DE10231153B8 - Verfahren zur Messung einer Charakteristik eines kapazitiven Sensors, Vorrichtung zur Messung einer Sensorcharakteristik, kapazitiver Sensor und IC-Chip zur Messung einer Sensorcharakteristik - Google Patents

Verfahren zur Messung einer Charakteristik eines kapazitiven Sensors, Vorrichtung zur Messung einer Sensorcharakteristik, kapazitiver Sensor und IC-Chip zur Messung einer Sensorcharakteristik Download PDF

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Publication number
DE10231153B8
DE10231153B8 DE10231153A DE10231153A DE10231153B8 DE 10231153 B8 DE10231153 B8 DE 10231153B8 DE 10231153 A DE10231153 A DE 10231153A DE 10231153 A DE10231153 A DE 10231153A DE 10231153 B8 DE10231153 B8 DE 10231153B8
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DE
Germany
Prior art keywords
measuring
sensor
characteristic
capacitive sensor
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10231153A
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English (en)
Other versions
DE10231153A1 (de
DE10231153B4 (de
Inventor
Seiichiro Kariya Ishio
Yasutoshi Kariya Suzuki
Hajime Kariya Ito
Yasuaki Kariya Makino
Norikazu Ohta
Keiichi Shimaoka
Hirofumi Funabashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of DE10231153A1 publication Critical patent/DE10231153A1/de
Application granted granted Critical
Publication of DE10231153B4 publication Critical patent/DE10231153B4/de
Publication of DE10231153B8 publication Critical patent/DE10231153B8/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DE10231153A 2001-07-11 2002-07-10 Verfahren zur Messung einer Charakteristik eines kapazitiven Sensors, Vorrichtung zur Messung einer Sensorcharakteristik, kapazitiver Sensor und IC-Chip zur Messung einer Sensorcharakteristik Expired - Fee Related DE10231153B8 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-211098 2001-07-11
JP2001211098A JP4508480B2 (ja) 2001-07-11 2001-07-11 静電容量型センサのセンサ特性測定装置

Publications (3)

Publication Number Publication Date
DE10231153A1 DE10231153A1 (de) 2003-02-27
DE10231153B4 DE10231153B4 (de) 2009-07-23
DE10231153B8 true DE10231153B8 (de) 2009-11-12

Family

ID=19046470

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10231153A Expired - Fee Related DE10231153B8 (de) 2001-07-11 2002-07-10 Verfahren zur Messung einer Charakteristik eines kapazitiven Sensors, Vorrichtung zur Messung einer Sensorcharakteristik, kapazitiver Sensor und IC-Chip zur Messung einer Sensorcharakteristik

Country Status (3)

Country Link
US (1) US6809527B2 (de)
JP (1) JP4508480B2 (de)
DE (1) DE10231153B8 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100670018B1 (ko) 2005-01-14 2007-01-19 삼성전자주식회사 가변 정전용량 소자, 이것을 이용한 바이오물질 검출장치및 바이오물질 검출방법
DE102006009076A1 (de) 2006-02-28 2007-08-30 Robert Bosch Gmbh Verfahren und Vorrichtung zur Erkennung des freien Falls
JP4765708B2 (ja) * 2006-03-23 2011-09-07 株式会社デンソー 容量式物理量センサ
US7956621B2 (en) * 2008-06-11 2011-06-07 Analog Devices, Inc. Anti-capture method and apparatus for micromachined devices
JP5260342B2 (ja) * 2009-01-30 2013-08-14 ローム株式会社 Ｍｅｍｓセンサ
JP4797075B2 (ja) * 2009-02-12 2011-10-19 株式会社豊田中央研究所 静電容量式センサ装置
TWI420826B (zh) * 2010-04-09 2013-12-21 Memsor Corp 具有校正機制之電容式感測器及電容偵測方法
WO2011138985A1 (ko) 2010-05-06 2011-11-10 서울대학교산학협력단 용량 소자 센서 및 그 제조 방법
JP2012037439A (ja) * 2010-08-10 2012-02-23 Asahi Kasei Electronics Co Ltd 静電容量検出回路
JP2012093113A (ja) * 2010-10-25 2012-05-17 Panasonic Corp 静電容量式加速度センサ
US20150059430A1 (en) * 2012-04-20 2015-03-05 Panasonic Intellectual Property Management Co., Ltd. Inertial force sensor
EP2799891A1 (de) * 2013-05-03 2014-11-05 Sensirion AG Sensorschaltungsanordnung
JP6089986B2 (ja) * 2013-06-12 2017-03-08 株式会社デンソー センサ装置
JP6228865B2 (ja) * 2014-03-06 2017-11-08 アルプス電気株式会社 センサ装置の検査方法及びそのセンサ装置
US20220390406A1 (en) * 2019-11-08 2022-12-08 Hitachi Astemo, Ltd. Humidity sensor diagnosis device
US11722137B1 (en) * 2020-10-02 2023-08-08 Meta Platforms Technologies, Llc Variable-distance proximity detector
US11620946B1 (en) * 2022-03-03 2023-04-04 Apple Inc. Dual-mode sense circuit with enhanced dynamic range and accuracy

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5751154A (en) * 1996-03-19 1998-05-12 Mitsubishi Denki Kabushiki Kaisha capacitive sensor interface circuit

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730908A (en) 1980-08-04 1982-02-19 Yokogawa Hokushin Electric Corp Capacity type displacement conversion device
DE69124377T2 (de) * 1991-03-30 1997-06-12 Kazuhiro Okada Beschleunigungssensor mit Selbsttest
JP3162149B2 (ja) 1992-02-12 2001-04-25 株式会社日立製作所 静電容量式センサ
JPH06160429A (ja) 1992-11-16 1994-06-07 Omron Corp 半導体加速度センサの自己診断方法並びに装置及びそれに用いられる半導体加速度センサ
TW418323B (en) * 1998-02-19 2001-01-11 Sumitomo Metal Ind Capacitance detection system and method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5751154A (en) * 1996-03-19 1998-05-12 Mitsubishi Denki Kabushiki Kaisha capacitive sensor interface circuit

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
IEEE TRANSACTIONS ON INSTRUMENTATION AN MEASUREMENT, No. 4, DECEMBER 1987, S. 879-882 *
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, No. 4, DECEMBER 1986, S. 72 *
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, No. 4, DECEMBER 1987, S. 873-878 *
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, No.1, March 1988, S. 18-24 *
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, Vol. 38, No. 3. 3, JUNE 1989, S. 736-739 *
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, Vol. 38, No. 3. 3, JUNE 1989, S. 736-739 IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, No.1, March 1988, S. 18-24 IEEE TRANSACTIONS ON INSTRUMENTATION AN MEASUREMENT, No. 4, DECEMBER 1987, S. 879-882 IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, No. 4, DECEMBER 1987, S. 873-878 IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, No. 4, DECEMBER 1986, S. 72 IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, Vol. IM-33, NO. 4, DECEMBER 1984, S. 247-251
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, Vol. IM-33, NO. 4, DECEMBER 1984, S. 247-251 *

Also Published As

Publication number Publication date
US6809527B2 (en) 2004-10-26
DE10231153A1 (de) 2003-02-27
JP2003028825A (ja) 2003-01-29
DE10231153B4 (de) 2009-07-23
JP4508480B2 (ja) 2010-07-21
US20030011384A1 (en) 2003-01-16

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Legal Events

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8110 Request for examination paragraph 44
8396 Reprint of erroneous front page
8364 No opposition during term of opposition
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee