DE102013102670A1 - Optisches Element und optisches System für die EUV-Lithographie sowie Verfahren zur Behandlung eines solchen optischen Elements - Google Patents

Optisches Element und optisches System für die EUV-Lithographie sowie Verfahren zur Behandlung eines solchen optischen Elements Download PDF

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Publication number
DE102013102670A1
DE102013102670A1 DE201310102670 DE102013102670A DE102013102670A1 DE 102013102670 A1 DE102013102670 A1 DE 102013102670A1 DE 201310102670 DE201310102670 DE 201310102670 DE 102013102670 A DE102013102670 A DE 102013102670A DE 102013102670 A1 DE102013102670 A1 DE 102013102670A1
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DE
Germany
Prior art keywords
layer
hydrogen
optical element
element according
layer system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE201310102670
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German (de)
English (en)
Inventor
Hermanus Bekman
Dirk Ehm
Jeroen Huijbregste
Arnoldus Jan Storm
Tina Graber
Irene Ament
Dries SMEETS
Edwin Te Sligte
Alexey Kuznetsov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
ASML Netherlands BV
Original Assignee
Carl Zeiss SMT GmbH
ASML Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, ASML Netherlands BV filed Critical Carl Zeiss SMT GmbH
Priority to DE201310102670 priority Critical patent/DE102013102670A1/de
Priority to PCT/EP2014/050471 priority patent/WO2014139694A1/en
Priority to KR1020157028007A priority patent/KR102175814B1/ko
Priority to JP2015561983A priority patent/JP6382856B2/ja
Priority to CN201480016112.4A priority patent/CN105074576B/zh
Publication of DE102013102670A1 publication Critical patent/DE102013102670A1/de
Priority to US14/854,784 priority patent/US10690812B2/en
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0891—Ultraviolet [UV] mirrors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062—Devices having a multilayer structure

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE201310102670 2013-03-15 2013-03-15 Optisches Element und optisches System für die EUV-Lithographie sowie Verfahren zur Behandlung eines solchen optischen Elements Ceased DE102013102670A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE201310102670 DE102013102670A1 (de) 2013-03-15 2013-03-15 Optisches Element und optisches System für die EUV-Lithographie sowie Verfahren zur Behandlung eines solchen optischen Elements
PCT/EP2014/050471 WO2014139694A1 (en) 2013-03-15 2014-01-13 Optical element and optical system for euv lithography, and method for treating such an optical element
KR1020157028007A KR102175814B1 (ko) 2013-03-15 2014-01-13 Euv 리소그래피용 광학 요소 및 광학 시스템과, 이런 광학 요소를 처리하는 방법
JP2015561983A JP6382856B2 (ja) 2013-03-15 2014-01-13 Ｅｕｖリソグラフィー用の光学素子及び光学系、及びこの光学系を処理する方法
CN201480016112.4A CN105074576B (zh) 2013-03-15 2014-01-13 极紫外光刻的光学元件和光学系统及处理这种光学元件的方法
US14/854,784 US10690812B2 (en) 2013-03-15 2015-09-15 Optical element and optical system for EUV lithography, and method for treating such an optical element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201310102670 DE102013102670A1 (de) 2013-03-15 2013-03-15 Optisches Element und optisches System für die EUV-Lithographie sowie Verfahren zur Behandlung eines solchen optischen Elements

Publications (1)

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DE102013102670A1 true DE102013102670A1 (de) 2014-10-02

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DE201310102670 Ceased DE102013102670A1 (de) 2013-03-15 2013-03-15 Optisches Element und optisches System für die EUV-Lithographie sowie Verfahren zur Behandlung eines solchen optischen Elements

Country Status (6)

Country Link
US (1) US10690812B2 (https=)
JP (1) JP6382856B2 (https=)
KR (1) KR102175814B1 (https=)
CN (1) CN105074576B (https=)
DE (1) DE102013102670A1 (https=)
WO (1) WO2014139694A1 (https=)

