DE60130286D1 - Akustische Oberflächenwellenanordnung - Google Patents
Akustische OberflächenwellenanordnungInfo
- Publication number
- DE60130286D1 DE60130286D1 DE60130286T DE60130286T DE60130286D1 DE 60130286 D1 DE60130286 D1 DE 60130286D1 DE 60130286 T DE60130286 T DE 60130286T DE 60130286 T DE60130286 T DE 60130286T DE 60130286 D1 DE60130286 D1 DE 60130286D1
- Authority
- DE
- Germany
- Prior art keywords
- surface wave
- acoustic surface
- wave arrangement
- arrangement
- acoustic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14538—Formation
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000148850A JP3402311B2 (ja) | 2000-05-19 | 2000-05-19 | 弾性表面波装置 |
JP2000148850 | 2000-05-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60130286D1 true DE60130286D1 (de) | 2007-10-18 |
DE60130286T2 DE60130286T2 (de) | 2007-12-20 |
Family
ID=18654807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60130286T Expired - Lifetime DE60130286T2 (de) | 2000-05-19 | 2001-05-21 | Akustische Oberflächenwellenanordnung |
Country Status (4)
Country | Link |
---|---|
US (1) | US6762533B2 (de) |
EP (1) | EP1158669B8 (de) |
JP (1) | JP3402311B2 (de) |
DE (1) | DE60130286T2 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10206369B4 (de) * | 2002-02-15 | 2012-12-27 | Epcos Ag | Elektrodenstruktur mit verbesserter Leistungsverträglichkeit und Verfahren zur Herstellung |
JP4096787B2 (ja) | 2003-04-11 | 2008-06-04 | 株式会社村田製作所 | 弾性表面波素子の製造方法 |
EP1719247A4 (de) * | 2004-02-26 | 2011-03-23 | Mnt Innovations Pty Ltd | Oebrflächenwellensensor mit geschichteter oberfläche |
ES2267363B1 (es) * | 2004-11-22 | 2008-03-01 | Gamesa Desarrollos Aeronauticos, S.A. | Aplicacion de piezotransductores. |
DE102005055871A1 (de) * | 2005-11-23 | 2007-05-24 | Epcos Ag | Elektroakustisches Bauelement |
JP2008125130A (ja) * | 2008-02-08 | 2008-05-29 | Murata Mfg Co Ltd | 表面波装置及びその製造方法 |
JP2008136238A (ja) * | 2008-02-08 | 2008-06-12 | Murata Mfg Co Ltd | 表面波装置及びその製造方法 |
JP2008125131A (ja) * | 2008-02-08 | 2008-05-29 | Murata Mfg Co Ltd | 表面波装置及びその製造方法 |
DE102008033704B4 (de) * | 2008-07-18 | 2014-04-03 | Epcos Ag | Elektronisches Bauelement |
EP2493073B1 (de) | 2009-10-19 | 2018-11-28 | Murata Manufacturing Co., Ltd. | Oberflächenschallwellenvorrichtung |
CN110081965B (zh) * | 2019-05-17 | 2021-04-30 | 电子科技大学中山学院 | 一种驻波波节、波腹定位探测结构 |
Family Cites Families (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1362238A (en) * | 1971-07-21 | 1974-07-30 | Mullard Ltd | Acoustic surface wave devices |
US4017890A (en) * | 1975-10-24 | 1977-04-12 | International Business Machines Corporation | Intermetallic compound layer in thin films for improved electromigration resistance |
US4223284A (en) * | 1977-11-07 | 1980-09-16 | Murata Manufacturing Co., Ltd. | Acoustic surface wave device |
JPS57119509A (en) * | 1981-01-19 | 1982-07-26 | Toshiba Corp | Surface acoustic wave resonator |
