DE1109311B - Verfahren zum Betrieb einer Getter-Ionenpumpe und Getter-Ionenpumpe zur Durchfuehrung des Verfahrens - Google Patents
Verfahren zum Betrieb einer Getter-Ionenpumpe und Getter-Ionenpumpe zur Durchfuehrung des VerfahrensInfo
- Publication number
- DE1109311B DE1109311B DEA28493A DEA0028493A DE1109311B DE 1109311 B DE1109311 B DE 1109311B DE A28493 A DEA28493 A DE A28493A DE A0028493 A DEA0028493 A DE A0028493A DE 1109311 B DE1109311 B DE 1109311B
- Authority
- DE
- Germany
- Prior art keywords
- getter
- ion pump
- evaporation
- ion
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 108010083687 Ion Pumps Proteins 0.000 title claims description 36
- 238000000034 method Methods 0.000 title claims description 14
- 230000008569 process Effects 0.000 title description 8
- 238000001704 evaporation Methods 0.000 claims description 49
- 230000008020 evaporation Effects 0.000 claims description 47
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 29
- 239000002184 metal Substances 0.000 claims description 29
- 239000000843 powder Substances 0.000 claims description 29
- 239000010936 titanium Substances 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 24
- 229910052719 titanium Inorganic materials 0.000 claims description 24
- 229910052721 tungsten Inorganic materials 0.000 claims description 14
- 239000010937 tungsten Substances 0.000 claims description 14
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 13
- 238000005086 pumping Methods 0.000 claims description 12
- 230000000694 effects Effects 0.000 claims description 11
- 238000005247 gettering Methods 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 238000009530 blood pressure measurement Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000003870 refractory metal Substances 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- 229910052786 argon Inorganic materials 0.000 description 7
- 238000003860 storage Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 102000006391 Ion Pumps Human genes 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 238000007872 degassing Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 238000005275 alloying Methods 0.000 description 2
- -1 argon ion Chemical class 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000001883 metal evaporation Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000005457 Black-body radiation Effects 0.000 description 1
- 241000282994 Cervidae Species 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005520 electrodynamics Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 150000003657 tungsten Chemical class 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
- H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR74286D FR74286E (OSRAM) | 1957-12-12 | ||
| DEA28493A DE1109311B (de) | 1957-12-12 | 1957-12-12 | Verfahren zum Betrieb einer Getter-Ionenpumpe und Getter-Ionenpumpe zur Durchfuehrung des Verfahrens |
| US779446A US2973134A (en) | 1957-12-12 | 1958-12-10 | Ion getter pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEA28493A DE1109311B (de) | 1957-12-12 | 1957-12-12 | Verfahren zum Betrieb einer Getter-Ionenpumpe und Getter-Ionenpumpe zur Durchfuehrung des Verfahrens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1109311B true DE1109311B (de) | 1961-06-22 |
Family
ID=6926665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEA28493A Pending DE1109311B (de) | 1957-12-12 | 1957-12-12 | Verfahren zum Betrieb einer Getter-Ionenpumpe und Getter-Ionenpumpe zur Durchfuehrung des Verfahrens |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US2973134A (OSRAM) |
| DE (1) | DE1109311B (OSRAM) |
| FR (1) | FR74286E (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3150817A (en) * | 1961-04-03 | 1964-09-29 | Varian Associates | High vacuum system |
| US3383032A (en) * | 1967-01-31 | 1968-05-14 | Atomic Energy Commission Usa | Vacuum pumping method and apparatus |
| DE102009042417B4 (de) * | 2009-07-16 | 2011-11-24 | Vacom Steuerungsbau Und Service Gmbh | Orbitron-Ionengetterpumpe |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2850225A (en) * | 1955-11-10 | 1958-09-02 | Wisconsin Alumni Res Found | Pump |
-
0
- FR FR74286D patent/FR74286E/fr not_active Expired
-
1957
- 1957-12-12 DE DEA28493A patent/DE1109311B/de active Pending
-
1958
- 1958-12-10 US US779446A patent/US2973134A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US2973134A (en) | 1961-02-28 |
| FR74286E (OSRAM) | 1961-03-08 |
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