DE112013006774A5 - Ionisations-Vakuummesszelle - Google Patents

Ionisations-Vakuummesszelle Download PDF

Info

Publication number
DE112013006774A5
DE112013006774A5 DE112013006774.9T DE112013006774T DE112013006774A5 DE 112013006774 A5 DE112013006774 A5 DE 112013006774A5 DE 112013006774 T DE112013006774 T DE 112013006774T DE 112013006774 A5 DE112013006774 A5 DE 112013006774A5
Authority
DE
Germany
Prior art keywords
measuring cell
ionization vacuum
vacuum measuring
ionization
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112013006774.9T
Other languages
English (en)
Inventor
Rolf Enderes
Martin Wüest
Oskar Untermarzoner
Rudolf Stocker
Bernhard Andreaus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon Holding AG
Original Assignee
Inficon GmbH Switzerland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Switzerland filed Critical Inficon GmbH Switzerland
Publication of DE112013006774A5 publication Critical patent/DE112013006774A5/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE112013006774.9T 2013-03-06 2013-07-09 Ionisations-Vakuummesszelle Pending DE112013006774A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH553/13 2013-03-06
CH00553/13A CH707685A1 (de) 2013-03-06 2013-03-06 Ionisations-Vakuummesszelle mit Abschirmvorrichtung.
PCT/EP2013/064511 WO2014135229A1 (de) 2013-03-06 2013-07-09 Ionisations-vakuummesszelle

Publications (1)

Publication Number Publication Date
DE112013006774A5 true DE112013006774A5 (de) 2015-12-17

Family

ID=47845663

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112013006774.9T Pending DE112013006774A5 (de) 2013-03-06 2013-07-09 Ionisations-Vakuummesszelle

Country Status (5)

Country Link
US (1) US9945749B2 (de)
JP (2) JP2016513787A (de)
CH (1) CH707685A1 (de)
DE (1) DE112013006774A5 (de)
WO (1) WO2014135229A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015048664A1 (en) 2013-09-30 2015-04-02 Mks Instruments, Inc. Cold cathode ionization vacuum gauge
TWI739300B (zh) 2015-01-15 2021-09-11 美商Ｍｋｓ儀器公司 離子化計及其製造方法
EP3058984A1 (de) * 2015-02-20 2016-08-24 Heraeus Deutschland GmbH & Co. KG Bauteil mit einem keramischen Grundkörper, mit einem Leitungselement und mit einem Befestigungselement und ein Verfahren zu dessen Herstellung
EP3353802B1 (de) * 2015-09-23 2019-07-24 Inficon AG Ionisations-vakuummesszelle
EP3244433A1 (de) * 2016-05-10 2017-11-15 ABB Schweiz AG Vakuumschalter mit mitteln zur bestimmung des restgasdrucks und verfahren zur bestimmung dafür
EP3555904A1 (de) 2016-12-13 2019-10-23 MKS Instruments, Inc. Anodenelektrodenabschirmung für messgerät der invertierten magnetron-kaltkathodenionisierung
RU2680672C1 (ru) * 2018-04-24 2019-02-25 Акционерное общество "Научно-производственное объединение Измерительной техники" (АО "НПО ИТ") Датчик вакуума
CN114424039B (zh) 2019-09-20 2024-09-20 英福康有限公司 确定压力的方法和压力传感器
JP7165714B2 (ja) * 2020-12-22 2022-11-04 チュルク ウント ヒリンガー ゲーエムベーハー 電気加熱装置のためのフィードスルー、そのようなフィードスルーを備える電気加熱装置、そのようなフィードスルーを備えるシステム、およびそのようなフィードスルーを製造するための方法
JP7544415B2 (ja) 2021-06-14 2024-09-03 国立研究開発法人産業技術総合研究所 プラズマ源及び当該プラズマ源を用いた原子時計
CN114964586B (zh) * 2022-05-16 2024-07-09 玉环普天单向器有限公司 单向器扭力测试工装