Cited By (9)

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DE102016213839A1 (de) 2016-07-27 2016-12-15 Carl Zeiss Smt Gmbh Spiegel für ein mikrolithographisches Projektionsbelichtungssystem und Verfahren zur Bearbeitung eines Spiegels
DE102016223206A1 (de) 2016-11-23 2017-01-12 Carl Zeiss Smt Gmbh Verfahren zur aufarbeitung reflektiver optischer elemente für ultraviolette strahlung oder weiche röntgenstrahlung
WO2017102256A1 (de) * 2015-12-16 2017-06-22 Carl Zeiss Smt Gmbh Reflektives optisches element
WO2018019645A1 (de) * 2016-07-27 2018-02-01 Carl Zeiss Smt Gmbh Reflektives optisches element für die euv-lithographie
DE102016226202A1 (de) 2016-12-23 2018-06-28 Carl Zeiss Smt Gmbh Optisches Element, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage
DE102017200667A1 (de) 2017-01-17 2018-07-19 Carl Zeiss Smt Gmbh Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage oder ein Inspektionssystem
US10684553B2 (en) 2017-04-11 2020-06-16 Carl Zeiss Smt Gmbh Wavefront correction element for use in an optical system
DE102019212910A1 (de) * 2019-08-28 2021-03-04 Carl Zeiss Smt Gmbh Optisches Element und EUV-Lithographiesystem
DE102024111387A1 (de) 2023-05-30 2024-12-05 Carl Zeiss Smt Gmbh EUV-Lithographiesystem und Verfahren zum Herstellen eines optischen Elements und/oder eines nicht-optischen Bauteils

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DE102013222330A1 (de) 2013-11-04 2015-05-07 Carl Zeiss Smt Gmbh Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage
JP6869242B2 (ja) * 2015-11-19 2021-05-12 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置のためのｅｕｖソースチャンバーおよびガス流れ様式、多層ミラー、およびリソグラフィ装置
US10128016B2 (en) * 2016-01-12 2018-11-13 Asml Netherlands B.V. EUV element having barrier to hydrogen transport
DE102016208850A1 (de) * 2016-05-23 2017-12-07 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Halbleiterlithographie mit Elementen zur Plasmakonditionierung
KR102707462B1 (ko) * 2016-09-06 2024-09-23 삼성전자주식회사 포토마스크
DE102016224200A1 (de) 2016-12-06 2018-06-07 Carl Zeiss Smt Gmbh Verfahren zum Reparieren von reflektiven optischen Elementen für die EUV-Lithographie
DE102017213176A1 (de) 2017-07-31 2017-09-21 Carl Zeiss Smt Gmbh Optisches Element für die EUV-Lithographie und EUV-Lithographiesystem damit
DE102017213181A1 (de) * 2017-07-31 2019-01-31 Carl Zeiss Smt Gmbh Optische Anordnung für EUV-Strahlung mit einer Abschirmung zum Schutz vor der Ätzwirkung eines Plasmas
KR102402767B1 (ko) * 2017-12-21 2022-05-26 삼성전자주식회사 극자외선 마스크 블랭크, 극자외선 마스크 블랭크를 이용하여 제조된 포토마스크, 포토마스크를 이용한 리소그래피 장치 및 포토마스크를 이용한 반도체 장치 제조 방법
DE102018211980A1 (de) * 2018-07-18 2019-09-05 Carl Zeiss Smt Gmbh Reflektives optisches Element
DE102018221190A1 (de) * 2018-12-07 2020-06-10 Carl Zeiss Smt Gmbh Verfahren zum Bilden von Nanostrukturen an einer Oberfläche und Wafer-Inspektionssystem
KR20220022474A (ko) 2019-06-20 2022-02-25 호야 가부시키가이샤 반사형 마스크 블랭크, 반사형 마스크, 그리고 반사형 마스크 및 반도체 장치의 제조 방법
DE102019213349A1 (de) 2019-09-03 2021-03-04 Carl Zeiss Smt Gmbh Spiegelanordnung mit Wasserstoff-Barriere und optische Anordnung
JP7587378B2 (ja) * 2019-09-30 2024-11-20 Hoya株式会社 多層反射膜付き基板、反射型マスクブランク、反射型マスク及びその製造方法、並びに半導体装置の製造方法
DE102020206117A1 (de) 2020-05-14 2021-11-18 Carl Zeiss Smt Gmbh Optisches Element, EUV-Lithographiesystem und Verfahren zum Bilden von Nanopartikeln
US12510692B2 (en) 2020-08-27 2025-12-30 Kla Corporation Protection of optical materials of optical components from radiation degradation
US11402743B2 (en) * 2020-08-31 2022-08-02 Taiwan Semiconductor Manufacturing Co., Ltd. Mask defect prevention
KR20220123918A (ko) * 2021-03-02 2022-09-13 에스케이하이닉스 주식회사 극자외선 마스크 및 극자외선 마스크를 이용하여 제조된 포토마스크
DE102022202059A1 (de) * 2022-03-01 2023-09-07 Carl Zeiss Smt Gmbh Verfahren zum Bearbeiten eines Werkstücks

