DE112009002542A5 - Mikrofon mit einer Mehrzahl von Wandlerelementen - Google Patents

Mikrofon mit einer Mehrzahl von Wandlerelementen Download PDF

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Publication number
DE112009002542A5
DE112009002542A5 DE112009002542T DE112009002542T DE112009002542A5 DE 112009002542 A5 DE112009002542 A5 DE 112009002542A5 DE 112009002542 T DE112009002542 T DE 112009002542T DE 112009002542 T DE112009002542 T DE 112009002542T DE 112009002542 A5 DE112009002542 A5 DE 112009002542A5
Authority
DE
Germany
Prior art keywords
microphone
transducer elements
transducer
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112009002542T
Other languages
English (en)
Other versions
DE112009002542T5 (de
Inventor
William A. Ryan
Michael Abry
Peter Loeppert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Knowles Electronics LLC
Original Assignee
Knowles Electronics LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Knowles Electronics LLC filed Critical Knowles Electronics LLC
Publication of DE112009002542A5 publication Critical patent/DE112009002542A5/de
Publication of DE112009002542T5 publication Critical patent/DE112009002542T5/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/32—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only
    • H04R1/40—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by combining a number of identical transducers
    • H04R1/406—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by combining a number of identical transducers microphones

Landscapes

  • Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)
  • Micromachines (AREA)
DE112009002542T 2008-10-14 2009-10-09 Mikrofon mit einer Mehrzahl von Wandlerelementen Withdrawn DE112009002542A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10507308P 2008-10-14 2008-10-14
US61/105,073 2008-10-14
PCT/US2009/060115 WO2010045107A2 (en) 2008-10-14 2009-10-09 Microphone having multiple transducer elements

Publications (2)

Publication Number Publication Date
DE112009002542A5 true DE112009002542A5 (de) 2011-09-08
DE112009002542T5 DE112009002542T5 (de) 2012-01-19

Family

ID=42098875

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112009002542T Withdrawn DE112009002542A5 (de) 2008-10-14 2009-10-09 Mikrofon mit einer Mehrzahl von Wandlerelementen

Country Status (5)

Country Link
US (2) US8170244B2 (de)
JP (1) JP5844155B2 (de)
CN (1) CN102187685B (de)
DE (1) DE112009002542A5 (de)
WO (1) WO2010045107A2 (de)