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1336126A (en) * 1969-10-29 1973-11-07 Mullard Ltd Ion gauges
JPS5233901Y2 (de) * 1972-01-20 1977-08-02
JPS5320669B2 (de) * 1974-04-20 1978-06-28
JPS53141466U (de) * 1977-04-15 1978-11-08
US5541519A (en) * 1991-02-28 1996-07-30 Stearns; Stanley D. Photoionization detector incorporating a dopant and carrier gas flow
US5198772A (en) * 1991-03-12 1993-03-30 Mks Instruments, Inc. Removable discharge initiating means for cold cathode discharge ionization gauge
US5157333A (en) * 1991-03-12 1992-10-20 Mks Instruments, Inc. Discharge initiating means for cold cathode discharge ionization gauge
GB9111747D0 (en) * 1991-05-31 1991-07-24 Boc Group Plc Improvements relating to vacuum pumps
GB9302587D0 (en) * 1993-02-10 1993-03-24 Boc Group The Magnitc structures
ATE168467T1 (de) 1993-04-28 1998-08-15 Fredericks Co Ionisationswandler mit sich gegenuberliegenden magneten
JP3602917B2 (ja) * 1996-07-05 2004-12-15 株式会社アルバック 冷陰極電離真空計
DE29614489U1 (de) * 1996-08-21 1996-10-10 Leybold Vakuum GmbH, 50968 Köln Meßsystem für ein Vakuummeter
GB9906788D0 (en) * 1999-03-24 1999-05-19 Boc Group Plc Vacuum gauge
US6566884B2 (en) * 2001-09-13 2003-05-20 Duniway Stockroom Corporation Ionization vacuum pressure gauge
DE10243634B4 (de) * 2002-09-19 2005-02-03 Otto-Von-Guericke-Universität Magdeburg Kaltkatoden-Ionisationsmanometer
EP1698878A1 (de) * 2005-03-04 2006-09-06 Inficon GmbH Elektrodenanordnung und Druckmessvorrichtung
US7456634B2 (en) * 2006-10-26 2008-11-25 Brooks Automation, Inc. Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments
JP5000386B2 (ja) * 2007-06-08 2012-08-15 株式会社アルバック 冷陰極電離真空計
JP4905704B2 (ja) * 2007-06-08 2012-03-28 株式会社アルバック 点火補助具およびこれを備えた冷陰極電離真空計
WO2010033851A1 (en) 2008-09-19 2010-03-25 Schweitzer Engineering Laboratories, Inc. Electro-optical radiation collector for arc flash detection
JP5170768B2 (ja) * 2008-12-16 2013-03-27 大亜真空株式会社 冷陰極電離真空計
JP5669411B2 (ja) * 2009-04-09 2015-02-12 キヤノンアネルバ株式会社 冷陰極電離真空計及びそれを備えた真空処理装置並びに放電開始補助電極
CN102087949B (zh) * 2010-12-31 2012-11-21 清华大学 真空规管
JP5889540B2 (ja) * 2011-03-29 2016-03-22 アズビル株式会社 圧力センサ
CH705474A1 (de) * 2011-09-08 2013-03-15 Inficon Gmbh Ionisations - Vakuummesszelle.
JP5704065B2 (ja) * 2011-12-16 2015-04-22 株式会社島津製作所 放電イオン化電流検出器

Also Published As

Publication number Publication date
JP6499236B2 (ja) 2019-04-10
CH707685A1 (de) 2014-09-15
WO2014135229A9 (de) 2014-11-27
JP2017198711A (ja) 2017-11-02
JP2016513787A (ja) 2016-05-16
US20160025587A1 (en) 2016-01-28
US9945749B2 (en) 2018-04-17
WO2014135229A1 (de) 2014-09-12

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Date Code Title Description
R409 Internal rectification of the legal status completed
R409 Internal rectification of the legal status completed
R012 Request for examination validly filed
R081 Change of applicant/patentee

Owner name: INFICON HOLDING AG, CH

Free format text: FORMER OWNER: INFICON GMBH, BAD RAGAZ, CH

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Representative=s name: BOCKHORNI & BRUENTJEN PARTNERSCHAFT PATENTANWA, DE

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