DE112012005156A5 - Optoelektronischer Halbleiterchip - Google Patents

Optoelektronischer Halbleiterchip Download PDF

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Publication number
DE112012005156A5
DE112012005156A5 DE112012005156.4T DE112012005156T DE112012005156A5 DE 112012005156 A5 DE112012005156 A5 DE 112012005156A5 DE 112012005156 T DE112012005156 T DE 112012005156T DE 112012005156 A5 DE112012005156 A5 DE 112012005156A5
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DE
Germany
Prior art keywords
semiconductor chip
optoelectronic semiconductor
optoelectronic
chip
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112012005156.4T
Other languages
English (en)
Other versions
DE112012005156B4 (de
Inventor
Martin Mandl
Martin Strassburg
Christopher Kölper
Alexander F. Pfeuffer
Patrick Rode
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Osram International GmbH
Original Assignee
Osram Opto Semiconductors GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of DE112012005156A5 publication Critical patent/DE112012005156A5/de
Application granted granted Critical
Publication of DE112012005156B4 publication Critical patent/DE112012005156B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/16—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous
    • H01L33/18—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous within the light emitting region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
    • H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
    • H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
    • H01L33/24—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region
    • H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
    • H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/58—Optical field-shaping elements
    • H01L33/60—Reflective elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
    • H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/40—Materials therefor
    • H01L33/42—Transparent materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • H01L33/46—Reflective coating, e.g. dielectric Bragg reflector

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Led Devices (AREA)
DE112012005156.4T 2011-12-07 2012-11-27 Optoelektronischer Halbleiterchip Active DE112012005156B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011056140A DE102011056140A1 (de) 2011-12-07 2011-12-07 Optoelektronischer Halbleiterchip
DE102011056140.4 2011-12-07
PCT/EP2012/073729 WO2013083438A1 (de) 2011-12-07 2012-11-27 Optoelektronischer halbleiterchip

Publications (2)

Publication Number Publication Date
DE112012005156A5 true DE112012005156A5 (de) 2014-09-18
DE112012005156B4 DE112012005156B4 (de) 2022-04-21

Family

ID=47326091

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102011056140A Withdrawn DE102011056140A1 (de) 2011-12-07 2011-12-07 Optoelektronischer Halbleiterchip
DE112012005156.4T Active DE112012005156B4 (de) 2011-12-07 2012-11-27 Optoelektronischer Halbleiterchip

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102011056140A Withdrawn DE102011056140A1 (de) 2011-12-07 2011-12-07 Optoelektronischer Halbleiterchip

Country Status (6)

Country Link
US (2) US9257611B2 (de)
JP (1) JP5986217B2 (de)
KR (1) KR20140108548A (de)
CN (1) CN103959489B (de)
DE (2) DE102011056140A1 (de)
WO (1) WO2013083438A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011056140A1 (de) * 2011-12-07 2013-06-13 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip
DE102013211707B4 (de) 2013-06-20 2024-03-28 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Anordnung mit einem Träger, Array mit mehreren Anordnungen und Verfahren zum Herstellen einer Anordnung
FR3007580B1 (fr) 2013-06-25 2016-10-21 Commissariat Energie Atomique Dispositif optoelectronique a reflectivite amelioree
US9583533B2 (en) * 2014-03-13 2017-02-28 Apple Inc. LED device with embedded nanowire LEDs
DE102016114992A1 (de) 2016-08-12 2018-02-15 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip
KR102587958B1 (ko) * 2017-02-03 2023-10-11 삼성전자주식회사 메타 광학 소자 및 그 제조 방법
CN107749437A (zh) * 2017-11-17 2018-03-02 广州市香港科大霍英东研究院 可挠性发光二极管制程及其结构
JP7312997B2 (ja) * 2018-11-09 2023-07-24 学校法人 名城大学 半導体発光素子
US11637219B2 (en) 2019-04-12 2023-04-25 Google Llc Monolithic integration of different light emitting structures on a same substrate

Family Cites Families (20)

