DE112020007590T5 - Verfahren zur Leckprüfung - Google Patents
Verfahren zur Leckprüfung Download PDFInfo
- Publication number
- DE112020007590T5 DE112020007590T5 DE112020007590.7T DE112020007590T DE112020007590T5 DE 112020007590 T5 DE112020007590 T5 DE 112020007590T5 DE 112020007590 T DE112020007590 T DE 112020007590T DE 112020007590 T5 DE112020007590 T5 DE 112020007590T5
- Authority
- DE
- Germany
- Prior art keywords
- product
- per unit
- unit time
- leakage
- fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012956 testing procedure Methods 0.000 title 1
- 238000005259 measurement Methods 0.000 claims abstract description 81
- 230000002950 deficient Effects 0.000 claims abstract description 64
- 238000007689 inspection Methods 0.000 claims abstract description 48
- 238000012360 testing method Methods 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 17
- 239000001307 helium Substances 0.000 claims description 82
- 229910052734 helium Inorganic materials 0.000 claims description 82
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 82
- 239000007789 gas Substances 0.000 claims description 57
- 238000001514 detection method Methods 0.000 claims description 52
- 230000007547 defect Effects 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 238000005253 cladding Methods 0.000 claims description 3
- 238000010998 test method Methods 0.000 claims 5
- 239000005350 fused silica glass Substances 0.000 claims 1
- 239000000047 product Substances 0.000 description 146
- 239000002775 capsule Substances 0.000 description 19
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 101001094044 Mus musculus Solute carrier family 26 member 6 Proteins 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005094 computer simulation Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000700 radioactive tracer Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
- G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2020/034125 WO2022054169A1 (ja) | 2020-09-09 | 2020-09-09 | リークテスト方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE112020007590T5 true DE112020007590T5 (de) | 2023-06-22 |
Family
ID=80631726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112020007590.7T Pending DE112020007590T5 (de) | 2020-09-09 | 2020-09-09 | Verfahren zur Leckprüfung |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12253436B2 (https=) |
| JP (1) | JP7386352B2 (https=) |
| DE (1) | DE112020007590T5 (https=) |
| WO (1) | WO2022054169A1 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015056661A1 (ja) | 2013-10-15 | 2015-04-23 | 株式会社フクダ | 漏洩試験装置及び方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8555704B2 (en) * | 2008-10-20 | 2013-10-15 | Agilent Technologies, Inc. | Calibration systems and methods for tracer gas leak detection |
| EP2831557B1 (en) | 2012-03-30 | 2018-03-07 | Atomic Energy of Canada Limited | Leak location detection system |
| JP2014134513A (ja) | 2013-01-11 | 2014-07-24 | Fukuda:Kk | リークテスト方法及び装置 |
| CN103335791B (zh) * | 2013-02-06 | 2016-12-28 | 北京市科通电子继电器总厂 | 一种基于定量确定最长候检时间的氦质谱细检漏方法 |
-
2020
- 2020-09-09 JP JP2022548295A patent/JP7386352B2/ja active Active
- 2020-09-09 DE DE112020007590.7T patent/DE112020007590T5/de active Pending
- 2020-09-09 WO PCT/JP2020/034125 patent/WO2022054169A1/ja not_active Ceased
- 2020-09-09 US US18/022,662 patent/US12253436B2/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015056661A1 (ja) | 2013-10-15 | 2015-04-23 | 株式会社フクダ | 漏洩試験装置及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2022054169A1 (https=) | 2022-03-17 |
| US20230314267A1 (en) | 2023-10-05 |
| US12253436B2 (en) | 2025-03-18 |
| WO2022054169A1 (ja) | 2022-03-17 |
| JP7386352B2 (ja) | 2023-11-24 |
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