JPS62168410A (ja) | 1986-01-20 | 1987-07-24 | Victor Co Of Japan Ltd | 弾性表面波共振子 |
JPS62272610A (ja) * | 1986-05-21 | 1987-11-26 | Hitachi Ltd | 弾性表面波素子 |
US5091051A (en) * | 1986-12-22 | 1992-02-25 | Raytheon Company | Saw device method |
US5283037A (en) * | 1988-09-29 | 1994-02-01 | Hewlett-Packard Company | Chemical sensor utilizing a surface transverse wave device |
US5171642A (en) * | 1989-04-17 | 1992-12-15 | International Business Machines Corporation | Multilayered intermetallic connection for semiconductor devices |
US5260913A (en) * | 1991-01-11 | 1993-11-09 | Murata Manufacturing Co., Ltd. | Surface wave device |
US5363073A (en) * | 1992-10-19 | 1994-11-08 | Motorola, Inc. | Saw resonator filter with a multistrip coupler disposed in the resonator gaps |
US5363074A (en) * | 1992-10-19 | 1994-11-08 | Motorola, Inc. | Saw structure having serially coupled transducers with overlapping fingers |
US5585770A (en) * | 1993-06-30 | 1996-12-17 | Motorola, Inc. | Three terminal surface acoustic wave (SAW) device |
JP3379049B2 (ja) * | 1993-10-27 | 2003-02-17 | 富士通株式会社 | 表面弾性波素子とその製造方法 |
JP3206285B2 (ja) * | 1994-03-25 | 2001-09-10 | 株式会社村田製作所 | 端面反射型表面波共振子 |
US5793147A (en) * | 1994-05-30 | 1998-08-11 | Murata Manufacturing Co., Ltd. | Surface wave resonator having single component including a plurality of resonant units |
JP3185591B2 (ja) * | 1995-03-03 | 2001-07-11 | 株式会社村田製作所 | Saw共振子 |
JPH0969751A (ja) * | 1995-08-30 | 1997-03-11 | Murata Mfg Co Ltd | 弾性表面波フィルタ |
EP0782255B1 (de) * | 1995-12-28 | 2002-03-27 | Murata Manufacturing Co., Ltd. | Akustisches Oberflächenwellenresonatorfilter mit longitudinaler Kopplung |
JP3226472B2 (ja) * | 1996-05-14 | 2001-11-05 | 富士通株式会社 | 弾性表面波多重モードフィルタ |
EP0921636B1 (de) * | 1996-05-23 | 2007-04-04 | Matsushita Electric Industrial Co., Ltd. | Akustisches Oberflächenwellenfilter und mehrstufiges akustisches Oberflächenwellenfilter |
US5793266A (en) * | 1996-08-12 | 1998-08-11 | Motorola Inc. | Differential input and/or differential output, transversely-coupled surface acoustic wave filter |
JP3233087B2 (ja) * | 1997-01-20 | 2001-11-26 | 株式会社村田製作所 | 弾性表面波フィルタ |
JP3339350B2 (ja) * | 1997-02-20 | 2002-10-28 | 株式会社村田製作所 | 弾性表面波装置 |
JPH10247835A (ja) | 1997-03-03 | 1998-09-14 | Kokusai Electric Co Ltd | ラブ波型弾性表面波デバイス |
JP3171144B2 (ja) * | 1997-07-07 | 2001-05-28 | 株式会社村田製作所 | 表面波装置 |
KR100713966B1 (ko) | 1997-07-28 | 2007-05-02 | 가부시끼가이샤 도시바 | 탄성표면파 장치 및 그의 제조방법 |
JPH1174751A (ja) * | 1997-08-28 | 1999-03-16 | Murata Mfg Co Ltd | 弾性表面波装置 |
JPH11234082A (ja) | 1998-02-13 | 1999-08-27 | Toko Inc | 表面弾性波装置 |
JP3206548B2 (ja) * | 1998-05-14 | 2001-09-10 | 株式会社村田製作所 | 表面波フィルタ、共用器、通信機装置 |
JP3317273B2 (ja) * | 1998-08-25 | 2002-08-26 | 株式会社村田製作所 | 表面波共振子、フィルタ、共用器、通信機装置 |
US6259185B1 (en) * | 1998-12-02 | 2001-07-10 | Cts Corporation | Metallization for high power handling in a surface acoustic wave device and method for providing same |
