DE112010002922T5 - Druckabbau-System und Vakuum-Behandlungsvorrichtung - Google Patents

Druckabbau-System und Vakuum-Behandlungsvorrichtung Download PDF

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Publication number
DE112010002922T5
DE112010002922T5 DE112010002922T DE112010002922T DE112010002922T5 DE 112010002922 T5 DE112010002922 T5 DE 112010002922T5 DE 112010002922 T DE112010002922 T DE 112010002922T DE 112010002922 T DE112010002922 T DE 112010002922T DE 112010002922 T5 DE112010002922 T5 DE 112010002922T5
Authority
DE
Germany
Prior art keywords
frequency
temperature
pressure reduction
cooling unit
threshold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE112010002922T
Other languages
German (de)
English (en)
Inventor
Kouichi Takizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of DE112010002922T5 publication Critical patent/DE112010002922T5/de
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Inverter Devices (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
DE112010002922T 2009-07-15 2010-06-24 Druckabbau-System und Vakuum-Behandlungsvorrichtung Ceased DE112010002922T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009166701 2009-07-15
JP2009-166701 2009-07-15
PCT/JP2010/060739 WO2011007652A1 (ja) 2009-07-15 2010-06-24 減圧システム及び真空処理装置

Publications (1)

Publication Number Publication Date
DE112010002922T5 true DE112010002922T5 (de) 2012-09-20

Family

ID=43449262

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112010002922T Ceased DE112010002922T5 (de) 2009-07-15 2010-06-24 Druckabbau-System und Vakuum-Behandlungsvorrichtung

Country Status (8)

Country Link
US (1) US20120060533A1 (zh)
JP (1) JP5466235B2 (zh)
KR (1) KR101234698B1 (zh)
CN (1) CN102428275B (zh)
DE (1) DE112010002922T5 (zh)
SG (1) SG176036A1 (zh)
TW (1) TWI463072B (zh)
WO (1) WO2011007652A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5978045B2 (ja) * 2012-07-26 2016-08-24 株式会社アルバック 減圧システム
JP5941215B2 (ja) * 2013-02-28 2016-06-29 キヤノンアネルバ株式会社 真空処理装置
JP6410589B2 (ja) * 2014-12-17 2018-10-24 住友重機械工業株式会社 クライオポンプ、クライオポンプの制御方法、及び冷凍機
CN109877839B (zh) * 2019-03-25 2021-07-02 济南翼菲自动化科技有限公司 一种机器人取放柔性路径算法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002070737A (ja) 2000-08-31 2002-03-08 Ulvac Kuraio Kk クライオポンプの再生方法
JP2009001950A (ja) 2007-06-25 2009-01-08 Kaneka Corp 合成皮革

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0390110A (ja) * 1989-09-01 1991-04-16 Sanyo Electric Co Ltd 自動炊飯装置
US5386708A (en) * 1993-09-02 1995-02-07 Ebara Technologies Incorporated Cryogenic vacuum pump with expander speed control
DE69531313T2 (de) * 1994-04-28 2004-05-13 Ebara Corp. Regeneration einer Kryopumpe
US5775109A (en) * 1997-01-02 1998-07-07 Helix Technology Corporation Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor
US6096267A (en) * 1997-02-28 2000-08-01 Extraction Systems, Inc. System for detecting base contaminants in air
US5918473A (en) * 1997-05-09 1999-07-06 Alcan International Limited Method and apparatus for measuring quenchant properties of coolants
US7127901B2 (en) 2001-07-20 2006-10-31 Brooks Automation, Inc. Helium management control system
US6691524B2 (en) * 2002-03-29 2004-02-17 General Electric Company Methods and apparatus for controlling compressor speed
JP3090110U (ja) * 2002-05-20 2002-11-29 長州産業株式会社 真空装置用省エネユニット
JP2004060644A (ja) * 2002-06-05 2004-02-26 Denso Corp 圧縮機装置およびその制御方法
DE10393146B4 (de) * 2002-08-20 2015-07-02 Sumitomo Heavy Industries, Ltd. Tieftemperaturkühlvorrichtung
JP2005048764A (ja) * 2003-07-29 2005-02-24 Sumitomo Heavy Ind Ltd 真空ポンプ制御システム
US7895854B2 (en) * 2005-06-01 2011-03-01 Hewlett-Packard Development Company, L.P. Refrigeration system with parallel evaporators and variable speed compressor
US20070125104A1 (en) * 2005-12-06 2007-06-07 Ranco Incorporated Of Delaware Compressor system for vending devices and the like
JP2008014599A (ja) * 2006-07-07 2008-01-24 Sumitomo Heavy Ind Ltd 圧縮機用電源
US20090133418A1 (en) * 2007-11-26 2009-05-28 Ya De Li Technology.Inc. Plug-in circuit and cooling system thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002070737A (ja) 2000-08-31 2002-03-08 Ulvac Kuraio Kk クライオポンプの再生方法
JP2009001950A (ja) 2007-06-25 2009-01-08 Kaneka Corp 合成皮革

Also Published As

Publication number Publication date
SG176036A1 (en) 2011-12-29
JPWO2011007652A1 (ja) 2012-12-27
KR20120018164A (ko) 2012-02-29
TWI463072B (zh) 2014-12-01
WO2011007652A1 (ja) 2011-01-20
CN102428275A (zh) 2012-04-25
KR101234698B1 (ko) 2013-02-19
US20120060533A1 (en) 2012-03-15
CN102428275B (zh) 2015-03-11
TW201107603A (en) 2011-03-01
JP5466235B2 (ja) 2014-04-09

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R012 Request for examination validly filed
R082 Change of representative

Representative=s name: SCHATT, MARKUS, DIPL.-ING.UNIV., DE

R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final