DE112013004302A5 - Halbleiterbauelement mit geschützter Funktionsschicht - Google Patents

Halbleiterbauelement mit geschützter Funktionsschicht Download PDF

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Publication number
DE112013004302A5
DE112013004302A5 DE112013004302.5T DE112013004302T DE112013004302A5 DE 112013004302 A5 DE112013004302 A5 DE 112013004302A5 DE 112013004302 T DE112013004302 T DE 112013004302T DE 112013004302 A5 DE112013004302 A5 DE 112013004302A5
Authority
DE
Germany
Prior art keywords
semiconductor device
functional layer
protected functional
protected
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112013004302.5T
Other languages
English (en)
Other versions
DE112013004302B4 (de
Inventor
Nataliya Kalinovich
Marlis Ortel
Gerd-Volker Röschenthaler
Veit Wagner
Olesya Kazakova
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Constructor University Bremen Ggmbh De
Original Assignee
Jacobs University gGmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE201210107959 external-priority patent/DE102012107959A1/de
Application filed by Jacobs University gGmbH filed Critical Jacobs University gGmbH
Publication of DE112013004302A5 publication Critical patent/DE112013004302A5/de
Application granted granted Critical
Publication of DE112013004302B4 publication Critical patent/DE112013004302B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
DE112013004302.5T 2012-08-29 2013-08-23 Elektronisches bauelement, insbesondere halbleiterbauelement, mit geschützter funktionsschicht sowie verfahren zur herstellung eines elektronischen bauelements, insbesondere eines halbleiterbauelements Active DE112013004302B4 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE201210107959 DE102012107959A1 (de) 2012-08-29 2012-08-29 Halbleiterbauelement mit geschützter Funktionsschicht
DE102012107959.5 2012-08-29
DE102012110019.5 2012-10-19
DE102012110019 2012-10-19
PCT/DE2013/100307 WO2014032655A2 (de) 2012-08-29 2013-08-23 Halbleiterbauelement mit geschützter funktionsschicht

Publications (2)

Publication Number Publication Date
DE112013004302A5 true DE112013004302A5 (de) 2015-05-21
DE112013004302B4 DE112013004302B4 (de) 2022-07-07

Family

ID=49377997

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112013004302.5T Active DE112013004302B4 (de) 2012-08-29 2013-08-23 Elektronisches bauelement, insbesondere halbleiterbauelement, mit geschützter funktionsschicht sowie verfahren zur herstellung eines elektronischen bauelements, insbesondere eines halbleiterbauelements

Country Status (2)

Country Link
DE (1) DE112013004302B4 (de)
WO (1) WO2014032655A2 (de)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59213150A (ja) 1983-05-18 1984-12-03 Hitachi Ltd 半導体装置
JPH09129612A (ja) * 1995-10-26 1997-05-16 Tokyo Electron Ltd エッチングガス及びエッチング方法
US5888591A (en) 1996-05-06 1999-03-30 Massachusetts Institute Of Technology Chemical vapor deposition of fluorocarbon polymer thin films
US20060138599A1 (en) * 2004-12-29 2006-06-29 Tessera, Inc. Semiconductor members having a halogenated polymeric coating and methods for their formation
KR101615636B1 (ko) * 2009-12-08 2016-04-27 삼성전자주식회사 트랜지스터 및 상기 트랜지스터를 포함한 전자 장치
US8609552B2 (en) * 2010-06-04 2013-12-17 Tokyo Electron Limited Method for controlling dangling bonds in fluorocarbon films

Also Published As

Publication number Publication date
WO2014032655A2 (de) 2014-03-06
DE112013004302B4 (de) 2022-07-07
WO2014032655A3 (de) 2014-06-12

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Legal Events

Date Code Title Description
R082 Change of representative

Representative=s name: WEIDNER STERN JESCHKE PATENTANWAELTE PARTNERSC, DE

R012 Request for examination validly filed
R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final
R081 Change of applicant/patentee

Owner name: CONSTRUCTOR UNIVERSITY BREMEN GGMBH, DE

Free format text: FORMER OWNER: JACOBS UNIVERSITY BREMEN GGMBH, 28759 BREMEN, DE