JP2000244275A (ja) * | 1999-02-19 | 2000-09-08 | Murata Mfg Co Ltd | Saw共振子フィルタ |
JP3587354B2 (ja) * | 1999-03-08 | 2004-11-10 | 株式会社村田製作所 | 横結合共振子型表面波フィルタ及び縦結合共振子型表面波フィルタ |
JP3341704B2 (ja) * | 1999-03-18 | 2002-11-05 | 株式会社村田製作所 | 端面反射型表面波装置の製造方法 |
JP3353742B2 (ja) * | 1999-05-07 | 2002-12-03 | 株式会社村田製作所 | 表面波共振子、表面波装置、通信機装置 |
JP3568025B2 (ja) * | 1999-05-14 | 2004-09-22 | 株式会社村田製作所 | 表面波装置及び通信機装置 |
JP3376969B2 (ja) * | 1999-09-02 | 2003-02-17 | 株式会社村田製作所 | 弾性表面波装置及びその製造方法 |
US6452305B1 (en) * | 2000-03-14 | 2002-09-17 | Motorola, Inc. | High power surface acoustic wave device |
JP3414371B2 (ja) * | 2000-07-31 | 2003-06-09 | 株式会社村田製作所 | 弾性表面波装置及びその製造方法 |
JP3918497B2 (ja) * | 2000-11-02 | 2007-05-23 | 株式会社村田製作所 | 端面反射型表面波装置 |
-
2000
- 2000-05-19 JP JP2000148850A patent/JP3402311B2/ja not_active Expired - Lifetime
-
2001
- 2001-05-03 US US09/847,989 patent/US6762533B2/en not_active Expired - Lifetime
- 2001-05-21 EP EP01401315A patent/EP1158669B8/de not_active Expired - Lifetime
- 2001-05-21 DE DE60130286T patent/DE60130286T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE60130286T2 (de) | 2007-12-20 |
EP1158669B8 (de) | 2007-10-10 |
EP1158669A3 (de) | 2003-12-10 |
JP3402311B2 (ja) | 2003-05-06 |
EP1158669B1 (de) | 2007-09-05 |
US20010052736A1 (en) | 2001-12-20 |
EP1158669A2 (de) | 2001-11-28 |
US6762533B2 (en) | 2004-07-13 |
JP2001332953A (ja) | 2001-11-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE60142721D1 (de) | Akustische Oberflächenwellenanordnung | |
DE60144236D1 (de) | Akustische oberflächenwellenanordnung | |
DK1250827T3 (da) | Transducer | |
DE69924225D1 (de) | Akustische Oberflächenwellenanordnung | |
DE69926672T2 (de) | Akustische Oberflächenwellenanordnung | |
DE60130298D1 (de) | Akustischer Resonator | |
EP1221769A4 (de) | Akustische oberflächenwellenanordnung | |
DE69905734T2 (de) | Oberflächenwellenanordnung | |
DE60115371D1 (de) | Akustisches Oberflächenwellenfilter | |
DE60128766D1 (de) | Elektroakustischer Wandler | |
DE60218552D1 (de) | Akustische Oberflächenwellenfilteranordnung | |
FR2819837B3 (fr) | Panneau acoustique | |
DE60117346D1 (de) | Elektroakustischer Wandler | |
DE59907127D1 (de) | Oberflächenwellensensor | |
DE60238373D1 (de) | Akustisches Oberflächenwellenfilter | |
DE69934765D1 (de) | Akustisches Oberflächenwellenfilter | |
DE10290650D2 (de) | Akustisches Oberflächenwellenbauelement | |
NO20014545D0 (no) | Overflate-akustisk bölgefilter | |
DE59913935D1 (de) | Akustisches oberflächenwellenfilter | |
DE10225189B4 (de) | Oberflächenwellenbauelement | |
GB0117038D0 (en) | Surface acoustic wave device | |
DE50101269D1 (de) | Ultraschallsensor | |
DE60130286D1 (de) | Akustische Oberflächenwellenanordnung | |
DE69920992D1 (de) | Akustische Oberflächenwellenanordnung | |
DE60144172D1 (de) | Transversalfilter mit akustischen Oberflächenwellen |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |