DE112006002804A5 - Trenneinrichtung für Prozesskammern von Vakuumbeschichtungsanlagen und Vakuumbeschichtungsanlage - Google Patents

Trenneinrichtung für Prozesskammern von Vakuumbeschichtungsanlagen und Vakuumbeschichtungsanlage Download PDF

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Publication number
DE112006002804A5
DE112006002804A5 DE112006002804T DE112006002804T DE112006002804A5 DE 112006002804 A5 DE112006002804 A5 DE 112006002804A5 DE 112006002804 T DE112006002804 T DE 112006002804T DE 112006002804 T DE112006002804 T DE 112006002804T DE 112006002804 A5 DE112006002804 A5 DE 112006002804A5
Authority
DE
Germany
Prior art keywords
coating equipment
vacuum coating
separating device
process chambers
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE112006002804T
Other languages
English (en)
Inventor
Michael Dipl.-Ing. Hofmann
Jochen Dipl.-Ing. Krause
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Von Ardenne GmbH
Original Assignee
Von Ardenne Anlagentechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Von Ardenne Anlagentechnik GmbH filed Critical Von Ardenne Anlagentechnik GmbH
Publication of DE112006002804A5 publication Critical patent/DE112006002804A5/de
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
DE112006002804T 2005-11-21 2006-11-21 Trenneinrichtung für Prozesskammern von Vakuumbeschichtungsanlagen und Vakuumbeschichtungsanlage Ceased DE112006002804A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005055810 2005-11-21
DE102005055810.0 2005-11-21
PCT/DE2006/002059 WO2007059749A1 (de) 2005-11-21 2006-11-21 Trenneinrichtung für prozesskammern von vakuumbeschichtungsanlagen und vakuumbeschichtungsanlage

Publications (1)

Publication Number Publication Date
DE112006002804A5 true DE112006002804A5 (de) 2008-09-04

Family

ID=37806972

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112006002804T Ceased DE112006002804A5 (de) 2005-11-21 2006-11-21 Trenneinrichtung für Prozesskammern von Vakuumbeschichtungsanlagen und Vakuumbeschichtungsanlage

Country Status (4)

Country Link
US (1) US9057131B2 (de)
CN (1) CN101313084B (de)
DE (1) DE112006002804A5 (de)
WO (1) WO2007059749A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010028734B4 (de) 2009-05-08 2021-07-22 VON ARDENNE Asset GmbH & Co. KG Gasseparationsanordnung einer Vakuumbeschichtungsanlage
DE102012213095A1 (de) 2012-07-25 2014-01-30 Roth & Rau Ag Gasseparation
DE112013000168A5 (de) * 2012-10-16 2014-08-07 Von Ardenne Gmbh Mehrfachbeschichtungseinrichtung für Bandsubstrate und Bandsubstrat-Vakuumbeschichtungsanlage
DE102014116696B4 (de) * 2014-11-14 2016-10-20 Von Ardenne Gmbh Vakuumkammer und Verfahren zum Betreiben einer Vakuumprozessieranlage
KR20160117236A (ko) * 2015-03-31 2016-10-10 가부시키가이샤 고베 세이코쇼 성막 장치 및 성막 장치에 있어서의 격벽 구조체
DE102018106054B4 (de) * 2018-03-15 2022-08-25 VON ARDENNE Asset GmbH & Co. KG Vakuumschleusenkammer und Vakuumprozessieranlage
DE102020101569A1 (de) 2020-01-23 2021-07-29 VON ARDENNE Asset GmbH & Co. KG Prozessiervorrichtung und Verfahren zum Betreiben einer Prozessiervorrichtung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3568632A (en) * 1969-03-24 1971-03-09 Gary F Cawthon Lens coating apparatus
SU515834A1 (ru) 1974-03-05 1976-05-30 Украинский Научно-Исследовательский Институт Специальных Сталей,Сплавов И Ферросплавов Устройство дл нанесени покрытий в вакууме на рулонные материалы
US4911810A (en) 1988-06-21 1990-03-27 Brown University Modular sputtering apparatus
JPH0258832A (ja) 1988-08-24 1990-02-28 Nec Kyushu Ltd プラズマアッシング装置
JPH09312267A (ja) * 1996-05-23 1997-12-02 Rohm Co Ltd 半導体装置の製法およびその製造装置
DE19733940C2 (de) * 1997-08-06 2001-03-01 Leybold Systems Gmbh Vorrichtung zum Beschichten von plattenförmigen Substraten mit dünnen Schichten mittels Kathodenzerstäubung
JP4068377B2 (ja) 2002-03-29 2008-03-26 株式会社ニデック 真空蒸着装置
DE10319379A1 (de) * 2003-04-30 2004-11-25 Applied Films Gmbh & Co. Kg Vorrichtung zum Transportieren eines flachen Substrats in einer Vakuumkammer
DE10362259B4 (de) * 2003-11-04 2011-03-17 Von Ardenne Anlagentechnik Gmbh Längserstreckte Vakuumanlage zur ein- oder beidseitigen Beschichtung flacher Substrate
DE102004021734B4 (de) * 2004-04-30 2010-09-02 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur kontinuierlichen Beschichtung flacher Substrate mit optisch aktiven Schichtsystemen
US20060278164A1 (en) * 2005-06-10 2006-12-14 Petrach Philip M Dual gate isolating maintenance slit valve chamber with pumping option
DE102006043813B4 (de) * 2006-02-21 2011-05-19 Von Ardenne Anlagentechnik Gmbh Schieberventil für eine Beschichtungsanlage und Beschichtungsanlage
US20070256934A1 (en) * 2006-05-08 2007-11-08 Perata Michael R Apparatus and Method for Coating Substrates With Approximate Process Isolation

Also Published As

Publication number Publication date
WO2007059749A1 (de) 2007-05-31
CN101313084A (zh) 2008-11-26
US20090139452A1 (en) 2009-06-04
CN101313084B (zh) 2012-02-29
US9057131B2 (en) 2015-06-16

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R082 Change of representative

Representative=s name: PATENTANWAELTE LIPPERT, STACHOW & PARTNER, DE

R081 Change of applicant/patentee

Owner name: VON ARDENNE GMBH, DE

Free format text: FORMER OWNER: VON ARDENNE ANLAGENTECHNIK GMBH, 01324 DRESDEN, DE

Effective date: 20140707

R082 Change of representative

Representative=s name: PATENTANWAELTE LIPPERT, STACHOW & PARTNER, DE

Effective date: 20140707

R016 Response to examination communication
R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final