DE102010031197A1 - Piezoresistiver Drucksensor - Google Patents

Piezoresistiver Drucksensor Download PDF

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Publication number
DE102010031197A1
DE102010031197A1 DE201010031197 DE102010031197A DE102010031197A1 DE 102010031197 A1 DE102010031197 A1 DE 102010031197A1 DE 201010031197 DE201010031197 DE 201010031197 DE 102010031197 A DE102010031197 A DE 102010031197A DE 102010031197 A1 DE102010031197 A1 DE 102010031197A1
Authority
DE
Germany
Prior art keywords
membrane
silicon
pressure sensor
silicon carbide
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE201010031197
Other languages
German (de)
English (en)
Inventor
Tino Fuchs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE201010031197 priority Critical patent/DE102010031197A1/de
Priority to ITMI20111240 priority patent/ITMI20111240A1/it
Priority to FR1156148A priority patent/FR2962540A1/fr
Priority to CN201110190682.3A priority patent/CN102374918B/zh
Publication of DE102010031197A1 publication Critical patent/DE102010031197A1/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0681—Protection against excessive heat

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
DE201010031197 2010-07-09 2010-07-09 Piezoresistiver Drucksensor Withdrawn DE102010031197A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE201010031197 DE102010031197A1 (de) 2010-07-09 2010-07-09 Piezoresistiver Drucksensor
ITMI20111240 ITMI20111240A1 (it) 2010-07-09 2011-07-04 Sensore di pressione piezoresistivo
FR1156148A FR2962540A1 (fr) 2010-07-09 2011-07-07 Capteur de pression piezo-resistant
CN201110190682.3A CN102374918B (zh) 2010-07-09 2011-07-08 压阻压力传感器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201010031197 DE102010031197A1 (de) 2010-07-09 2010-07-09 Piezoresistiver Drucksensor

Publications (1)

Publication Number Publication Date
DE102010031197A1 true DE102010031197A1 (de) 2012-01-12

Family

ID=44898766

Family Applications (1)

Application Number Title Priority Date Filing Date
DE201010031197 Withdrawn DE102010031197A1 (de) 2010-07-09 2010-07-09 Piezoresistiver Drucksensor

Country Status (4)

Country Link
CN (1) CN102374918B (fr)
DE (1) DE102010031197A1 (fr)
FR (1) FR2962540A1 (fr)
IT (1) ITMI20111240A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014018268A1 (de) * 2014-12-12 2016-06-16 Micronas Gmbh Kontaktiervorrichtung
WO2019020409A1 (fr) 2017-07-26 2019-01-31 Robert Bosch Gmbh Dispositif micromécanique et procédé de fabrication d'un dispositif micromécanique

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102749167B (zh) * 2012-06-20 2014-11-05 北京大学 一种含有硅通孔的压力传感器封装结构
CN102980712B (zh) * 2012-12-10 2014-12-24 厦门大学 一种具有自封装结构的贴片式单电阻压阻式压力传感器
GB2532806A (en) * 2014-11-25 2016-06-01 Continental Automotive Systems Us Inc Piezoresistive pressure sensor device
CN108328568B (zh) * 2018-02-09 2019-07-05 中北大学 一种适应于高温环境的SiC压阻式加速度传感器制备方法
DE102020105210A1 (de) * 2020-02-27 2021-09-02 Tdk Electronics Ag Sensor und Verfahren zur Herstellung eines Sensors

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0207450B1 (fr) * 1985-07-03 1990-09-12 Mitsuboshi Belting Ltd. Matériaux gommeux ayant une conductibilité sensible à la pression
US7368313B2 (en) * 2004-02-17 2008-05-06 Robert Bosch Gmbh Method of making a differential pressure sensor
JP2006105624A (ja) * 2004-09-30 2006-04-20 Sumitomo Osaka Cement Co Ltd ダイアフラムチップとそれを用いた圧力センサ及びダイアフラムチップの製造方法
CN100477257C (zh) * 2004-11-08 2009-04-08 株式会社电装 碳化硅半导体装置及其制造方法
JP4717653B2 (ja) * 2006-02-08 2011-07-06 パナソニック株式会社 半導体装置及び半導体装置の製造方法
CN101440481A (zh) * 2007-11-21 2009-05-27 中国科学院半导体研究所 氧化硅上制备低阻碳化硅的方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014018268A1 (de) * 2014-12-12 2016-06-16 Micronas Gmbh Kontaktiervorrichtung
DE102014018268B4 (de) 2014-12-12 2018-12-20 Tdk-Micronas Gmbh Kontaktiervorrichtung
WO2019020409A1 (fr) 2017-07-26 2019-01-31 Robert Bosch Gmbh Dispositif micromécanique et procédé de fabrication d'un dispositif micromécanique
DE102017212875A1 (de) 2017-07-26 2019-01-31 Robert Bosch Gmbh Mikromechanische Vorrichtung und Verfahren zur Herstellung einer mikromechanischen Vorrichtung
US11486782B2 (en) 2017-07-26 2022-11-01 Robert Bosch Gmbh Micromechanical device and method for manufacturing a micromechanical device

Also Published As

Publication number Publication date
CN102374918A (zh) 2012-03-14
CN102374918B (zh) 2015-06-17
ITMI20111240A1 (it) 2012-01-10
FR2962540A1 (fr) 2012-01-13

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Legal Events

Date Code Title Description
R012 Request for examination validly filed
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee