DE112009001424T5 - Asymmetrischer Komposit-Schallwellensensor - Google Patents
Asymmetrischer Komposit-Schallwellensensor Download PDFInfo
- Publication number
- DE112009001424T5 DE112009001424T5 DE112009001424T DE112009001424T DE112009001424T5 DE 112009001424 T5 DE112009001424 T5 DE 112009001424T5 DE 112009001424 T DE112009001424 T DE 112009001424T DE 112009001424 T DE112009001424 T DE 112009001424T DE 112009001424 T5 DE112009001424 T5 DE 112009001424T5
- Authority
- DE
- Germany
- Prior art keywords
- plate
- protective plate
- acoustic wave
- wave device
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
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Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/202,431 | 2008-09-02 | ||
| US12/202,431 US8022595B2 (en) | 2008-09-02 | 2008-09-02 | Asymmetric composite acoustic wave sensor |
| PCT/US2009/053519 WO2010027615A2 (fr) | 2008-09-02 | 2009-08-12 | Capteur d'onde acoustique composite asymétrique |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE112009001424T5 true DE112009001424T5 (de) | 2011-04-14 |
Family
ID=41724262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112009001424T Ceased DE112009001424T5 (de) | 2008-09-02 | 2009-08-12 | Asymmetrischer Komposit-Schallwellensensor |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8022595B2 (fr) |
| DE (1) | DE112009001424T5 (fr) |
| WO (1) | WO2010027615A2 (fr) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2938136B1 (fr) * | 2008-11-05 | 2011-03-11 | Centre Nat Rech Scient | Elements de filtres par couplage transverse sur structures resonantes a ondes de volume a resonances harmoniques multiples. |
| EP2436049B1 (fr) * | 2009-05-28 | 2019-05-01 | Northrop Grumman Systems Corporation | Résonateurs acoustiques de volume latéraux à mode contraint |
| WO2011035147A2 (fr) * | 2009-09-18 | 2011-03-24 | Delaware Capital Formation, Inc. | Composantes d'ondes de compression de capteurs à mesurandes multiples en mode de cisaillement d'épaisseur |
| US8283999B2 (en) * | 2010-02-23 | 2012-10-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator structures comprising a single material acoustic coupling layer comprising inhomogeneous acoustic property |
| CN102879142B (zh) * | 2011-07-13 | 2014-09-10 | 中国科学院理化技术研究所 | 电机效率测量装置及方法 |
| CN103868629A (zh) * | 2012-12-18 | 2014-06-18 | 杭州三花研究院有限公司 | 一种超声波热量表 |
| DE102014009476A1 (de) * | 2014-06-30 | 2015-07-16 | Mann + Hummel Gmbh | Schalldruck-Erfassungsvorrichtung und elektrischer Schalldrucksensor |
| CN105334348A (zh) * | 2014-08-15 | 2016-02-17 | 中国科学院上海硅酸盐研究所 | 一种高温加速度传感器 |
| JP6635366B2 (ja) | 2015-07-08 | 2020-01-22 | 国立研究開発法人物質・材料研究機構 | 圧電材料、その製造方法、圧電素子および燃焼圧センサ |
| US11551905B2 (en) * | 2018-03-19 | 2023-01-10 | Intel Corporation | Resonant process monitor |
| US11831295B2 (en) | 2019-09-20 | 2023-11-28 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Multifunctional integrated acoustic devices and systems using epitaxial materials |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4535631A (en) * | 1982-09-29 | 1985-08-20 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
| CN85100483B (zh) * | 1985-04-01 | 1988-10-19 | 上海灯泡厂 | 超声波换能器用背载材料 |
| DE4312887A1 (de) | 1992-04-30 | 1993-11-04 | Fraunhofer Ges Forschung | Sensor mit hoher empfindlichkeit |
| JP3344441B2 (ja) * | 1994-03-25 | 2002-11-11 | 住友電気工業株式会社 | 表面弾性波素子 |
| NO300078B1 (no) * | 1995-02-10 | 1997-04-01 | Sinvent As | Fotoakustisk gassdetektor |
| JP2842382B2 (ja) * | 1996-06-11 | 1999-01-06 | 日本電気株式会社 | 積層型圧電トランスおよびその製造方法 |
| US7383727B2 (en) * | 1999-05-20 | 2008-06-10 | Seiko Epson Corporation | Liquid cotainer having a liquid consumption detecting device therein |
| US6567753B2 (en) * | 2001-04-04 | 2003-05-20 | General Electric Company | Devices and methods for simultaneous measurement of transmission of vapors through a plurality of sheet materials |
| US6842009B2 (en) * | 2001-09-13 | 2005-01-11 | Nth Tech Corporation | Biohazard sensing system and methods thereof |
| CN1249405C (zh) * | 2002-01-28 | 2006-04-05 | 松下电器产业株式会社 | 声匹配层、超声波发射接收器及超声波流量计 |
| JP3633926B2 (ja) * | 2002-01-28 | 2005-03-30 | 松下電器産業株式会社 | 超音波送受信器および超音波流量計 |
| US6788620B2 (en) * | 2002-05-15 | 2004-09-07 | Matsushita Electric Ind Co Ltd | Acoustic matching member, ultrasound transducer, ultrasonic flowmeter and method for manufacturing the same |
| US7098574B2 (en) * | 2002-11-08 | 2006-08-29 | Toyo Communication Equipment Co., Ltd. | Piezoelectric resonator and method for manufacturing the same |
| WO2007123537A1 (fr) | 2006-04-20 | 2007-11-01 | Dover Electronics, Inc. (Dba Vectron International) | Capteur electroacoustique pour des environnements sous haute pression |
| US7667369B2 (en) * | 2006-11-01 | 2010-02-23 | Delaware Capital Formation, Inc. | High sensitivity microsensors based on flexure induced frequency effects |
| JP4301298B2 (ja) * | 2007-01-29 | 2009-07-22 | 株式会社デンソー | 超音波センサ及び超音波センサの製造方法 |
-
2008
- 2008-09-02 US US12/202,431 patent/US8022595B2/en not_active Expired - Fee Related
-
2009
- 2009-08-12 DE DE112009001424T patent/DE112009001424T5/de not_active Ceased
- 2009-08-12 WO PCT/US2009/053519 patent/WO2010027615A2/fr active Application Filing
Non-Patent Citations (3)
| Title |
|---|
| "Measurement of the equivalent circuit parameters of chemical interface layers on bulk acoustic wave resonator" von G J Gouws, R. C. Holt und J Zhen, Proceeding of the 2004 IEEE International Frequency Control Symposium and exposition |
| "PMMA polymer film characterization using thickness-shear mode (TSM) quartz resonator" von Boima Morray, Suiquong li, Jeanne Hossenlopp, Richard Cernosek und Fabien Josse, 2002 IEEE International Frequency Control Symposium and exposition |
| "The Characterization of Permanent Acoustic Bonding Agents" Fred S. Hickernell (University of Arizona, Tucson, Arizona, USA, University of Central Florida, Orlando, F1, USA) 2008 IEEE Frequency Control Symposium Proceedings |
Also Published As
| Publication number | Publication date |
|---|---|
| US20100052470A1 (en) | 2010-03-04 |
| WO2010027615A2 (fr) | 2010-03-11 |
| US8022595B2 (en) | 2011-09-20 |
| WO2010027615A3 (fr) | 2010-04-29 |
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