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Publication number Priority date Publication date Assignee Title
JP3335975B2 (ja) * 2000-01-24 2002-10-21 星和電機株式会社 窒化ガリウム系半導体発光素子
JP4595198B2 (ja) * 2000-12-15 2010-12-08 ソニー株式会社 半導体発光素子及び半導体発光素子の製造方法
EP1727216B1 (de) * 2005-05-24 2019-04-24 LG Electronics, Inc. Stabartige lichtemittierende diode und verfahren zu deren herstellung
KR100661602B1 (ko) 2005-12-09 2006-12-26 삼성전기주식회사 수직 구조 질화갈륨계 ｌｅｄ 소자의 제조방법
US7349613B2 (en) * 2006-01-24 2008-03-25 Hewlett-Packard Development Company, L.P. Photonic crystal devices including gain material and methods for using the same
AU2007313096B2 (en) 2006-03-10 2011-11-10 Unm Rainforest Innovations Pulsed growth of GaN nanowires and applications in group III nitride semiconductor substrate materials and devices
CN101443887B (zh) * 2006-03-10 2011-04-20 Stc.Unm公司 Gan纳米线的脉冲式生长及在族ⅲ氮化物半导体衬底材料中的应用和器件
TWI340481B (en) * 2007-06-11 2011-04-11 Univ Nat Chiao Tung The method for promoting light emission efficiency of led using nano-rod structure
KR100904588B1 (ko) * 2007-07-05 2009-06-25 삼성전자주식회사 코어/쉘 형태의 나노와이어를 제조하는 방법, 그에 의해제조된 나노와이어 및 이를 포함하는 나노와이어 소자
JP5836122B2 (ja) * 2008-07-07 2015-12-24 グロ アーベーＧｌｏ Ａｂ ナノ構造のｌｅｄ
WO2010022064A1 (en) * 2008-08-21 2010-02-25 Nanocrystal Corporation Defect-free group iii - nitride nanostructures and devices using pulsed and non-pulsed growth techniques
SE533531C2 (sv) * 2008-12-19 2010-10-19 Glo Ab Nanostrukturerad anordning
KR101061150B1 (ko) * 2009-05-22 2011-08-31 서울대학교산학협력단 발광 디바이스와 이의 제조 방법
EP2509119B1 (de) * 2009-12-01 2017-03-08 National University Corporation Hokkaido University Lichtemittierendes element und verfahren zu seiner herstellung
JP4848464B2 (ja) * 2010-03-12 2011-12-28 シャープ株式会社 発光装置の製造方法
US8390010B2 (en) * 2010-03-25 2013-03-05 Micron Technology, Inc. Solid state lighting devices with cellular arrays and associated methods of manufacturing
KR101636915B1 (ko) * 2010-09-03 2016-07-07 삼성전자주식회사 그래핀 또는 탄소나노튜브를 이용한 반도체 화합물 구조체 및 그 제조방법과, 반도체 화합물 구조체를 포함하는 반도체 소자
US8937297B2 (en) * 2011-12-02 2015-01-20 Commissariat A L'energie Atomique Et Aux Energies Alternatives Optoelectronic device including nanowires with a core/shell structure
DE102011056140A1 (de) * 2011-12-07 2013-06-13 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip
TWI476953B (zh) * 2012-08-10 2015-03-11 Univ Nat Taiwan 半導體發光元件及其製作方法

Also Published As

Publication number Publication date
DE112012005156B4 (de) 2022-04-21
US9735319B2 (en) 2017-08-15
WO2013083438A1 (de) 2013-06-13
JP2015500565A (ja) 2015-01-05
US20160133794A1 (en) 2016-05-12
DE102011056140A1 (de) 2013-06-13
CN103959489A (zh) 2014-07-30
CN103959489B (zh) 2016-10-12
KR20140108548A (ko) 2014-09-11
US9257611B2 (en) 2016-02-09
JP5986217B2 (ja) 2016-09-06
US20140339577A1 (en) 2014-11-20

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