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WO2010135280A2 (en) * 2009-05-18 2010-11-25 Knowles Electronics, Llc Microphone having reduced vibration sensitivity
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JP5741487B2 (ja) * 2012-02-29 2015-07-01 オムロン株式会社 マイクロフォン
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CN102595295B (zh) * 2012-03-06 2015-08-05 歌尔声学股份有限公司 一种mems麦克风
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WO2014040017A1 (en) 2012-09-10 2014-03-13 Robert Bosch Gmbh Mems microphone package with molded interconnect device
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US8692340B1 (en) 2013-03-13 2014-04-08 Invensense, Inc. MEMS acoustic sensor with integrated back cavity
US9467785B2 (en) 2013-03-28 2016-10-11 Knowles Electronics, Llc MEMS apparatus with increased back volume
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US10589987B2 (en) 2013-11-06 2020-03-17 Infineon Technologies Ag System and method for a MEMS transducer
US9307328B2 (en) 2014-01-09 2016-04-05 Knowles Electronics, Llc Interposer for MEMS-on-lid microphone
DE102014100464B4 (de) * 2014-01-16 2022-02-17 Tdk Corporation Multi-MEMS-Modul
CN105101024A (zh) * 2014-04-22 2015-11-25 钰太芯微电子科技（上海）有限公司 多振膜微机电系统麦克风结构
US9532125B2 (en) 2014-06-06 2016-12-27 Cirrus Logic, Inc. Noise cancellation microphones with shared back volume
GB2526945B (en) * 2014-06-06 2017-04-05 Cirrus Logic Inc Noise cancellation microphones with shared back volume
US9554214B2 (en) 2014-10-02 2017-01-24 Knowles Electronics, Llc Signal processing platform in an acoustic capture device
TW201620312A (zh) * 2014-11-27 2016-06-01 Lingsen Precision Ind Ltd 倒裝式微機電麥克風
EP3245156B1 (de) * 2015-01-16 2021-09-08 Université Gustave Eiffel Kinetischer miniatur-energiegewinner zur erzeugung elektrischer energie aus mechanischen schwingungen
US9800971B2 (en) 2015-03-17 2017-10-24 Knowles Electronics, Llc Acoustic apparatus with side port
CN104936116B (zh) * 2015-06-01 2018-12-04 山东共达电声股份有限公司 一种集成的差分硅电容麦克风
KR101673347B1 (ko) * 2015-07-07 2016-11-07 현대자동차 주식회사 마이크로폰
CN105493522B (zh) * 2015-10-30 2018-09-11 歌尔股份有限公司 带通声学滤波器及声学感测装置
KR20180015482A (ko) 2016-08-03 2018-02-13 삼성전자주식회사 음향 스펙트럼 분석기 및 이에 구비된 공진기들의 배열방법
JP7048619B2 (ja) 2016-12-29 2022-04-05 サムスン エレクトロニクス カンパニー リミテッド 共振器を利用した話者認識方法及びその装置
KR102335774B1 (ko) 2017-09-01 2021-12-06 삼성전자주식회사 다중 공진기 어레이를 포함하는 소리 방향 탐지 센서
DE112018005381T5 (de) * 2017-09-21 2020-06-25 Knowles Electronics, Llc Erhöhte mems-vorrichtung in einem mikrofon mit eindringschutz
CN107948781A (zh) * 2017-11-27 2018-04-20 钰太芯微电子科技（上海）有限公司 一种新型麦克风结构及翻盖式电子设备
JP2020036214A (ja) 2018-08-30 2020-03-05 Tdk株式会社 Ｍｅｍｓマイクロフォン
JP2020036215A (ja) 2018-08-30 2020-03-05 Tdk株式会社 Ｍｅｍｓマイクロフォン
CN112806026B (zh) 2018-10-09 2022-05-31 美商楼氏电子有限公司 集成电路、麦克风组件、多麦克风系统、处理音频流的方法
EP4300995A3 (de) 2018-12-19 2024-04-03 Sonion Nederland B.V. Miniaturlautsprecher mit mehreren schallhohlräumen
KR20200084935A (ko) 2018-12-20 2020-07-14 삼성전자주식회사 Adc, 집적 회로, 및 센서 시스템
KR102626924B1 (ko) 2019-06-20 2024-01-19 삼성전자주식회사 지향성 음향 센서와, 이를 이용한 지향 특성의 조절 방법 및 특정 방향의 음향 신호 감쇄 방법
CN213547840U (zh) * 2019-12-30 2021-06-25 美商楼氏电子有限公司 用于麦克风组件的声音端口适配器
CN113132838A (zh) 2019-12-30 2021-07-16 美商楼氏电子有限公司 用于麦克风组件的亥姆霍兹共振器
DE102020204773A1 (de) 2020-04-15 2021-10-21 Robert Bosch Gesellschaft mit beschränkter Haftung Sensoranordnung, umfassend eine Mehrzahl von einzelnen und separaten Sensorelementen
US11284187B1 (en) * 2020-10-26 2022-03-22 Fortemedia, Inc. Small-array MEMS microphone apparatus and noise suppression method thereof
KR20230086877A (ko) 2021-12-08 2023-06-16 삼성전자주식회사 지향성 음향 센서
CN216626054U (zh) * 2021-12-22 2022-05-27 瑞声开泰科技(武汉)有限公司 一种mems麦克风
KR20230095689A (ko) 2021-12-22 2023-06-29 삼성전자주식회사 마이크로폰 패키지 및 이를 포함하는 전자 장치

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PL209935B1 (pl) * 1999-09-06 2011-11-30 Sonionmems As Układ czujnika na bazie krzemu do mikrofonu
JP2002152873A (ja) * 2000-11-09 2002-05-24 Nippon Hoso Kyokai <Nhk> マイク
US7434305B2 (en) * 2000-11-28 2008-10-14 Knowles Electronics, Llc. Method of manufacturing a microphone
JP4336256B2 (ja) * 2004-06-18 2009-09-30 株式会社オーディオテクニカ コンデンサマイクロホン
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EP1915320A1 (de) * 2005-08-11 2008-04-30 Koninklijke Philips Electronics N.V. Verfahren zur herstellung eines mikroelektronischen gehäuses mit einem silizium-mems-mikrophon
JP4804095B2 (ja) * 2005-10-07 2011-10-26 パナソニック株式会社 マイクロホン装置
KR100737728B1 (ko) * 2006-04-21 2007-07-10 주식회사 비에스이 멤스 마이크로폰의 패키징 구조 및 그 조립방법
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TW200904222A (en) * 2007-02-26 2009-01-16 Yamaha Corp Sensitive silicon microphone with wide dynamic range

Also Published As

Publication number Publication date
WO2010045107A3 (en) 2010-08-05
US8170244B2 (en) 2012-05-01
DE112009002542T5 (de) 2012-01-19
US20120207334A1 (en) 2012-08-16
CN102187685A (zh) 2011-09-14
US20100092020A1 (en) 2010-04-15
US8594347B2 (en) 2013-11-26
WO2010045107A2 (en) 2010-04-22
JP5844155B2 (ja) 2016-01-13
JP2012506211A (ja) 2012-03-08
CN102187685B (zh) 2015-03-11

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Legal Events

Date Code Title Description
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20130501