DE1519872B2 - - Google Patents
Info
- Publication number
- DE1519872B2 DE1519872B2 DE19651519872 DE1519872A DE1519872B2 DE 1519872 B2 DE1519872 B2 DE 1519872B2 DE 19651519872 DE19651519872 DE 19651519872 DE 1519872 A DE1519872 A DE 1519872A DE 1519872 B2 DE1519872 B2 DE 1519872B2
- Authority
- DE
- Germany
- Prior art keywords
- coupling
- rod
- melting
- coupling half
- drive shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000008878 coupling Effects 0.000 claims description 49
- 238000010168 coupling process Methods 0.000 claims description 49
- 238000005859 coupling reaction Methods 0.000 claims description 49
- 238000004857 zone melting Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000002844 melting Methods 0.000 description 28
- 230000008018 melting Effects 0.000 description 28
- 239000013078 crystal Substances 0.000 description 7
- 230000008646 thermal stress Effects 0.000 description 5
- 239000000155 melt Substances 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000002054 inoculum Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229960005486 vaccine Drugs 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 239000000289 melt material Substances 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/32—Mechanisms for moving either the charge or the heater
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/91—Downward pulling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Sampling And Sample Adjustment (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES0097473 | 1965-06-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE1519872A1 DE1519872A1 (de) | 1969-04-10 |
| DE1519872B2 true DE1519872B2 (enrdf_load_stackoverflow) | 1971-10-21 |
Family
ID=7520765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19651519872 Withdrawn DE1519872A1 (de) | 1965-06-04 | 1965-06-04 | Vorrichtung zum tiegelfreien Zonenschmelzen |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3454368A (enrdf_load_stackoverflow) |
| BE (1) | BE681815A (enrdf_load_stackoverflow) |
| CH (1) | CH432475A (enrdf_load_stackoverflow) |
| DE (1) | DE1519872A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1126104A (enrdf_load_stackoverflow) |
| NL (1) | NL6607745A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5217565A (en) * | 1991-11-13 | 1993-06-08 | Wisconsin Alumni Research Foundation | Contactless heater floating zone refining and crystal growth |
| CN107366017A (zh) * | 2017-09-04 | 2017-11-21 | 青海鑫诺光电科技有限公司 | 一种单晶硅收尾设备及其使用方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA629412A (en) * | 1961-10-17 | Union Carbide Corporation | Method of and apparatus for growing single crystal material | |
| US2743200A (en) * | 1954-05-27 | 1956-04-24 | Bell Telephone Labor Inc | Method of forming junctions in silicon |
| US2989378A (en) * | 1956-10-16 | 1961-06-20 | Int Standard Electric Corp | Producing silicon of high purity |
| US2870309A (en) * | 1957-06-11 | 1959-01-20 | Emil R Capita | Zone purification device |
| GB904100A (en) * | 1959-09-11 | 1962-08-22 | Siemens Ag | A process for zone-by-zone melting of a rod of semi-conductor material using an induction coil as the heating means and an automatic arrangement for controlling the current through the coil |
-
1965
- 1965-06-04 DE DE19651519872 patent/DE1519872A1/de not_active Withdrawn
-
1966
- 1966-05-17 CH CH718666A patent/CH432475A/de unknown
- 1966-05-31 BE BE681815D patent/BE681815A/xx unknown
- 1966-06-02 US US554805A patent/US3454368A/en not_active Expired - Lifetime
- 1966-06-03 NL NL6607745A patent/NL6607745A/xx unknown
- 1966-06-06 GB GB25186/66A patent/GB1126104A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL6607745A (enrdf_load_stackoverflow) | 1966-12-05 |
| BE681815A (enrdf_load_stackoverflow) | 1966-11-30 |
| GB1126104A (en) | 1968-09-05 |
| US3454368A (en) | 1969-07-08 |
| CH432475A (de) | 1967-03-31 |
| DE1519872A1 (de) | 1969-04-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| E771 | Valid patent as to the heymanns-index 1977, willingness to grant licences | ||
| EHJ | Ceased/non-payment of the annual fee |