DE102013013718A8 - Maßstabseinrichtung, Positionsinformationserzeugungsverfahren und multiaxiale Bühneneinrichtung - Google Patents

Maßstabseinrichtung, Positionsinformationserzeugungsverfahren und multiaxiale Bühneneinrichtung Download PDF

Info

Publication number
DE102013013718A8
DE102013013718A8 DE102013013718.7A DE102013013718A DE102013013718A8 DE 102013013718 A8 DE102013013718 A8 DE 102013013718A8 DE 102013013718 A DE102013013718 A DE 102013013718A DE 102013013718 A8 DE102013013718 A8 DE 102013013718A8
Authority
DE
Germany
Prior art keywords
position information
information generation
generation method
scale
multiaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102013013718.7A
Other languages
English (en)
Other versions
DE102013013718A1 (de
Inventor
Kayoko Taniguchi
Shigeaki Maruyama
Masaaki Kusumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DMG Mori Seiki Co Ltd
Original Assignee
DMG Mori Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DMG Mori Seiki Co Ltd filed Critical DMG Mori Seiki Co Ltd
Publication of DE102013013718A1 publication Critical patent/DE102013013718A1/de
Publication of DE102013013718A8 publication Critical patent/DE102013013718A8/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454—Encoders incorporating incremental and absolute signals
    • G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE102013013718.7A 2012-08-20 2013-08-20 Maßstabseinrichtung, Positionsinformationserzeugungsverfahren und multiaxiale Bühneneinrichtung Pending DE102013013718A1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2012181877 2012-08-20
JP2012-181877 2012-08-20
JP2013169963A JP6479309B2 (ja) 2012-08-20 2013-08-19 スケール装置、位置情報生成方法及び多軸ステージ装置
JP2013-169963 2013-08-19

Publications (2)

Publication Number Publication Date
DE102013013718A1 DE102013013718A1 (de) 2014-02-27
DE102013013718A8 true DE102013013718A8 (de) 2014-05-08

Family

ID=50069671

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102013013718.7A Pending DE102013013718A1 (de) 2012-08-20 2013-08-20 Maßstabseinrichtung, Positionsinformationserzeugungsverfahren und multiaxiale Bühneneinrichtung

Country Status (3)

Country Link
US (1) US9970788B2 (de)
JP (1) JP6479309B2 (de)
DE (1) DE102013013718A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110125724A (zh) * 2018-12-20 2019-08-16 珠海格力电器股份有限公司 一种轴心轨迹测试及圆度误差分离测量的系统

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9886029B2 (en) * 2013-12-02 2018-02-06 Daihen Corporation Workpiece processing apparatus and workpiece transfer system
US9733317B2 (en) * 2014-03-10 2017-08-15 Dmg Mori Seiki Co., Ltd. Position detecting device
JP6285395B2 (ja) * 2015-07-13 2018-02-28 株式会社東芝 液量計測装置、インク供給装置及びインクジェット装置
JP7071790B2 (ja) * 2017-11-10 2022-05-19 株式会社ミツトヨ 変位測定装置
WO2019167440A1 (ja) * 2018-02-28 2019-09-06 株式会社デンソー リニアポジションセンサ
CN109142388B (zh) * 2018-08-01 2021-04-13 京东方科技集团股份有限公司 基板检测器、驱动装置以及基板清洁设备
DE102019210023A1 (de) 2019-07-08 2021-01-14 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
ES2958938T3 (es) 2020-08-27 2024-02-16 Heidenhain Gmbh Dr Johannes Equipo de medición de posición
WO2023054613A1 (ja) * 2021-09-30 2023-04-06 株式会社ミツトヨ 多自由度変位計測装置及び多自由度変位計測方法
CN115143887B (zh) * 2022-09-05 2022-11-15 常州市建筑科学研究院集团股份有限公司 视觉监测设备测量结果的修正方法及视觉监测系统

