DE10290650D2 - Akustisches Oberflächenwellenbauelement - Google Patents

Akustisches Oberflächenwellenbauelement

Info

Publication number
DE10290650D2
DE10290650D2 DE10290650T DE10290650T DE10290650D2 DE 10290650 D2 DE10290650 D2 DE 10290650D2 DE 10290650 T DE10290650 T DE 10290650T DE 10290650 T DE10290650 T DE 10290650T DE 10290650 D2 DE10290650 D2 DE 10290650D2
Authority
DE
Germany
Prior art keywords
surface wave
wave component
acoustic surface
acoustic
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10290650T
Other languages
English (en)
Inventor
Siegfried Menzel
Hagen Schmidt
Manfred Weihnacht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leibniz Institut fuer Festkorper und Werkstofforschung Dresden eV
Original Assignee
Leibniz Institut fuer Festkorper und Werkstofforschung Dresden eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leibniz Institut fuer Festkorper und Werkstofforschung Dresden eV filed Critical Leibniz Institut fuer Festkorper und Werkstofforschung Dresden eV
Priority to DE10290650T priority Critical patent/DE10290650D2/de
Application granted granted Critical
Publication of DE10290650D2 publication Critical patent/DE10290650D2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02929—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02866—Means for compensation or elimination of undesirable effects of bulk wave excitation and reflections
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02874—Means for compensation or elimination of undesirable effects of direct coupling between input and output transducers

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE10290650T 2001-02-16 2002-02-15 Akustisches Oberflächenwellenbauelement Expired - Fee Related DE10290650D2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10290650T DE10290650D2 (de) 2001-02-16 2002-02-15 Akustisches Oberflächenwellenbauelement

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10107804 2001-02-16
PCT/DE2002/000571 WO2002067423A1 (de) 2001-02-16 2002-02-15 Akustisches oberflächenwellenbauelement
DE10290650T DE10290650D2 (de) 2001-02-16 2002-02-15 Akustisches Oberflächenwellenbauelement

Publications (1)

Publication Number Publication Date
DE10290650D2 true DE10290650D2 (de) 2004-04-15

Family

ID=7674626

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10206480A Expired - Fee Related DE10206480B4 (de) 2001-02-16 2002-02-14 Akustisches Oberflächenwellenbauelement
DE10290650T Expired - Fee Related DE10290650D2 (de) 2001-02-16 2002-02-15 Akustisches Oberflächenwellenbauelement

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10206480A Expired - Fee Related DE10206480B4 (de) 2001-02-16 2002-02-14 Akustisches Oberflächenwellenbauelement

Country Status (7)

Country Link
US (1) US6853115B2 (de)
EP (1) EP1362420A1 (de)
JP (1) JP2004519171A (de)
KR (1) KR100856656B1 (de)
CN (1) CN1457549A (de)
DE (2) DE10206480B4 (de)
WO (1) WO2002067423A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10216559B4 (de) * 2002-04-09 2007-08-09 Leibniz-Institut für Festkörper- und Werkstoffforschung e.V. Akustisches Oberflächenwellenbauelement und Verfahren zu dessen Herstellung
DE10236003B4 (de) * 2002-08-06 2013-12-24 Epcos Ag Verfahren zur Herstellung eines Bauelements mit leistungsverträglicher Elektrodenstruktur
JP4064208B2 (ja) * 2002-10-31 2008-03-19 アルプス電気株式会社 弾性表面波素子及びその製造方法
DE10302633B4 (de) * 2003-01-23 2013-08-22 Epcos Ag SAW-Bauelement mit verbessertem Temperaturgang
JP4453701B2 (ja) 2004-03-02 2010-04-21 株式会社村田製作所 弾性表面波装置
EP1867980A4 (de) * 2005-04-06 2014-03-05 Murata Manufacturing Co Oberflächenwellensensorvorrichtung
JP4279271B2 (ja) * 2005-06-01 2009-06-17 アルプス電気株式会社 弾性表面波素子及びその製造方法
US7373838B2 (en) * 2005-06-03 2008-05-20 Honeywell International Inc. Acoustic wave flow sensor for high-condensation applications
CN100435482C (zh) * 2005-09-30 2008-11-19 哈尔滨工业大学 薄膜声表面波器件的非晶金刚石增频衬底的制备方法
CN101180532A (zh) * 2006-04-20 2008-05-14 多弗电子股份有限公司 用于恶劣环境的涂层以及使用所述涂层的传感器
KR100889044B1 (ko) * 2007-08-09 2009-03-19 주식회사 엠디티 표면탄성파 센서
DE102009021508B4 (de) * 2009-05-15 2014-05-22 Epcos Ag Elektrode mit verbesserter Leistungsfestigkeit
JP5378927B2 (ja) * 2009-09-25 2013-12-25 太陽誘電株式会社 弾性波デバイスの製造方法
CN101986563B (zh) * 2010-10-18 2013-08-28 华为技术有限公司 声表面滤波器及其制造方法
CN103329436B (zh) * 2011-01-19 2016-07-06 株式会社村田制作所 弹性表面波装置
US8723392B2 (en) 2011-07-15 2014-05-13 International Business Machines Corporation Saw filter having planar barrier layer and method of making

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1188478A (en) * 1982-07-15 1985-06-11 Peter E.F. Krause Integral corrosion resistant manifold
JPS62272610A (ja) * 1986-05-21 1987-11-26 Hitachi Ltd 弾性表面波素子
JP3252865B2 (ja) * 1992-09-11 2002-02-04 住友電気工業株式会社 表面弾性波素子および表面弾性波素子の製造方法
US5856198A (en) * 1994-12-28 1999-01-05 Extraction Systems, Inc. Performance monitoring of gas-phase air filters
JP3524188B2 (ja) 1995-01-23 2004-05-10 沖電気工業株式会社 弾性表面波装置
JPH0969748A (ja) * 1995-09-01 1997-03-11 Matsushita Electric Ind Co Ltd Ｓａｗデバイスおよびその製造方法
JPH09199976A (ja) 1996-01-18 1997-07-31 Hitachi Ltd 弾性表面波素子電極
WO1997044989A1 (en) 1996-05-23 1997-11-27 Philips Electronics N.V. Circuit arrangement
DE19758195C2 (de) * 1997-12-30 2000-05-18 Siemens Ag Oberflächenwellen- (SAW-)Bauelement auf insbesondere Lithiumtantalat- oder -niobat-Substrat
WO1999054995A1 (fr) * 1998-04-21 1999-10-28 Matsushita Electric Industrial Co.,Ltd. Dispositif de traitement des ondes acoustiques de surface et son procede de production, dispositif de communication mobile comprenant ce dernier
JP3712035B2 (ja) * 1999-04-28 2005-11-02 株式会社村田製作所 表面波装置の製造方法
EP1158668B1 (de) * 1999-11-30 2007-08-15 TDK Corporation Herstellungsverfahren für eine akustische oberflächenwellenvorrichtung

Also Published As

Publication number Publication date
EP1362420A1 (de) 2003-11-19
DE10206480B4 (de) 2005-02-10
KR100856656B1 (ko) 2008-09-04
DE10206480A1 (de) 2002-09-19
JP2004519171A (ja) 2004-06-24
CN1457549A (zh) 2003-11-19
WO2002067423A1 (de) 2002-08-29
KR20020089468A (ko) 2002-11-29
US20040076081A1 (en) 2004-04-22
US6853115B2 (en) 2005-02-08

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee