DE102013209438A1 - Schnüffellecksucher mit nanoporöser Membrane - Google Patents
Schnüffellecksucher mit nanoporöser Membrane Download PDFInfo
- Publication number
- DE102013209438A1 DE102013209438A1 DE102013209438.8A DE102013209438A DE102013209438A1 DE 102013209438 A1 DE102013209438 A1 DE 102013209438A1 DE 102013209438 A DE102013209438 A DE 102013209438A DE 102013209438 A1 DE102013209438 A1 DE 102013209438A1
- Authority
- DE
- Germany
- Prior art keywords
- gas
- leak detector
- sniffer
- membrane
- pores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 34
- 239000011148 porous material Substances 0.000 claims abstract description 39
- 239000000523 sample Substances 0.000 claims abstract description 12
- 238000004949 mass spectrometry Methods 0.000 claims abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 9
- 239000007789 gas Substances 0.000 description 51
- 239000003570 air Substances 0.000 description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
- 239000001257 hydrogen Substances 0.000 description 7
- 229910052739 hydrogen Inorganic materials 0.000 description 7
- 238000004868 gas analysis Methods 0.000 description 6
- 239000001307 helium Substances 0.000 description 5
- 229910052734 helium Inorganic materials 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229920002521 macromolecule Polymers 0.000 description 2
- 239000012080 ambient air Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000108 ultra-filtration Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013209438.8A DE102013209438A1 (de) | 2013-05-22 | 2013-05-22 | Schnüffellecksucher mit nanoporöser Membrane |
| US14/892,397 US20160091386A1 (en) | 2013-05-22 | 2014-05-14 | Sniffing Leak Detector Having a Nanoporous Membrane |
| JP2016514331A JP2016520196A (ja) | 2013-05-22 | 2014-05-14 | ナノ多孔質膜を有する嗅気型漏洩検出器 |
| PCT/EP2014/059845 WO2014187709A1 (de) | 2013-05-22 | 2014-05-14 | Schnüffellecksucher mit nanoporöser membrane |
| CN201480029105.8A CN105229439A (zh) | 2013-05-22 | 2014-05-14 | 具有纳米多孔薄膜的嗅觉泄漏检测器 |
| EP14725411.4A EP2999950B1 (de) | 2013-05-22 | 2014-05-14 | Schnüffellecksucher mit nanoporöser membrane |
| JP2018175427A JP6725614B2 (ja) | 2013-05-22 | 2018-09-19 | ナノ多孔質膜を有する嗅気型漏洩検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013209438.8A DE102013209438A1 (de) | 2013-05-22 | 2013-05-22 | Schnüffellecksucher mit nanoporöser Membrane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102013209438A1 true DE102013209438A1 (de) | 2014-11-27 |
Family
ID=50771259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102013209438.8A Withdrawn DE102013209438A1 (de) | 2013-05-22 | 2013-05-22 | Schnüffellecksucher mit nanoporöser Membrane |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20160091386A1 (https=) |
| EP (1) | EP2999950B1 (https=) |
| JP (2) | JP2016520196A (https=) |
| CN (1) | CN105229439A (https=) |
| DE (1) | DE102013209438A1 (https=) |
| WO (1) | WO2014187709A1 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102017007149A1 (de) * | 2017-07-27 | 2019-01-31 | DILO Armaturen und Anlagenbau GmbH | Verfahren zur Lokalisierung von Leckstellen |
| CN118565732A (zh) * | 2024-07-30 | 2024-08-30 | 安徽诺益科技有限公司 | 一种质谱检漏仪用嗅探器 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3034192B1 (fr) * | 2015-03-23 | 2017-04-07 | Pfeiffer Vacuum Sas | Detecteur de fuites et procede de detection de fuites |
| US10101238B2 (en) * | 2016-05-16 | 2018-10-16 | General Electric Company | Integrated ventilation and leak detection system and method of assembly |
| CN107449642A (zh) * | 2017-08-28 | 2017-12-08 | 广西电网有限责任公司电力科学研究院 | 六氟化硫气体泄漏带电检测采样装置及采样方法 |
| DE102018201313A1 (de) * | 2018-01-29 | 2019-08-01 | Inficon Gmbh | Verfahren zur Leckprüfung mit einer Folienkammer mit belüftetem Messvolumen |
| CN113984292B (zh) * | 2021-09-30 | 2024-02-09 | 北京航天试验技术研究所 | 一种液氢阀外漏检测装置及方法 |