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5467453A (en) * 1977-11-09 1979-05-30 Nippon Chemical Ind Linear encoder with error correcting mechanism
DE3150977A1 (de) * 1981-12-23 1983-06-30 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und einrichtung zur ermittlung und korrektur von fuehrungsfehlern
US4772835A (en) * 1987-06-04 1988-09-20 Kulicke And Soffa Industries Inc. Interactive multiaxis encoder positioning system
JP2754422B2 (ja) * 1990-07-18 1998-05-20 株式会社ニコン アブソリュート・エンコーダ
JPH05248887A (ja) * 1992-03-04 1993-09-28 Sony Magnescale Inc 位置検出装置
JP3230789B2 (ja) * 1994-07-29 2001-11-19 オークマ株式会社 光学式位置検出装置
DE10018298B4 (de) * 2000-04-13 2012-04-05 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zur Schwingungsdetektion bei einer Positionsmeßeinrichtung
JP2003139830A (ja) * 2001-10-31 2003-05-14 Sony Precision Technology Inc 検出器、位置検出装置
ES2674568T3 (es) * 2002-09-13 2018-07-02 Irobot Corporation Sistema de control de navegación para un dispositivo robótico
DE10301848B4 (de) * 2003-01-09 2014-10-09 Anton Rodi Messeinrichtung zur Erfassung von Größen, insbesondere von Winkeln oder Wegstrecken
US6949733B2 (en) * 2003-03-10 2005-09-27 Asm Technology Singapore Pte Ltd Determination of a movable gantry position including a dual measurement module
DE10313036B3 (de) * 2003-03-24 2004-08-19 Klingelnberg Gmbh Vorrichtung zum Erfassen der räumlichen Lage eines in einer Koordinatenachse verfahrbaren Schlittens
US7141965B2 (en) * 2003-11-26 2006-11-28 International Business Machines Corporation Magnetic encoder system
US7512452B2 (en) * 2005-06-13 2009-03-31 Mauro George E Positioning system for eliminating lost motion effect
US7839485B2 (en) * 2006-01-19 2010-11-23 Nikon Corporation Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
JP4924884B2 (ja) * 2006-05-19 2012-04-25 株式会社ニコン エンコーダ
JP2008039155A (ja) * 2006-08-10 2008-02-21 Nsk Ltd 状態量測定装置付転がり軸受ユニットとその組立方法
KR101862528B1 (ko) * 2006-08-31 2018-05-29 가부시키가이샤 니콘 이동체 구동 시스템 및 이동체 구동 방법, 패턴 형성 장치 및 방법, 노광 장치 및 방법, 디바이스 제조 방법, 그리고 결정 방법
JP5046850B2 (ja) * 2007-10-22 2012-10-10 株式会社森精機製作所 位置検出装置、及び、バイアス磁界発生装置
DE102008010284A1 (de) * 2008-02-21 2009-08-27 Dr. Johannes Heidenhain Gmbh XY-Tisch mit einer Messanordnung zur Positionsbestimmung
DE102008055680A1 (de) * 2008-10-28 2010-04-29 Balluff Gmbh Positons-/Wegmesssystem mit kodiertem Maßkörper
US8907513B2 (en) * 2008-11-14 2014-12-09 Miles HOBDY Wave energy converter
DE102009016663A1 (de) * 2009-03-31 2010-10-07 Balluff Gmbh Positions-/Wegmesssystem
EP2270425A1 (de) * 2009-07-03 2011-01-05 Leica Geosystems AG Koordinatenmessmaschine und Verfahren zum Kompensieren von Fehlern in einer Koordinatenmessmaschine
JP2011054694A (ja) * 2009-08-31 2011-03-17 Canon Inc 計測装置、露光装置およびデバイス製造方法
JP5870554B2 (ja) * 2010-08-31 2016-03-01 日立金属株式会社 エンコーダ
JP2012089769A (ja) * 2010-10-22 2012-05-10 Nikon Corp 露光装置及びデバイス製造方法
JP5660671B2 (ja) * 2011-01-07 2015-01-28 ハイデンハイン株式会社 エンコーダの信号処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110125724A (zh) * 2018-12-20 2019-08-16 珠海格力电器股份有限公司 一种轴心轨迹测试及圆度误差分离测量的系统

Also Published As

Publication number Publication date
JP2014059297A (ja) 2014-04-03
DE102013013718A1 (de) 2014-02-27
JP6479309B2 (ja) 2019-03-06
US9970788B2 (en) 2018-05-15
US20140049252A1 (en) 2014-02-20

Similar Documents

Publication Publication Date Title
DE102013013718A8 (de) Maßstabseinrichtung, Positionsinformationserzeugungsverfahren und multiaxiale Bühneneinrichtung
BR112014030593A2 (pt) dispositivo de processamento de informação, método de processamento de informação, e, programa
DE112012006721T8 (de) Informationsanzeigevorrichtung, Anzeigeumschaltverfahren und Anzeigeumschaltprogramm
DK3363806T3 (da) Glycokonjugationsfremgangsmåde
DK2850202T3 (da) Fremgangsmåder og grupper
DK2776833T3 (da) Cobinder-understøttet testfremgangsmåde
DK3273450T3 (da) Magnetapparat
BR112013033167A2 (pt) método, e, aparelho
DK3187586T3 (da) Inducerbar co-ekspressionssystem
BR112015007125A2 (pt) aparelho e método
BR112014030579A2 (pt) dispositivo e método de processamento de informação, e, programa
EP3024266A4 (de) Messverfahren und -vorrichtung, informationsaustauschverfahren und -vorrichtung sowie haushaltsverfahren und -vorrichtung
DE102012104039A8 (de) Hubtoranordnung sowie Torsturz-Abdichteinrichtung hierfür
DK2875460T3 (da) Anti-kloning-system og -fremgangsmåde
BR112015009583A2 (pt) instalação de distribuição de gás.
BR112015013892A2 (pt) simulador.
EP2840389A4 (de) Vorrichtung zur messung biologischer informationen und verfahren zur messung biologischer informationen damit
BR112014011908A2 (pt) dispositivo e método de processamento de informação
HK1183536A1 (zh) 發布信息的檢查方法和裝置
BR112014017038A2 (pt) método, e aparato
BR112014012552A2 (pt) aparelho, e método
BR112014011709A2 (pt) método, e aparelho
BR112014006670A2 (pt) aparelho, e método
BR112014014582A8 (pt) dispositivo, método e programa de compartilhamento de informação, e, dispositivo terminal
BR112014025875A2 (pt) Método de medição

Legal Events

Date Code Title Description
R082 Change of representative

Representative=s name: MUELLER - HOFFMANN & PARTNER PATENTANWAELTE, DE

R081 Change of applicant/patentee

Owner name: DMG MORI SEIKI CO., LTD., JP

Free format text: FORMER OWNER: MORI SEIKI CO., LTD., YAMATOKORLYAMA-SHI, JP

Effective date: 20140218

Owner name: DMG MORI SEIKI CO., LTD., YAMATOKORIYAMA-SHI, JP

Free format text: FORMER OWNER: MORI SEIKI CO., LTD., YAMATOKORLYAMA-SHI, NARA-KEN, JP

Effective date: 20140218

R082 Change of representative

Representative=s name: MUELLER - HOFFMANN & PARTNER PATENTANWAELTE, DE

Effective date: 20140218

Representative=s name: MUELLER HOFFMANN & PARTNER PATENTANWAELTE MBB, DE

Effective date: 20140218

R012 Request for examination validly filed