DE1180069B - Vorrichtung zum Herstellen von Halbleiter-bauelementen, insbesondere Legierungs-vorrichtung - Google Patents
Vorrichtung zum Herstellen von Halbleiter-bauelementen, insbesondere Legierungs-vorrichtungInfo
- Publication number
- DE1180069B DE1180069B DES83275A DES0083275A DE1180069B DE 1180069 B DE1180069 B DE 1180069B DE S83275 A DES83275 A DE S83275A DE S0083275 A DES0083275 A DE S0083275A DE 1180069 B DE1180069 B DE 1180069B
- Authority
- DE
- Germany
- Prior art keywords
- container
- alloy
- sealing lips
- gas
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910045601 alloy Inorganic materials 0.000 title claims description 76
- 239000000956 alloy Substances 0.000 title claims description 76
- 239000004065 semiconductor Substances 0.000 title claims description 18
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000007789 sealing Methods 0.000 claims description 52
- 230000001681 protective effect Effects 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000013013 elastic material Substances 0.000 claims description 4
- 239000003779 heat-resistant material Substances 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 37
- 238000011010 flushing procedure Methods 0.000 description 16
- 239000000463 material Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000005275 alloying Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 229920001971 elastomer Polymers 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 244000059549 Borneo rubber Species 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 240000009029 Gluta renghas Species 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910002065 alloy metal Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/24—Alloying of impurity materials, e.g. doping materials, electrode materials, with a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Furnace Details (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL302915D NL302915A (enrdf_load_stackoverflow) | 1963-01-16 | ||
| DES83275A DE1180069B (de) | 1963-01-16 | 1963-01-16 | Vorrichtung zum Herstellen von Halbleiter-bauelementen, insbesondere Legierungs-vorrichtung |
| CH2864A CH420068A (de) | 1963-01-16 | 1964-01-06 | Vorrichtung zum Herstellen von Halbleiterbauelementen, insbesondere Legierungsvorrichtung |
| US336535A US3290738A (en) | 1963-01-16 | 1964-01-08 | Apparatus for producing semiconductor devices |
| GB1585/64A GB988921A (en) | 1963-01-16 | 1964-01-14 | Apparatus for the treatment of semiconductor assemblies |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES83275A DE1180069B (de) | 1963-01-16 | 1963-01-16 | Vorrichtung zum Herstellen von Halbleiter-bauelementen, insbesondere Legierungs-vorrichtung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1180069B true DE1180069B (de) | 1964-10-22 |
Family
ID=7510910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DES83275A Pending DE1180069B (de) | 1963-01-16 | 1963-01-16 | Vorrichtung zum Herstellen von Halbleiter-bauelementen, insbesondere Legierungs-vorrichtung |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3290738A (enrdf_load_stackoverflow) |
| CH (1) | CH420068A (enrdf_load_stackoverflow) |
| DE (1) | DE1180069B (enrdf_load_stackoverflow) |
| GB (1) | GB988921A (enrdf_load_stackoverflow) |
| NL (1) | NL302915A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3396955A (en) * | 1965-10-04 | 1968-08-13 | Basic Products Corp | Diffusion furnace with transport means |
| US3658310A (en) * | 1970-03-04 | 1972-04-25 | Atomic Energy Authority Uk | Furnaces |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1104073B (de) * | 1959-10-10 | 1961-04-06 | Siemens Ag | Vorrichtung zum Einlegieren von Flaechenelektroden an Halbleiterkoerpern |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2422439A (en) * | 1943-01-29 | 1947-06-17 | American Electro Metal Corp | Method of manufacturing composite structural materials |
| US2933787A (en) * | 1956-10-09 | 1960-04-26 | Motorola Inc | Alloying apparatus for transistors |
| BE567500A (enrdf_load_stackoverflow) * | 1957-05-20 | |||
| US2959829A (en) * | 1957-09-09 | 1960-11-15 | Joseph B Brennan | Casting method and apparatus |
-
0
- NL NL302915D patent/NL302915A/xx unknown
-
1963
- 1963-01-16 DE DES83275A patent/DE1180069B/de active Pending
-
1964
- 1964-01-06 CH CH2864A patent/CH420068A/de unknown
- 1964-01-08 US US336535A patent/US3290738A/en not_active Expired - Lifetime
- 1964-01-14 GB GB1585/64A patent/GB988921A/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1104073B (de) * | 1959-10-10 | 1961-04-06 | Siemens Ag | Vorrichtung zum Einlegieren von Flaechenelektroden an Halbleiterkoerpern |
Also Published As
| Publication number | Publication date |
|---|---|
| CH420068A (de) | 1966-09-15 |
| GB988921A (en) | 1965-04-14 |
| NL302915A (enrdf_load_stackoverflow) | |
| US3290738A (en) | 1966-12-13 |
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