FR2592152A1 - Element sensible d'interferometrie sans contact pour l'exploration incrementielle de structures d'interference variables. - Google Patents

Element sensible d'interferometrie sans contact pour l'exploration incrementielle de structures d'interference variables.

Info

Publication number
FR2592152A1
FR2592152A1 FR8616993A FR8616993A FR2592152A1 FR 2592152 A1 FR2592152 A1 FR 2592152A1 FR 8616993 A FR8616993 A FR 8616993A FR 8616993 A FR8616993 A FR 8616993A FR 2592152 A1 FR2592152 A1 FR 2592152A1
Authority
FR
France
Prior art keywords
exploration
interferometry
contact
sensitive element
incremential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8616993A
Other languages
English (en)
Other versions
FR2592152B1 (fr
Inventor
Gerd Jager
Hans-Joachim Buchner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUHL FEINMESSZEUGFAB VEB
Original Assignee
SUHL FEINMESSZEUGFAB VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUHL FEINMESSZEUGFAB VEB filed Critical SUHL FEINMESSZEUGFAB VEB
Publication of FR2592152A1 publication Critical patent/FR2592152A1/fr
Application granted granted Critical
Publication of FR2592152B1 publication Critical patent/FR2592152B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Abstract

Elément sensible d'interférométrie sans contact pour l'exploration de structures d'interférence variables, caractérisé en ce que le dispositif comporte, sur chacun des trajets de faisceaux 13, 14 du diviseur de rayons 2, un élément 15, 16 donnant des images optiques et, au niveau de chaque image 17, 18 du diaphragme 11, des éléments 19, 20 assurant l'exploration de la structure d'interférence. (CF DESSIN DANS BOPI)
FR868616993A 1985-12-23 1986-12-04 Element sensible d'interferometrie sans contact pour l'exploration incrementielle de structures d'interference variables. Expired - Fee Related FR2592152B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD28497685 1985-12-23

Publications (2)

Publication Number Publication Date
FR2592152A1 true FR2592152A1 (fr) 1987-06-26
FR2592152B1 FR2592152B1 (fr) 1991-03-22

Family

ID=5574830

Family Applications (1)

Application Number Title Priority Date Filing Date
FR868616993A Expired - Fee Related FR2592152B1 (fr) 1985-12-23 1986-12-04 Element sensible d'interferometrie sans contact pour l'exploration incrementielle de structures d'interference variables.

Country Status (3)

Country Link
DE (1) DE3623244A1 (fr)
FR (1) FR2592152B1 (fr)
GB (1) GB2184866B (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4427317C2 (de) * 1994-08-02 1999-04-01 Zeiss Carl Jena Gmbh Interferometer für die Prüfung optischer Elemente
GB2555646A (en) * 2016-11-03 2018-05-09 Mbda Uk Ltd Interferometric position sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1565437A (fr) * 1967-01-25 1969-05-02
US3549260A (en) * 1967-01-10 1970-12-22 Barringer Research Ltd Spatially dispersive correlation interferometer
FR2541447A1 (fr) * 1983-02-22 1984-08-24 Kulesh Vladimir Procede de mesure de chemin optique et interferometre laser pour sa realisation

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1460861A (en) * 1974-03-05 1977-01-06 Nat Res Dev Interferrometers
DD201191B1 (de) * 1981-09-24 1987-07-15 Ilmenau Tech Hochschule Kippinvariantes interferometer mit ebenen spiegeln
US4512661A (en) * 1982-09-02 1985-04-23 The United States Of America As Represented By The Aministration Of The National Aeronautics And Space Administration Dual differential interferometer
US4498773A (en) * 1983-05-04 1985-02-12 Rockwell International Corporation Pencil beam interferometer
DD229208B1 (de) * 1984-11-22 1988-02-10 Ilmenau Tech Hochschule Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen
DD234070A1 (de) * 1985-01-18 1986-03-19 Ilmenau Tech Hochschule Interferometrische mehrkoordinatenmesseinrichtung
DE3612157A1 (de) * 1985-04-26 1986-11-06 VEB Feinmeßzeugfabrik Suhl, DDR 6000 Suhl Interferometrisch-inkrementale vorrichtung zur ebenheitsmessung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3549260A (en) * 1967-01-10 1970-12-22 Barringer Research Ltd Spatially dispersive correlation interferometer
FR1565437A (fr) * 1967-01-25 1969-05-02
FR2541447A1 (fr) * 1983-02-22 1984-08-24 Kulesh Vladimir Procede de mesure de chemin optique et interferometre laser pour sa realisation

Also Published As

Publication number Publication date
DE3623244A1 (de) 1987-06-25
GB2184866A (en) 1987-07-01
FR2592152B1 (fr) 1991-03-22
GB2184866B (en) 1990-03-21
GB8630195D0 (en) 1987-01-28

Similar Documents

Publication Publication Date Title
IT8223155A0 (it) Ricevitore ottico di alta sensibilita' e ampio intervallo dinamico.
FR2658618B1 (fr) Reflecteur multicouche pour dispositif optique.
DE68914106T3 (de) Bildfixiergerät.
DE68916763T2 (de) Bildfixiergerät.
DE3483281D1 (de) Spaltabbildungssystem mit zwei konkaven spiegeln.
DE562488T1 (de) Optisches Abtastsystem mit Hyperauflösung.
FR2685965B1 (fr) Dispositif de division/combinaison optique.
DE69215902D1 (de) Bilderzeugungssystem mit flüssigem entwickler
DE69109237D1 (de) Polarisationsunabhängiges optisches Kohärenzbereichsreflektometer.
DE68917951D1 (de) Flüssigkristall-Bildprojektionssystem.
FR2709837B1 (fr) Appareil de mesure optique de distance, et lentille et élément photorécepteur pour sa mise en Óoeuvre.
DE69111996T2 (de) Verbindungseinrichtung mit Prüfstecker.
FR2669108B1 (fr) Dispositif optique de mesure de l'angle de roulis d'un projectile.
FR2634080B1 (fr) Dispositif de lecture par coherence de capteur optique
FR2436404A1 (fr) Element de derivation, notamment pour systemes de transmission optique d'informations
FR2503862B1 (fr) Dispositif optique interferometrique avec miroir(s) a conjugaison de phase, en particulier pour gyrometre laser
DE69017672T2 (de) Erdbebenmessgerät.
BR8805812A (pt) Aparelho de exploracao de imagem,sistema de lentes e aparelho de projecao
ES491346A0 (es) Perfeccionamientos en aparatos de elaboracion de la senal dedetalle vertical de imagenes de video.
FR2592152A1 (fr) Element sensible d'interferometrie sans contact pour l'exploration incrementielle de structures d'interference variables.
FR2689653B1 (fr) Dispositif optique du type deflectometre, notamment a detection de phase, a grand domaine de mesure.
FR2708351B1 (fr) Dispositif optique accordable.
DE68921556T2 (de) Bildfixiergerät.
FR2666159B1 (fr) Dispositif bistable sans frottement pour usage spatial, notamment pour l'obturation d'un orifice d'entree d'un instrument optique spatial.
FR2663482B1 (fr) Melangeur optique, recepteur heterodyne et procede de detection optique heterodyne.

Legal Events

Date Code Title Description
ST Notification of lapse