| US12117369B2 (en) | 2022-06-17 | 2024-10-15 | Packaging Technologies & Inspection, LLC | System and method for leak testing a sealed package |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4326267A1 (de) * | 1993-08-05 | 1995-02-09 | Leybold Ag | Lecksuchgerät |
| US20020014298A1 (en) * | 2000-03-03 | 2002-02-07 | Shigekazu Mase | Porous ceramic laminate and production thereof |
| DE102004050762A1 (de) * | 2004-10-16 | 2006-04-20 | Inficon Gmbh | Verfahren zur Lecksuche |
| US20080202210A1 (en) * | 2007-02-28 | 2008-08-28 | Varian, Inc. | Test gas leak detection using a composite membrane |
| DE102006045282B4 (de) * | 2006-09-22 | 2008-10-02 | Gkss-Forschungszentrum Geesthacht Gmbh | Isoporöse Membran und Verfahren zu ihrer Herstellung |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0816634B2 (ja) * | 1991-05-16 | 1996-02-21 | 日本真空技術株式会社 | ガス洩れ検査装置 |
| US5317900A (en) * | 1992-10-02 | 1994-06-07 | The Lyle E. & Barbara L. Bergquist Trust | Ultrasensitive helium leak detector for large systems |
| JP2612999B2 (ja) * | 1992-10-26 | 1997-05-21 | 日本電信電話株式会社 | 質量分析型ガス漏れ検知器 |
| JPH09142964A (ja) * | 1995-11-28 | 1997-06-03 | Kyocera Corp | アルミナ多孔質膜の製造方法 |
| JP3116830B2 (ja) * | 1996-07-31 | 2000-12-11 | 株式会社島津製作所 | ヘリウムリークディテクタ |
| JP3675983B2 (ja) * | 1996-09-12 | 2005-07-27 | 株式会社アルバック | ヘリウムリークディテクター |
| CN100462706C (zh) * | 2005-01-06 | 2009-02-18 | 清华大学 | 标准漏孔 |
| DE102005021909A1 (de) * | 2005-05-12 | 2006-11-16 | Inficon Gmbh | Schnüffellecksucher mit Quarzfenstersensor |
| US7497110B2 (en) * | 2007-02-28 | 2009-03-03 | Varian, Inc. | Methods and apparatus for test gas leak detection |
| DE102008008262A1 (de) * | 2008-02-08 | 2009-08-13 | Inficon Gmbh | Schnüffellecksucher nach dem Referenzmessprinzip |
| IT1400850B1 (it) * | 2009-07-08 | 2013-07-02 | Varian Spa | Apparecchiatura di analisi gc-ms. |
| US20110290006A1 (en) * | 2010-05-28 | 2011-12-01 | Charles Perkins | Leak test probe for use in industrial facilities |
| JP5621965B2 (ja) * | 2010-06-08 | 2014-11-12 | 川研ファインケミカル株式会社 | アルミナ複合分離膜及びその製造方法 |
-
2013
- 2013-05-22 DE DE102013209438.8A patent/DE102013209438A1/de not_active Withdrawn
-
2014
- 2014-05-14 CN CN201480029105.8A patent/CN105229439A/zh active Pending
- 2014-05-14 JP JP2016514331A patent/JP2016520196A/ja active Pending
- 2014-05-14 US US14/892,397 patent/US20160091386A1/en not_active Abandoned
- 2014-05-14 EP EP14725411.4A patent/EP2999950B1/de active Active
- 2014-05-14 WO PCT/EP2014/059845 patent/WO2014187709A1/de not_active Ceased
-
2018
- 2018-09-19 JP JP2018175427A patent/JP6725614B2/ja active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4326267A1 (de) * | 1993-08-05 | 1995-02-09 | Leybold Ag | Lecksuchgerät |
| US20020014298A1 (en) * | 2000-03-03 | 2002-02-07 | Shigekazu Mase | Porous ceramic laminate and production thereof |
| DE102004050762A1 (de) * | 2004-10-16 | 2006-04-20 | Inficon Gmbh | Verfahren zur Lecksuche |
| DE102006045282B4 (de) * | 2006-09-22 | 2008-10-02 | Gkss-Forschungszentrum Geesthacht Gmbh | Isoporöse Membran und Verfahren zu ihrer Herstellung |
| US20080202210A1 (en) * | 2007-02-28 | 2008-08-28 | Varian, Inc. | Test gas leak detection using a composite membrane |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102017007149A1 (de) * | 2017-07-27 | 2019-01-31 | DILO Armaturen und Anlagenbau GmbH | Verfahren zur Lokalisierung von Leckstellen |
| CN118565732A (zh) * | 2024-07-30 | 2024-08-30 | 安徽诺益科技有限公司 | 一种质谱检漏仪用嗅探器 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2999950A1 (de) | 2016-03-30 |
| JP2019053062A (ja) | 2019-04-04 |
| US20160091386A1 (en) | 2016-03-31 |
| EP2999950B1 (de) | 2019-12-11 |
| CN105229439A (zh) | 2016-01-06 |
| WO2014187709A1 (de) | 2014-11-27 |
| JP6725614B2 (ja) | 2020-07-22 |
| JP2016520196A (ja) | 2016-07-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R163 | Identified publications notified | ||
| R012 | Request for examination validly filed | ||
| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |