPS4816377B1 (fr) 1973-05-22
GB1185953A (en) 1970-04-02
US3529894A (en) 1970-09-22
DE1547403A1 (de) 1969-12-18
CH492195A (de) 1970-06-15

Similar Documents

Publication Publication Date Title
AT298283B (fr)
FR1565437A (fr)
AU2277767A (fr)
AU1273466A (fr)
AU3151267A (fr)
AU2977667A (fr)
AU2528767A (fr)
AU2454867A (fr)
AU2116667A (fr)
AU2256867A (fr)
BE709660A (fr)
BE705030A (fr)
AU23366A (fr)
AU2406369A (fr)
BE711382A (fr)
BE711342A (fr)
AU1868267A (fr)
BE711273A (fr)
BE711251A (fr)
BE711238A (fr)
BE711077A (fr)
BE710955A (fr)
AU25066A (fr)
BE692375A (fr)
BE709468A (fr)

Legal Events

Date Code Title Description
ST Notification of lapse