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Cited By (15)

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US10338476B2 (en) 2015-12-16 2019-07-02 Carl Zeiss Smt Gmbh Reflective optical element
WO2017102256A1 (de) * 2015-12-16 2017-06-22 Carl Zeiss Smt Gmbh Reflektives optisches element
WO2018019645A1 (de) * 2016-07-27 2018-02-01 Carl Zeiss Smt Gmbh Reflektives optisches element für die euv-lithographie
US10649340B2 (en) 2016-07-27 2020-05-12 Carl Zeiss Smt Gmbh Reflective optical element for EUV lithography
DE102016213839A1 (de) 2016-07-27 2016-12-15 Carl Zeiss Smt Gmbh Spiegel für ein mikrolithographisches Projektionsbelichtungssystem und Verfahren zur Bearbeitung eines Spiegels
DE102016223206A1 (de) 2016-11-23 2017-01-12 Carl Zeiss Smt Gmbh Verfahren zur aufarbeitung reflektiver optischer elemente für ultraviolette strahlung oder weiche röntgenstrahlung
US10578974B2 (en) 2016-12-23 2020-03-03 Carl Zeiss Smt Gmbh Optical element, in particular for a microlithographic projection exposure apparatus
WO2018114159A1 (en) 2016-12-23 2018-06-28 Carl Zeiss Smt Gmbh Optical element, in particular for a microlithographic projection exposure apparatus
DE102016226202A1 (de) 2016-12-23 2018-06-28 Carl Zeiss Smt Gmbh Optisches Element, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage
WO2018134077A1 (de) 2017-01-17 2018-07-26 Carl Zeiss Smt Gmbh Spiegel, insbesondere für eine mikrolithographische projektionsbelichtungsanlage oder ein inspektionssystem
DE102017200667A1 (de) 2017-01-17 2018-07-19 Carl Zeiss Smt Gmbh Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage oder ein Inspektionssystem
US11086055B2 (en) 2017-01-17 2021-08-10 Carl Zeiss Smt Gmbh Mirror, in particular for a microlithographic projection exposure apparatus or an inspection system
US10684553B2 (en) 2017-04-11 2020-06-16 Carl Zeiss Smt Gmbh Wavefront correction element for use in an optical system
DE102019212910A1 (de) * 2019-08-28 2021-03-04 Carl Zeiss Smt Gmbh Optisches Element und EUV-Lithographiesystem
DE102024111387A1 (de) 2023-05-30 2024-12-05 Carl Zeiss Smt Gmbh EUV-Lithographiesystem und Verfahren zum Herstellen eines optischen Elements und/oder eines nicht-optischen Bauteils

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